JPH0216052U - - Google Patents

Info

Publication number
JPH0216052U
JPH0216052U JP9516888U JP9516888U JPH0216052U JP H0216052 U JPH0216052 U JP H0216052U JP 9516888 U JP9516888 U JP 9516888U JP 9516888 U JP9516888 U JP 9516888U JP H0216052 U JPH0216052 U JP H0216052U
Authority
JP
Japan
Prior art keywords
gas
heater
membranes
insulating film
temperature side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9516888U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9516888U priority Critical patent/JPH0216052U/ja
Publication of JPH0216052U publication Critical patent/JPH0216052U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【図面の簡単な説明】
第１図は実施例に用いたガスセンサの断面図、
第２図はその平面図、第３図はその―方向断
面図である。第４図は実施例のガス検出装置の回
路図、第５図はその動作波形図で、１はヒータ膜
６の動作を、２はヒータ膜８の動作を現す。第６
図は他の実施例の回路図、第７図はその動作波形
図で、１はヒータ膜６の動作を、２はヒータ膜８
の動作を現す。

Claims (1)

  1. 【実用新案登録請求の範囲】 耐熱絶縁基板上に２つのヒータ膜を設けて、そ
    の上部を絶縁膜で被覆し、絶縁膜上の各ヒータ膜
    の上部の位置には、同一の金属酸化物半導体を用
    いた２つのガス検出膜を設けて、ガスセンサとす
    ると共に、 ２つのヒータ膜への電力を交互に変化させて、
    各検出膜の温度を高温側と低温側との少なくとも
    ２種の温度に交互に変化させるための手段と、 高温側の検出膜の抵抗値から第１のガスを、低
    温側の検出膜の抵抗値から第２のガスを検出する
    ための手段とを設けたガス検出装置。
JP9516888U 1988-07-19 1988-07-19 Pending JPH0216052U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9516888U JPH0216052U (ja) 1988-07-19 1988-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9516888U JPH0216052U (ja) 1988-07-19 1988-07-19

Publications (1)

Publication Number Publication Date
JPH0216052U true JPH0216052U (ja) 1990-02-01

Family

ID=31319796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9516888U Pending JPH0216052U (ja) 1988-07-19 1988-07-19

Country Status (1)

Country Link
JP (1) JPH0216052U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04338290A (ja) * 1991-05-15 1992-11-25 Matsushita Electric Ind Co Ltd 水浄化装置
JP2008058214A (ja) * 2006-09-01 2008-03-13 Figaro Eng Inc ガス検出装置とガス検出装置の自己診断方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04338290A (ja) * 1991-05-15 1992-11-25 Matsushita Electric Ind Co Ltd 水浄化装置
JP2008058214A (ja) * 2006-09-01 2008-03-13 Figaro Eng Inc ガス検出装置とガス検出装置の自己診断方法

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