JPH02138416U - - Google Patents

Info

Publication number
JPH02138416U
JPH02138416U JP4869789U JP4869789U JPH02138416U JP H02138416 U JPH02138416 U JP H02138416U JP 4869789 U JP4869789 U JP 4869789U JP 4869789 U JP4869789 U JP 4869789U JP H02138416 U JPH02138416 U JP H02138416U
Authority
JP
Japan
Prior art keywords
light
exposure
mask
transmitting material
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4869789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4869789U priority Critical patent/JPH02138416U/ja
Publication of JPH02138416U publication Critical patent/JPH02138416U/ja
Pending legal-status Critical Current

Links

JP4869789U 1989-04-24 1989-04-24 Pending JPH02138416U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4869789U JPH02138416U (fr) 1989-04-24 1989-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4869789U JPH02138416U (fr) 1989-04-24 1989-04-24

Publications (1)

Publication Number Publication Date
JPH02138416U true JPH02138416U (fr) 1990-11-19

Family

ID=31565744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4869789U Pending JPH02138416U (fr) 1989-04-24 1989-04-24

Country Status (1)

Country Link
JP (1) JPH02138416U (fr)

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