JPH02190860A - Liquid photosensitive resin composition - Google Patents
Liquid photosensitive resin compositionInfo
- Publication number
- JPH02190860A JPH02190860A JP1126389A JP1126389A JPH02190860A JP H02190860 A JPH02190860 A JP H02190860A JP 1126389 A JP1126389 A JP 1126389A JP 1126389 A JP1126389 A JP 1126389A JP H02190860 A JPH02190860 A JP H02190860A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- photosensitive resin
- resin composition
- anhydride
- liquid photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims description 66
- 239000011342 resin composition Substances 0.000 title claims description 55
- 239000004593 Epoxy Substances 0.000 claims abstract description 16
- 229920005990 polystyrene resin Polymers 0.000 claims abstract description 14
- 239000000126 substance Substances 0.000 claims abstract description 14
- 150000008065 acid anhydrides Chemical class 0.000 claims abstract description 13
- 229920000642 polymer Polymers 0.000 claims abstract description 11
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 10
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 10
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 7
- 239000003054 catalyst Substances 0.000 claims abstract description 6
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims abstract description 6
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract 2
- 239000001257 hydrogen Substances 0.000 claims abstract 2
- 150000001875 compounds Chemical class 0.000 claims description 28
- 239000003960 organic solvent Substances 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- 229920005989 resin Polymers 0.000 abstract description 16
- 239000011347 resin Substances 0.000 abstract description 16
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 150000007519 polyprotic acids Polymers 0.000 abstract description 8
- 239000003999 initiator Substances 0.000 abstract description 7
- 239000002904 solvent Substances 0.000 abstract description 4
- -1 4-isopropenylphenylglycidyl Chemical group 0.000 description 56
- 238000000034 method Methods 0.000 description 26
- 238000000576 coating method Methods 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 20
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 16
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 15
- 239000003822 epoxy resin Substances 0.000 description 15
- 229920000647 polyepoxide Polymers 0.000 description 15
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 14
- 239000003795 chemical substances by application Substances 0.000 description 14
- 239000000203 mixture Substances 0.000 description 14
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 12
- 239000002253 acid Substances 0.000 description 12
- 238000003786 synthesis reaction Methods 0.000 description 12
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 239000002518 antifoaming agent Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 7
- 150000008064 anhydrides Chemical class 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 150000002148 esters Chemical class 0.000 description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- 229920000768 polyamine Polymers 0.000 description 7
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 239000002202 Polyethylene glycol Substances 0.000 description 6
- 238000001723 curing Methods 0.000 description 6
- 238000011161 development Methods 0.000 description 6
- 230000018109 developmental process Effects 0.000 description 6
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000004014 plasticizer Substances 0.000 description 6
- 229920001223 polyethylene glycol Polymers 0.000 description 6
- 238000011417 postcuring Methods 0.000 description 6
- 229940014800 succinic anhydride Drugs 0.000 description 6
- 229920002554 vinyl polymer Polymers 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 5
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 5
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 5
- 150000001412 amines Chemical class 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000600 sorbitol Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 description 4
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 4
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 125000002723 alicyclic group Chemical group 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 4
- WGQKYBSKWIADBV-UHFFFAOYSA-N benzylamine Chemical compound NCC1=CC=CC=C1 WGQKYBSKWIADBV-UHFFFAOYSA-N 0.000 description 4
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000003063 flame retardant Substances 0.000 description 4
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 4
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 4
- 238000007665 sagging Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000007983 Tris buffer Substances 0.000 description 3
