JPH0189748U - - Google Patents

Description

[Brief explanation of drawings]

FIG. 1 is a schematic perspective view of the wafer transfer device of the present invention, FIG. 2 is a schematic perspective view of the wafer pusher, FIG. 3 is a schematic front view of the wafer pusher, and FIG.
The figure is a schematic diagram for explaining the transfer operation by the wafer transfer apparatus of the present invention, FIG. 5 is a schematic perspective view of the wafer transfer apparatus in the conventional example, and FIG. 6 is for explaining the transfer operation in the conventional example. FIG. 7 is a schematic perspective view of an orientation flat alignment device in a conventional example, and FIG. 8 is a schematic diagram illustrating an orientation flat alignment operation in a conventional example. 1...Wafer transfer device, 2...Wafer chuck, 3...Wafer pusher, 6, 6a, 6b...
...Carrier, 8...Flat type clamping plate, 9...L type clamping plate, 10...Campling part, 11...Support part, 12...
Roller, 13...Pitching member, OF...Orientation flat, W...Wafer.

Claims (1)

[Scope of Claim for Utility Model Registration] A wafer pusher that pushes up a wafer stored substantially vertically in a carrier and aligns the orientation flat of the wafer, and a wafer chuck that holds and moves the wafer pushed up by the wafer pusher. An apparatus capable of transferring a wafer from one carrier to another and aligning the orientation flat of the wafer, the wafer pusher comprising a roller for rotating the wafer in a substantially vertical plane, and the roller. and a pitch adjustment member that is movable up and down and supports the wafer while holding the wafer pitch. A wafer transfer device comprising: a support portion; and an L-shaped clamping plate that is formed into a substantially L-shape and can move toward and away from the flat clamping plate.