JPS5544760A - Automatic registering exposure system - Google Patents

Automatic registering exposure system

Info

Publication number
JPS5544760A
JPS5544760A JP11822978A JP11822978A JPS5544760A JP S5544760 A JPS5544760 A JP S5544760A JP 11822978 A JP11822978 A JP 11822978A JP 11822978 A JP11822978 A JP 11822978A JP S5544760 A JPS5544760 A JP S5544760A
Authority
JP
Japan
Prior art keywords
light
target
interferring
passing
step portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11822978A
Other languages
Japanese (ja)
Inventor
Toru Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP11822978A priority Critical patent/JPS5544760A/en
Publication of JPS5544760A publication Critical patent/JPS5544760A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To enable target pattern to be made in almost all the processes for manufacturing semiconductors by detecting interferring light from the coming on two light paths due to the variation in thickness of insulating film.
CONSTITUTION: The light having come out of a light source 8 is linearly polarized by passing through a polarizing plate 9. When applied to a Normarsky prism 14 after reflected by a half-mirror 13, this linear polalization is separated into two light whose oscillation planes are orthogonal with each other. The light is projected to a target on the surface of a semiconductor substrate 17 after passing through a lens 15 and a photo-mask 16. Since the target has a step portion formed of Si oxide film, the two light cause a difference in phase due to that between light paths after reflection. Further, the two light are combined into one light by the prism 14, generates interferring light when passing a polarizing plate 12, and reaches a photoelectric conversion element 10. The element 10 can be informed of the position of the target by detecting the interference of the interferring light. Thereby, detection becomes possible at the target pattern made only of the step portion of Si film without any Si step portion.
COPYRIGHT: (C)1980,JPO&Japio
JP11822978A 1978-09-25 1978-09-25 Automatic registering exposure system Pending JPS5544760A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11822978A JPS5544760A (en) 1978-09-25 1978-09-25 Automatic registering exposure system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11822978A JPS5544760A (en) 1978-09-25 1978-09-25 Automatic registering exposure system

Publications (1)

Publication Number Publication Date
JPS5544760A true JPS5544760A (en) 1980-03-29

Family

ID=14731413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11822978A Pending JPS5544760A (en) 1978-09-25 1978-09-25 Automatic registering exposure system

Country Status (1)

Country Link
JP (1) JPS5544760A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0185814U (en) * 1987-11-30 1989-06-07

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4722213U (en) * 1971-04-09 1972-11-13
JPS5270771A (en) * 1975-12-10 1977-06-13 Toshiba Corp Position matching method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4722213U (en) * 1971-04-09 1972-11-13
JPS5270771A (en) * 1975-12-10 1977-06-13 Toshiba Corp Position matching method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0185814U (en) * 1987-11-30 1989-06-07

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