- 239000002318 adhesion promoter Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 239000000539 dimer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 239000000976 ink Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- 150000003512 tertiary amines Chemical class 0.000 description 3
- 229960004418 trolamine Drugs 0.000 description 3
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 2
- QIVUCLWGARAQIO-OLIXTKCUSA-N (3s)-n-[(3s,5s,6r)-6-methyl-2-oxo-1-(2,2,2-trifluoroethyl)-5-(2,3,6-trifluorophenyl)piperidin-3-yl]-2-oxospiro[1h-pyrrolo[2,3-b]pyridine-3,6'-5,7-dihydrocyclopenta[b]pyridine]-3'-carboxamide Chemical compound C1([C@H]2[C@H](N(C(=O)[C@@H](NC(=O)C=3C=C4C[C@]5(CC4=NC=3)C3=CC=CN=C3NC5=O)C2)CC(F)(F)F)C)=C(F)C=CC(F)=C1F QIVUCLWGARAQIO-OLIXTKCUSA-N 0.000 description 2
- DPZSNGJNFHWQDC-ARJAWSKDSA-N (z)-2,3-diaminobut-2-enedinitrile Chemical class N#CC(/N)=C(/N)C#N DPZSNGJNFHWQDC-ARJAWSKDSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 2
- 229940035437 1,3-propanediol Drugs 0.000 description 2
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical compound C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 2
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical compound CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 2
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 description 2
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- AAUXVPAKDMCMMN-UHFFFAOYSA-N 2-[(4-ethenylphenoxy)methyl]oxirane Chemical compound C1=CC(C=C)=CC=C1OCC1OC1 AAUXVPAKDMCMMN-UHFFFAOYSA-N 0.000 description 2
- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- YIWUKEYIRIRTPP-UHFFFAOYSA-N 2-ethylhexan-1-ol Chemical compound CCCCC(CC)CO YIWUKEYIRIRTPP-UHFFFAOYSA-N 0.000 description 2
- SZNYYWIUQFZLLT-UHFFFAOYSA-N 2-methyl-1-(2-methylpropoxy)propane Chemical compound CC(C)COCC(C)C SZNYYWIUQFZLLT-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- KUDUQBURMYMBIJ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl prop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=C KUDUQBURMYMBIJ-UHFFFAOYSA-N 0.000 description 2
- ZAXCZCOUDLENMH-UHFFFAOYSA-N 3,3,3-tetramine Chemical compound NCCCNCCCNCCCN ZAXCZCOUDLENMH-UHFFFAOYSA-N 0.000 description 2
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 2
- NTPLXRHDUXRPNE-UHFFFAOYSA-N 4-methoxyacetophenone Chemical compound COC1=CC=C(C(C)=O)C=C1 NTPLXRHDUXRPNE-UHFFFAOYSA-N 0.000 description 2
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 2
- NIQCNGHVCWTJSM-UHFFFAOYSA-N Dimethyl phthalate Chemical compound COC(=O)C1=CC=CC=C1C(=O)OC NIQCNGHVCWTJSM-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- FQYUMYWMJTYZTK-UHFFFAOYSA-N Phenyl glycidyl ether Chemical compound C1OC1COC1=CC=CC=C1 FQYUMYWMJTYZTK-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 2
- QHWKHLYUUZGSCW-UHFFFAOYSA-N Tetrabromophthalic anhydride Chemical compound BrC1=C(Br)C(Br)=C2C(=O)OC(=O)C2=C1Br QHWKHLYUUZGSCW-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 2
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- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- AUHHYELHRWCWEZ-UHFFFAOYSA-N tetrachlorophthalic anhydride Chemical compound ClC1=C(Cl)C(Cl)=C2C(=O)OC(=O)C2=C1Cl AUHHYELHRWCWEZ-UHFFFAOYSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 150000004992 toluidines Chemical class 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- 239000001069 triethyl citrate Substances 0.000 description 1
- VMYFZRTXGLUXMZ-UHFFFAOYSA-N triethyl citrate Natural products CCOC(=O)C(O)(C(=O)OCC)C(=O)OCC VMYFZRTXGLUXMZ-UHFFFAOYSA-N 0.000 description 1
- 235000013769 triethyl citrate Nutrition 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- UPGBQYFXKAKWQC-UHFFFAOYSA-N trifluoromethylsulfonylbenzene Chemical compound FC(F)(F)S(=O)(=O)C1=CC=CC=C1 UPGBQYFXKAKWQC-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
- MBYLVOKEDDQJDY-UHFFFAOYSA-N tris(2-aminoethyl)amine Chemical compound NCCN(CCN)CCN MBYLVOKEDDQJDY-UHFFFAOYSA-N 0.000 description 1
- KJIOQYGWTQBHNH-UHFFFAOYSA-N undecanol Chemical compound CCCCCCCCCCCO KJIOQYGWTQBHNH-UHFFFAOYSA-N 0.000 description 1
- 229920006163 vinyl copolymer Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、液状感光性樹脂組成物に関し、さらに詳しく
は、印刷配線板製造用のソルダーレジスト等の永久保護
マスクの形成に使用可能な、紫外線露光に対して高感度
で、しかも硬化後の塗膜の電気特性や耐薬品性にも優れ
た、光硬化および熱硬化がともに可能な液状感光性樹脂
組成物に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a liquid photosensitive resin composition, and more particularly, to a liquid photosensitive resin composition that can be used to form a permanent protective mask such as a solder resist for manufacturing printed wiring boards. The present invention relates to a liquid photosensitive resin composition that is highly sensitive to ultraviolet light exposure, has excellent electrical properties and chemical resistance of a cured coating film, and is photocurable and thermocurable.
