JPH02126424U - - Google Patents

Info

Publication number
JPH02126424U
JPH02126424U JP3361789U JP3361789U JPH02126424U JP H02126424 U JPH02126424 U JP H02126424U JP 3361789 U JP3361789 U JP 3361789U JP 3361789 U JP3361789 U JP 3361789U JP H02126424 U JPH02126424 U JP H02126424U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
frame
connecting portion
wafer
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3361789U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3361789U priority Critical patent/JPH02126424U/ja
Publication of JPH02126424U publication Critical patent/JPH02126424U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【図面の簡単な説明】
第１図Ａ，Ｂは本考案の圧電振動子ウエハの平
面図でＡはウエハ状態、Ｂは切離した状態を示す
。第２図Ａ，Ｂは従来の圧電振動子ウエハの平面
図でＡはウエハ状態、Ｂは切離した状態を示すも
のである。 １……フレーム、２……圧電振動子、３，３′
……連結部、４，４′……クラツク。

Claims (1)

    【実用新案登録請求の範囲】
  1. 薄い水晶坂内のフレームに、連結部により多数
    個整列して連装された圧電振動子から成り、フオ
    トリソグラフイー加工により成形される圧電振動
    子ウエハにおいて、前記圧電振動子と前記フレー
    ムを連結する前記連結部を２ケ所に設けたことを
    特徴とする圧電振動子ウエハ。
JP3361789U 1989-03-24 1989-03-24 Pending JPH02126424U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3361789U JPH02126424U (ja) 1989-03-24 1989-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3361789U JPH02126424U (ja) 1989-03-24 1989-03-24

Publications (1)

Publication Number Publication Date
JPH02126424U true JPH02126424U (ja) 1990-10-18

Family

ID=31537416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3361789U Pending JPH02126424U (ja) 1989-03-24 1989-03-24

Country Status (1)

Country Link
JP (1) JPH02126424U (ja)

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