JPH0185814U

JPH0185814U -

Info

Publication number: JPH0185814U
Application number: JP18223487U
Authority: JP
Priority date: 1987-11-30
Filing date: 1987-11-30
Publication date: 1989-06-07

Description

[Brief explanation of the drawing]

第１図は本考案にかかる微分干渉顕微鏡の一実
施例の要部を示す断面図、第２図は第１図の矢示
−方向からみた断面図、第３図は従来の微分
干渉顕微鏡の全体構成を示す全体構成図、第４図
は第３図の矢示−方向からみた断面図、第５
図は第４図の矢示方向からみた従来のプリズム
微動装置の操作を示すための説明図で、Ａはプリ
ズム微動装置が引き出されている状態を、Ｂはプ
リズム微動装置が押し込まれている状態をそれぞ
れ示す図である。４……アーム、７……照明用光源、１１……鏡
筒、１２……対物レンズ、１４……ノマルスキー
・プリズム、１５……ビームスプリツタ、３０…
…収納溝、３１……プリズム微動装置、３２……
基台、３３……摺動台、３４……微動ねじ、３５
……変換機構、３５Ａ……ピボツト、３５Ｂ……
レバー。 Fig. 1 is a sectional view showing the main parts of an embodiment of a differential interference microscope according to the present invention, Fig. 2 is a sectional view taken from the direction indicated by the arrow in Fig. Figure 4 is a cross-sectional view taken from the direction of the arrow in Figure 3, and Figure 5 is a diagram showing the overall configuration.
The figure is an explanatory diagram to show the operation of the conventional prism fine movement device viewed from the direction of the arrow in Fig. 4, where A shows the state in which the prism fine movement device is pulled out, and B shows the state in which the prism fine movement device is pushed in. FIG. 4... Arm, 7... Light source for illumination, 11... Lens tube, 12... Objective lens, 14... Nomarski prism, 15... Beam splitter, 30...
... Storage groove, 31 ... Prism fine movement device, 32 ...
Base, 33...Sliding base, 34...Fine adjustment screw, 35
...Conversion mechanism, 35A...Pivot, 35B...
lever.

Claims

[Claims for Utility Model Registration] (1) An arm provided with an illumination light source, an objective lens disposed perpendicular to the axis of the arm and inside, guiding illumination light from the illumination light source to the objective lens. A differential interference microscope configured to include a beam splitter, a Nomarski prism, and a lens barrel equipped with a prism fine movement device for finely displacing the Nomarski prism, wherein the prism fine movement device is connected between the beam splitter and the objective lens. a storage groove formed in the lens barrel between the arms and the lens barrel at right angles to the axes of the arm and the lens barrel;
A base disposed within the storage groove, and a Nomarski prism mounted on the base so as to be movable in a direction intersecting the axis of the arm in a plane perpendicular to the axis of the lens barrel. a sliding table having a structure, a fine movement member provided on the base so as to be capable of fine movement in a direction perpendicular to the axes of the arm and the lens barrel, and a conversion for converting the displacement of the fine movement member into movement of the slide table. A differential interference microscope characterized by comprising a mechanism. (2) In paragraph 1 of the claims for utility model registration,
The conversion mechanism is rotatable around a shaft provided on the base in a plane perpendicular to the axis of the lens barrel, and one end is slidable on the sliding base. and a lever having the other end engaged with the fine movement member.