JPH02140980U - - Google Patents
Info
- Publication number
- JPH02140980U JPH02140980U JP1989046465U JP4646589U JPH02140980U JP H02140980 U JPH02140980 U JP H02140980U JP 1989046465 U JP1989046465 U JP 1989046465U JP 4646589 U JP4646589 U JP 4646589U JP H02140980 U JPH02140980 U JP H02140980U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- chamber wall
- radiation screen
- upper chamber
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046465U JPH02140980U (pt) | 1989-04-20 | 1989-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046465U JPH02140980U (pt) | 1989-04-20 | 1989-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140980U true JPH02140980U (pt) | 1990-11-26 |
Family
ID=31561568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989046465U Pending JPH02140980U (pt) | 1989-04-20 | 1989-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140980U (pt) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0570283A (ja) * | 1991-03-20 | 1993-03-23 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法及び装置 |
| JPH0728964U (ja) * | 1993-10-29 | 1995-05-30 | 住友シチックス株式会社 | 単結晶成長装置 |
| US7538350B2 (en) | 2001-12-28 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor thin film device |
-
1989
- 1989-04-20 JP JP1989046465U patent/JPH02140980U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0570283A (ja) * | 1991-03-20 | 1993-03-23 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法及び装置 |
| JPH0728964U (ja) * | 1993-10-29 | 1995-05-30 | 住友シチックス株式会社 | 単結晶成長装置 |
| US7538350B2 (en) | 2001-12-28 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor thin film device |
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