JPH02109205U - - Google Patents
Info
- Publication number
- JPH02109205U JPH02109205U JP1653389U JP1653389U JPH02109205U JP H02109205 U JPH02109205 U JP H02109205U JP 1653389 U JP1653389 U JP 1653389U JP 1653389 U JP1653389 U JP 1653389U JP H02109205 U JPH02109205 U JP H02109205U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- sample
- element body
- piezoelectric element
- detection mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 7
- 230000005641 tunneling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は第一実施例構造の概念図、第２図は第
二実施例構造の概念図、第３図は第三実施例構造
の概念図、そして、第４図はトンネル領域検出系
概念図についてそれぞれ示した図である。
１……探針、２……試料、４……微動機構、８
……試料台、９……本体、１０……コマ部、１１
……圧電体、１２……高感度電圧検出器、１３…
…粗動機構駆動制御系。
Fig. 1 is a conceptual diagram of the structure of the first embodiment, Fig. 2 is a conceptual diagram of the structure of the second embodiment, Fig. 3 is a conceptual diagram of the structure of the third embodiment, and Fig. 4 is the conceptual diagram of the tunnel area detection system. FIG. 1... Probe, 2... Sample, 4... Fine movement mechanism, 8
... Sample stage, 9 ... Main body, 10 ... Frame section, 11
... Piezoelectric body, 12 ... High-sensitivity voltage detector, 13 ...
...Coarse movement mechanism drive control system.
Claims (1)
より圧電素子体を変形し、その圧電素子体又は電
歪素子体の変形により発生する電圧を検出するこ
とにより探針と試料の接触を検出するようにした
ことを特徴とする探針・試料接触検出機構。 (2) 探針を圧電素子体に設けて、試料に対して
探針が微小移動できる微動機構とし、この微動機
構又は、試料側に圧力検出用のもう一つの圧電素
子体を設けたことを特徴とする探針・試料接触検
出機構。 (3) 探針を三次元に動作させるために設けられ
た圧電素子体に電極を分離作製し、この圧電素子
体に圧力検出機能を持たせたことを特徴とする探
針・試料接触検出機構。 (4) 走査型トンネル顕微鏡に設けられている請
求項１から請求項３記載の探針・試料接触検出機
構。[Claims for Utility Model Registration] (1) By deforming a piezoelectric element body by the pressure generated by contact between the probe and the sample, and detecting the voltage generated by the deformation of the piezoelectric element body or electrostrictive element body. A probe/sample contact detection mechanism characterized by detecting contact between a probe and a sample. (2) A probe is provided on a piezoelectric element body to create a fine movement mechanism that allows the probe to move minutely relative to the sample, and this fine movement mechanism or another piezoelectric element body for pressure detection is provided on the sample side. Features a probe/sample contact detection mechanism. (3) A probe/sample contact detection mechanism characterized in that an electrode is separately fabricated on a piezoelectric element body provided to move the probe three-dimensionally, and this piezoelectric element body is provided with a pressure detection function. . (4) The probe/sample contact detection mechanism according to any one of claims 1 to 3, which is provided in a scanning tunneling microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653389U JPH02109205U (en) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653389U JPH02109205U (en) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02109205U true JPH02109205U (en) | 1990-08-31 |
Family
ID=31229552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1653389U Pending JPH02109205U (en) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02109205U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230028000A (en) * | 2021-08-20 | 2023-02-28 | 에이티아이 주식회사 | Apparatus for Measuring Bump Bonding Strength of Specimen Surface |
-
1989
- 1989-02-15 JP JP1653389U patent/JPH02109205U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230028000A (en) * | 2021-08-20 | 2023-02-28 | 에이티아이 주식회사 | Apparatus for Measuring Bump Bonding Strength of Specimen Surface |
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