JPH0222364U - - Google Patents
Info
- Publication number
- JPH0222364U JPH0222364U JP9798588U JP9798588U JPH0222364U JP H0222364 U JPH0222364 U JP H0222364U JP 9798588 U JP9798588 U JP 9798588U JP 9798588 U JP9798588 U JP 9798588U JP H0222364 U JPH0222364 U JP H0222364U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- observation window
- vacuum evaporation
- cylindrical body
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims 3
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図ａは本考案の内部観察窓の断面図、ｂは
そのＡＡ矢視図、第２図は本考案の他の実施例の
断面図、第３図ａは反射鏡を有する実施例の断面
図、ｂはＡＡ矢視図、第４図ａは従来の内部観察
窓の見取図、ｂはそのＡＡ矢視図である。
１……真空槽の壁、２……筒体、３……透明板
、４……ベローズ、５……筒体支持用枠、６……
突起、７……軸、８……るつぼ、９……蒸発物、
１０……反射鏡、１１……腕、１２……治具、１
３……Ｏリング。
Fig. 1a is a cross-sectional view of the internal observation window of the present invention, b is a view taken along arrow AA, Fig. 2 is a cross-sectional view of another embodiment of the present invention, and Fig. 3a is a cross-sectional view of an embodiment with a reflecting mirror. In the cross-sectional view, b is a view taken along arrow AA, FIG. 4a is a sketch of a conventional internal observation window, and b is a view taken along arrow AA. DESCRIPTION OF SYMBOLS 1...Wall of vacuum chamber, 2...Cylinder, 3...Transparent plate, 4...Bellows, 5...Cylinder support frame, 6...
Protrusion, 7... Axis, 8... Crucible, 9... Evaporated matter,
10...Reflector, 11...Arm, 12...Jig, 1
3...O-ring.
Claims (1)
該開口部内で内部に透明板を嵌着した筒体を上下
左右に傾動可能に支持し、かつ該真空槽壁面と該
筒体とをベローズで気密に接続したことを特徴と
する真空蒸着装置の内部観察用窓。 ２ 請求項１記載の真空槽内に反射鏡を設けたこ
とを特徴とする真空蒸着装置の内部観察用窓。[Scope of claim for utility model registration] 1. An opening is provided on the wall of a vacuum chamber of a vacuum evaporation device,
A vacuum evaporation apparatus characterized in that a cylindrical body with a transparent plate fitted inside the opening is supported so as to be tiltable vertically and horizontally, and the wall surface of the vacuum chamber and the cylindrical body are airtightly connected by a bellows. Internal observation window. 2. An internal observation window for a vacuum evaporation apparatus, characterized in that a reflecting mirror is provided in the vacuum chamber according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9798588U JPH0222364U (en) | 1988-07-26 | 1988-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9798588U JPH0222364U (en) | 1988-07-26 | 1988-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222364U true JPH0222364U (en) | 1990-02-14 |
Family
ID=31323848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9798588U Pending JPH0222364U (en) | 1988-07-26 | 1988-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222364U (en) |
-
1988
- 1988-07-26 JP JP9798588U patent/JPH0222364U/ja active Pending