JPH0186055U - - Google Patents

Info

Publication number
JPH0186055U
JPH0186055U JP1987181407U JP18140787U JPH0186055U JP H0186055 U JPH0186055 U JP H0186055U JP 1987181407 U JP1987181407 U JP 1987181407U JP 18140787 U JP18140787 U JP 18140787U JP H0186055 U JPH0186055 U JP H0186055U
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
load
load actuator
test piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987181407U
Other languages
English (en)
Other versions
JPH0614400Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987181407U priority Critical patent/JPH0614400Y2/ja
Publication of JPH0186055U publication Critical patent/JPH0186055U/ja
Application granted granted Critical
Publication of JPH0614400Y2 publication Critical patent/JPH0614400Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る走査電子顕微鏡付き材料
試験機の側面図である。 ２：空気ばね、１１：負荷アクチユエータ、１
２：サーボ弁、１４ａ，１４ｂ：ゴムホース、２
２：試料室、ＴＰ：試験片。

Claims (1)

    【実用新案登録請求の範囲】
  1. 試料室内に挿入された試験片を負荷アクチユエ
    ータにより負荷しつつ走査電子顕微鏡により観察
    する走査電子顕微鏡付き材料試験機であつて、前
    記負荷アクチユエータに供給される圧油の方向お
    よび流量を制御する弁手段を前記試験片とは除震
    手段を介して隔離配置するとともに、該弁手段と
    前記負荷アクチユエータとを弾性油圧管路により
    接続したことを特徴とする走査電子顕微鏡付き材
    料試験機。
JP1987181407U 1987-11-28 1987-11-28 走査電子顕微鏡付き材料試験機 Expired - Lifetime JPH0614400Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987181407U JPH0614400Y2 (ja) 1987-11-28 1987-11-28 走査電子顕微鏡付き材料試験機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987181407U JPH0614400Y2 (ja) 1987-11-28 1987-11-28 走査電子顕微鏡付き材料試験機

Publications (2)

Publication Number Publication Date
JPH0186055U true JPH0186055U (ja) 1989-06-07
JPH0614400Y2 JPH0614400Y2 (ja) 1994-04-13

Family

ID=31472891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987181407U Expired - Lifetime JPH0614400Y2 (ja) 1987-11-28 1987-11-28 走査電子顕微鏡付き材料試験機

Country Status (1)

Country Link
JP (1) JPH0614400Y2 (ja)

Also Published As

Publication number Publication date
JPH0614400Y2 (ja) 1994-04-13

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