JPS6190854U - - Google Patents
Info
- Publication number
- JPS6190854U JPS6190854U JP17242184U JP17242184U JPS6190854U JP S6190854 U JPS6190854 U JP S6190854U JP 17242184 U JP17242184 U JP 17242184U JP 17242184 U JP17242184 U JP 17242184U JP S6190854 U JPS6190854 U JP S6190854U
- Authority
- JP
- Japan
- Prior art keywords
- flat
- engages
- processing apparatus
- vacuum processing
- circumferential surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図は従来例の一部截断側面図、第２図は本
考案の実施例の正面図、第３図はその平面図、第
４図は第２図の−線部分の一部を省略した拡
大断面図、第５図及び第６図は本考案の他の実施
例の一部を省略した断面図である。
１…取付部材、２…前面、３…平坦部材、７…
凹孔、８…周面、９…回転部材、１１…スプリン
グプランジヤ、１４…ストツパ。
Fig. 1 is a partially cut-away side view of the conventional example, Fig. 2 is a front view of the embodiment of the present invention, Fig. 3 is a plan view thereof, and Fig. 4 partially omits the - line part in Fig. 2. The enlarged sectional view shown in FIG. 5, and FIG. 6 are sectional views with some parts omitted of other embodiments of the present invention. 1...Mounting member, 2...Front surface, 3...Flat member, 7...
Concave hole, 8...Surrounding surface, 9...Rotating member, 11...Spring plunger, 14...Stopper.
Claims (1)
れた平板電極その他の平坦面を有する取付部材の
前面に、トレー、基板ホルダ等の平坦部材を係脱
自在に取付けするようにしたものに於いて、該平
坦部材の周面に凹孔を形成し、該取付部材に該平
坦部材の周面に沿つて回転自在で且つ前記凹孔と
係合するスプリングプランジヤを備えた回転部材
を設け、該プランジヤが該平坦部材の凹孔と係合
する取付位置より前方へ該回転部材が回転するの
を防止するストツパを設けて成る真空処理装置に
於ける部材係着装置。 In a device in which a flat member such as a tray or a substrate holder is removably attached to the front surface of a flat plate electrode or other attachment member having a flat surface provided in a vacuum processing apparatus such as a sputtering apparatus, A recessed hole is formed in the circumferential surface of the member, and the mounting member is provided with a rotating member that is rotatable along the circumferential surface of the flat member and includes a spring plunger that engages with the recessed hole, and the plunger is attached to the flat member. A member fastening device for a vacuum processing apparatus, comprising a stopper that prevents the rotary member from rotating forward from a mounting position where it engages with a concave hole of the member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17242184U JPH037391Y2 (en) | 1984-11-15 | 1984-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6190854U true JPS6190854U (en) | 1986-06-12 |
| JPH037391Y2 JPH037391Y2 (en) | 1991-02-25 |
Family
ID=30730087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17242184U Expired JPH037391Y2 (en) | 1984-11-15 | 1984-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037391Y2 (en) |
-
1984
- 1984-11-15 JP JP17242184U patent/JPH037391Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037391Y2 (en) | 1991-02-25 |