JPH02140841U - - Google Patents
Info
- Publication number
- JPH02140841U JPH02140841U JP5017089U JP5017089U JPH02140841U JP H02140841 U JPH02140841 U JP H02140841U JP 5017089 U JP5017089 U JP 5017089U JP 5017089 U JP5017089 U JP 5017089U JP H02140841 U JPH02140841 U JP H02140841U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- semiconductor device
- hook
- device processing
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案に係る一実施例の要部を示す正
面図、第２図は第１図のＡ−Ａ矢視図、第３図は
第１図のＢ−Ｂ矢視図、第４図は従来例を示す断
面図である。
１……真空容器、３……チヤンバ、５……ベー
スプレート、２７……電極板、４０……フツクプ
レート、４２……板バネを示す。
FIG. 1 is a front view showing essential parts of an embodiment of the present invention, FIG. 2 is a view taken along the line A-A in FIG. 1, and FIG. FIG. 4 is a sectional view showing a conventional example. 1... Vacuum vessel, 3... Chamber, 5... Base plate, 27... Electrode plate, 40... Hook plate, 42... Leaf spring.
Claims (1)
バイス処理装置のチヤンバ構造に於いて、ベース
プレートに対向する基板、該基板に取付けられる
ガス板を兼ねる電極板のうちいずれか一方にフツ
クプレートを設け、いずれか他方の該フツクプレ
ートに対峙する位置にＵ字状に形成した板バネを
設け、前記フツクプレートと板バネとを係合可能
としたことを特徴とする半導体デバイス処理装置
のチヤンバ構造。 In the chamber structure of semiconductor device processing equipment in which an independent airtight chamber is formed in a vacuum container, a hook plate is provided on either a substrate facing the base plate or an electrode plate attached to the substrate that also serves as a gas plate. A chamber structure for a semiconductor device processing apparatus, characterized in that a U-shaped plate spring is provided at a position facing the other hook plate, and the hook plate and the plate spring can be engaged with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5017089U JPH02140841U (en) | 1989-04-27 | 1989-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5017089U JPH02140841U (en) | 1989-04-27 | 1989-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140841U true JPH02140841U (en) | 1990-11-26 |
Family
ID=31568491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5017089U Pending JPH02140841U (en) | 1989-04-27 | 1989-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140841U (en) |
-
1989
- 1989-04-27 JP JP5017089U patent/JPH02140841U/ja active Pending
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