JPH021856U - - Google Patents
Info
- Publication number
- JPH021856U JPH021856U JP7832788U JP7832788U JPH021856U JP H021856 U JPH021856 U JP H021856U JP 7832788 U JP7832788 U JP 7832788U JP 7832788 U JP7832788 U JP 7832788U JP H021856 U JPH021856 U JP H021856U
- Authority
- JP
- Japan
- Prior art keywords
- lens barrel
- electron microscope
- optical axis
- vacuum
- separated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本案の実施例を示す図、第２図は他の
実施例を示す図である。
１……架台、２……鏡筒部、３……観察室、４
……電子銃室、５……リフト、６……リフトアー
ム、７……リフトハンドル、８……ヒータ、９…
…ハウジング、１０……フイラメント、１１……
真空装置、１２……ベローズ、１３……ベローフ
ランジ、１４……電子レンズ、１５……調節ネジ
、１６……薄肉パイプ。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing another embodiment. 1... mount, 2... lens barrel section, 3... observation room, 4
...Electron gun chamber, 5...Lift, 6...Lift arm, 7...Lift handle, 8...Heater, 9...
...Housing, 10...Filament, 11...
Vacuum device, 12... Bellows, 13... Bellows flange, 14... Electronic lens, 15... Adjustment screw, 16... Thin wall pipe.
Claims (1)
し、持ち上げても真空はベローズにて保持されか
つ、加熱部分らの温度影響を最少にするようにし
たことを特徴とする電子顕微鏡。 ２ 鏡筒を切り離し、真空シール部材は、鏡筒の
光軸調整可動部材に連結していることを特徴とす
る電子顕微鏡。 ３ 鏡筒部を切り離し真空を保持する部材は光軸
方向に伸縮またはシール部材がすべるように薄肉
パイプで構成し、光軸と直角方向にも可動可能と
したことを特徴とする電子顕微鏡。[Claims for Utility Model Registration] 1. In an electron microscope, even if the middle part of the lens barrel is separated and lifted, the vacuum is maintained by a bellows, and the temperature influence of the heated parts is minimized. Characteristic electron microscope. 2. An electron microscope characterized in that the lens barrel is separated and the vacuum seal member is connected to an optical axis adjustment movable member of the lens barrel. 3. An electron microscope characterized in that the member for separating the lens barrel and maintaining the vacuum is made of a thin-walled pipe so that it can be expanded and contracted in the direction of the optical axis, or the sealing member can slide, and it is also movable in the direction perpendicular to the optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7832788U JPH021856U (en) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7832788U JPH021856U (en) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH021856U true JPH021856U (en) | 1990-01-09 |
Family
ID=31303261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7832788U Pending JPH021856U (en) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH021856U (en) |
-
1988
- 1988-06-15 JP JP7832788U patent/JPH021856U/ja active Pending
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