JPH0193733U - - Google Patents

Info

Publication number
JPH0193733U
JPH0193733U JP18945687U JP18945687U JPH0193733U JP H0193733 U JPH0193733 U JP H0193733U JP 18945687 U JP18945687 U JP 18945687U JP 18945687 U JP18945687 U JP 18945687U JP H0193733 U JPH0193733 U JP H0193733U
Authority
JP
Japan
Prior art keywords
robot
handled
allows
view
showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18945687U
Other languages
Japanese (ja)
Other versions
JPH0632684Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987189456U priority Critical patent/JPH0632684Y2/en
Publication of JPH0193733U publication Critical patent/JPH0193733U/ja
Application granted granted Critical
Publication of JPH0632684Y2 publication Critical patent/JPH0632684Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案によるロボツトを用いた搬送装
置の実施例の斜視図、第２図ａは第１図のロボツ
トによつてウエハカセツトをハンドリングする姿
勢を示す側面図、第２図ｂは第２図ａのウエハカ
セツトをウエハ処理装置へ搬入出する姿勢を示す
側面図、第３図は５軸多関節ロボツトの例を示す
斜視図、第４図は物品をハンドリングする場合の
４軸及び５軸の姿勢であつて、ａは４軸が垂直の
場合の状態を示す側面図、ｂは４軸が垂直でない
場合の状態を示す側面図、第５図ａは物品がロボ
ツト１軸旋回中心に対しラジアル方向にある場
合における物品のハンドリングをする姿勢の平面
図、第５図ｂは物品がロボツト１軸旋回中心に
対しラジアル方向にない場合における物品のハン
ドリングをする姿勢の平面図である。 １……５軸多関節ロボツト、２……スライド機
構、３……旋回機構、４Ａ，４Ｂ……カセツトボ
ツクス、５Ａ，５Ｂ，５Ｃ，５Ｄ……ウエハカセ
ツト、６……ウエハ処理装置。 FIG. 1 is a perspective view of an embodiment of a transfer device using a robot according to the present invention, FIG. 2a is a side view showing a posture in which a wafer cassette is handled by the robot of FIG. Fig. 2a is a side view showing the attitude of carrying the wafer cassette into and out of the wafer processing equipment, Fig. 3 is a perspective view showing an example of a 5-axis articulated robot, and Fig. 4 shows the 4-axis and 5-axis joint robot when handling articles. The postures of the axes are as follows: a is a side view showing the state when the four axes are perpendicular, b is a side view showing the state when the four axes are not perpendicular, and Fig. 5 a is a side view showing the state when the four axes are not perpendicular. On the other hand, FIG. 5B is a plan view of the handling posture of the article when the article is not in the radial direction relative to the robot's uniaxial rotation center. 1...5-axis multi-joint robot, 2...Slide mechanism, 3...Turning mechanism, 4A, 4B...Cassette box, 5A, 5B, 5C, 5D...Wafer cassette, 6...Wafer processing device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ５軸多関節ロボツトとハンドリングすべき物品
を直線スライド可能にした別置のスライド機構又
はハンドリングすべき物品を旋回中心周を旋回可
能にした別置の旋回機構とを組み合せ、それによ
りロボツトハンドリングの自由度を増すようにし
たことを特徴とするロボツトを用いた搬送装置。 Combining a 5-axis articulated robot with a separate sliding mechanism that allows the object to be handled to slide in a straight line or a separate rotating mechanism that allows the object to be handled to rotate around the center of rotation, thereby increasing the freedom of robot handling. A conveyance device using a robot, characterized in that the speed is increased.
JP1987189456U 1987-12-15 1987-12-15 Transport device using robot Expired - Lifetime JPH0632684Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987189456U JPH0632684Y2 (en) 1987-12-15 1987-12-15 Transport device using robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987189456U JPH0632684Y2 (en) 1987-12-15 1987-12-15 Transport device using robot

Publications (2)

Publication Number Publication Date
JPH0193733U true JPH0193733U (en) 1989-06-20
JPH0632684Y2 JPH0632684Y2 (en) 1994-08-24

Family

ID=31480486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987189456U Expired - Lifetime JPH0632684Y2 (en) 1987-12-15 1987-12-15 Transport device using robot

Country Status (1)

Country Link
JP (1) JPH0632684Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0725415A (en) * 1993-07-13 1995-01-27 Murata Mach Ltd Article transfer device
JPH0725414A (en) * 1993-07-13 1995-01-27 Murata Mach Ltd Article transfer device
WO2010070915A1 (en) * 2008-12-19 2010-06-24 株式会社川渕機械技術研究所 Linearly moving extendable mechanism and robot arm equipped with linearly moving extendable mechanism
JP2011139098A (en) * 1996-06-13 2011-07-14 Brooks Automation Inc Multi-level substrate processing apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203234A (en) * 1985-03-05 1986-09-09 Fujitsu Ltd Article carrier

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203234A (en) * 1985-03-05 1986-09-09 Fujitsu Ltd Article carrier

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0725415A (en) * 1993-07-13 1995-01-27 Murata Mach Ltd Article transfer device
JPH0725414A (en) * 1993-07-13 1995-01-27 Murata Mach Ltd Article transfer device
JP2011139098A (en) * 1996-06-13 2011-07-14 Brooks Automation Inc Multi-level substrate processing apparatus
WO2010070915A1 (en) * 2008-12-19 2010-06-24 株式会社川渕機械技術研究所 Linearly moving extendable mechanism and robot arm equipped with linearly moving extendable mechanism
JP5317362B2 (en) * 2008-12-19 2013-10-16 株式会社川渕機械技術研究所 Linear motion expansion / contraction mechanism and robot arm equipped with the linear motion expansion / contraction mechanism

Also Published As

Publication number Publication date
JPH0632684Y2 (en) 1994-08-24

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