JPH02132933U - - Google Patents

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Publication number
JPH02132933U
JPH02132933U JP4163689U JP4163689U JPH02132933U JP H02132933 U JPH02132933 U JP H02132933U JP 4163689 U JP4163689 U JP 4163689U JP 4163689 U JP4163689 U JP 4163689U JP H02132933 U JPH02132933 U JP H02132933U
Authority
JP
Japan
Prior art keywords
resist
substrate
spin chuck
cleaning
spin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4163689U
Other languages
English (en)
Other versions
JPH0713211Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989041636U priority Critical patent/JPH0713211Y2/ja
Publication of JPH02132933U publication Critical patent/JPH02132933U/ja
Application granted granted Critical
Publication of JPH0713211Y2 publication Critical patent/JPH0713211Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は、本考案のスピンチヤツク洗浄機能付
きレジスト塗布装置の断面側面図である。 １……塗布カツプ、２……密閉カツプ、３……
密閉カツプ支持部、４……洗浄ノズル、５……レ
ジスト塗布ノズル、６……スピンチヤツク、１０
……基板吸着面、１２……チヤツク洗浄ブラシ、
１３……ブラシ回転モータ、１４……ブラシアー
ム、１５……アーム移動モータ。

Claims (1)

    【実用新案登録請求の範囲】
  1. スピン方式にてレジストを基板に塗布する装置
    において、基板固定支持用スピンチヤツクの表面
    に移動可能なチヤツク洗浄ブラシと洗浄液供給用
    洗浄ノズルとを設け、レジストを塗布した基板の
    搬出後に、スピンチヤツク表面に付着したレジス
    トを洗浄するようにしたことを特徴とするスピン
    チヤツク洗浄機能付きレジスト塗布装置。
JP1989041636U 1989-04-11 1989-04-11 スピンチャック洗浄機能付きレジスト塗布装置 Expired - Lifetime JPH0713211Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989041636U JPH0713211Y2 (ja) 1989-04-11 1989-04-11 スピンチャック洗浄機能付きレジスト塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989041636U JPH0713211Y2 (ja) 1989-04-11 1989-04-11 スピンチャック洗浄機能付きレジスト塗布装置

Publications (2)

Publication Number Publication Date
JPH02132933U true JPH02132933U (ja) 1990-11-05
JPH0713211Y2 JPH0713211Y2 (ja) 1995-03-29

Family

ID=31552475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989041636U Expired - Lifetime JPH0713211Y2 (ja) 1989-04-11 1989-04-11 スピンチャック洗浄機能付きレジスト塗布装置

Country Status (1)

Country Link
JP (1) JPH0713211Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066447A (ja) * 2004-08-24 2006-03-09 Komatsu Electronic Metals Co Ltd ワークチャックの洗浄装置、ワークチャックの洗浄方法、及びワークチャックの洗浄装置を備えた研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (ja) * 1971-11-20 1973-09-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4863709A (ja) * 1971-11-20 1973-09-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066447A (ja) * 2004-08-24 2006-03-09 Komatsu Electronic Metals Co Ltd ワークチャックの洗浄装置、ワークチャックの洗浄方法、及びワークチャックの洗浄装置を備えた研磨装置

Also Published As

Publication number Publication date
JPH0713211Y2 (ja) 1995-03-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term