JPH0197300U - - Google Patents
Info
- Publication number
- JPH0197300U JPH0197300U JP19290387U JP19290387U JPH0197300U JP H0197300 U JPH0197300 U JP H0197300U JP 19290387 U JP19290387 U JP 19290387U JP 19290387 U JP19290387 U JP 19290387U JP H0197300 U JPH0197300 U JP H0197300U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- electron beam
- scan
- tube
- irradiation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 239000011888 foil Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Recrystallisation Techniques (AREA)
Description
第１図は本考案の走査機構によるダブルウイン
ドウ電子線走査軌跡を示す平面図。第２図はその
ような走査軌跡を生ずるためのＹ方向、Ｘ方向走
査波形図。ａがＹ方向、ｂがＸ方向走査波形であ
る。第３図は従来例のダブルウインドウ電子線走
査軌跡を示す平面図。第４図は第３図の走査軌跡
を生ずるためのＹ方向、Ｘ方向走査波形図。第５
図は走査型電子線照射装置の上部のみの正面図。
第６図は走査管下部の照射窓の部分の断面図。
１……走査管、２……走査管フランジ、３……
窓箔押えフランジ、４……照射窓、５……窓箔、
６……被処理物、１０……水冷パイプ。
FIG. 1 is a plan view showing a double window electron beam scanning trajectory by the scanning mechanism of the present invention. FIG. 2 is a Y-direction and X-direction scanning waveform diagram for generating such a scanning locus. a is the Y-direction scanning waveform, and b is the X-direction scanning waveform. FIG. 3 is a plan view showing a conventional double window electron beam scanning locus. FIG. 4 is a Y-direction and X-direction scanning waveform chart for generating the scanning locus shown in FIG. 3. Fifth
The figure is a front view of only the upper part of the scanning electron beam irradiation device.
FIG. 6 is a sectional view of the irradiation window at the bottom of the scanning tube. 1... Scan tube, 2... Scan tube flange, 3...
Window foil pressing flange, 4... Irradiation window, 5... Window foil,
6...Object to be treated, 10...Water cooling pipe.
Claims (1)
、下方の拡がつた走査管に於て長手方向であるｙ
方向と、これに直角なｘ方向に電子線を走査し、
走査管下部のふたつの照射窓の窓箔を通して電子
線を大気中へ飛出させ、被処理物に照射すること
とし、ｙ方向走査、ｘ方向走査は走査管の上部に
設けたマグネツトのコイルにそれぞれ三角波、矩
形波を同期して流す事によつて行う事とした電子
線照射装置に於て、ｘ方向走査に要する時間をτ
として、ｘ方向走査の切換え時刻よりτ／２後に
、ｙ方向走査を切換える事とした電子線照射装置
。 An electron beam is generated in a high vacuum, accelerated, and transmitted in the longitudinal direction in a downwardly expanding scanning tube.
direction and the x direction perpendicular to this,
The electron beam is ejected into the atmosphere through the window foil of the two irradiation windows at the bottom of the scanning tube, and irradiates the object to be processed.The y-direction scan and the x-direction scan are performed using a magnet coil installed at the top of the scan tube. In an electron beam irradiation device that uses triangular waves and rectangular waves in synchronization, the time required for scanning in the x direction is τ.
In this electron beam irradiation device, the y-direction scanning is switched τ/2 after the x-direction scanning switching time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19290387U JPH0518720Y2 (en) | 1987-12-18 | 1987-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19290387U JPH0518720Y2 (en) | 1987-12-18 | 1987-12-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197300U true JPH0197300U (en) | 1989-06-28 |
| JPH0518720Y2 JPH0518720Y2 (en) | 1993-05-18 |
Family
ID=31483730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19290387U Expired - Lifetime JPH0518720Y2 (en) | 1987-12-18 | 1987-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518720Y2 (en) |
-
1987
- 1987-12-18 JP JP19290387U patent/JPH0518720Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518720Y2 (en) | 1993-05-18 |
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