JPH02106468U - - Google Patents
Info
- Publication number
- JPH02106468U JPH02106468U JP1989015538U JP1553889U JPH02106468U JP H02106468 U JPH02106468 U JP H02106468U JP 1989015538 U JP1989015538 U JP 1989015538U JP 1553889 U JP1553889 U JP 1553889U JP H02106468 U JPH02106468 U JP H02106468U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vapor phase
- phase growth
- protection plate
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015538U JPH02106468U (da) | 1989-02-13 | 1989-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989015538U JPH02106468U (da) | 1989-02-13 | 1989-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106468U true JPH02106468U (da) | 1990-08-23 |
Family
ID=31227676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989015538U Pending JPH02106468U (da) | 1989-02-13 | 1989-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106468U (da) |
-
1989
- 1989-02-13 JP JP1989015538U patent/JPH02106468U/ja active Pending
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