(従来の技術)
従来、印刷配線板業界において、ソルダーレジスト、化
学めっき用レジスト等の永久保護マスクに使用されてい
る樹脂組成物はエポキシ樹脂、メラミン樹脂等の熱硬化
性樹脂を主成分としたものであり、パターン形成には、
スクリーン印刷法が多く用いられてきた。ソルダーレジ
ストの主な目的はハンダ付は時のハンダ付は領域を限定
し、ノーンダブリフジ等を防ぐこと、導体の腐食を防止
すること、さらに長期にわたって導体間の電気絶縁性を
保持することにある。(Prior art) Conventionally, in the printed wiring board industry, resin compositions used for permanent protective masks such as solder resists and chemical plating resists are mainly composed of thermosetting resins such as epoxy resins and melamine resins. For pattern formation,
Screen printing methods have been widely used. The main purpose of solder resist is to limit the area during soldering, to prevent non-dub ridges, etc., to prevent corrosion of conductors, and to maintain electrical insulation between conductors over a long period of time. be.
しかしながら、近年、超LSI等の高密度実装化に伴っ
て、導体間隔の縮小化が要求され、また導体間の電気絶
縁性の要求も厳しく、ソルダーレジスト等も寸法精度の
優れたものが要求されるようになっているが、スクリー
ン印刷法は本質的に低解像度であり、カスレ、ピンホー
ル(高粘度インキの場合)あるいはブリード、にじみ、
だれ(低粘度の場合)といった現象が発生し、印刷配線
板の高密度化に対応できなくなってきている。However, in recent years, with the high-density packaging of VLSIs, etc., there has been a need to reduce the spacing between conductors, and there have also been strict requirements for electrical insulation between conductors, and solder resists with excellent dimensional accuracy are now required. However, screen printing methods inherently have low resolution and are prone to scratches, pinholes (in the case of high viscosity inks) or bleeds, smears,
Phenomena such as sagging (when the viscosity is low) occur, making it difficult to cope with the increasing density of printed wiring boards.
そこで、写真法(像露光に続く現像により画像を形成)
でパターンを形成でき、高感度、高解像度でかつ、基板
との密着性に優れ、しかも硬化後の塗膜の電気特性や機
械的特性にも優れた感光性樹脂組成物が、現在注目され
ている。Therefore, the photographic method (forming an image by image exposure followed by development)
Photosensitive resin compositions that can form patterns with high sensitivity, high resolution, and excellent adhesion to substrates, as well as excellent electrical and mechanical properties of the coating film after curing, are currently attracting attention. There is.
また、近年、作業環境、大気および水質汚濁等の問題か
ら、アルカリ性水溶液または水で現像できる感光性樹脂
組成物が望まれている。Furthermore, in recent years, due to problems such as work environment, air and water pollution, photosensitive resin compositions that can be developed with alkaline aqueous solutions or water have been desired.
写真法により、パターン形成される印刷配線板用の永久
保護マスクとして、・ドライフィルム型あるいは液状の
現像可能な感光性樹脂組成物が開発されている。Developable photosensitive resin compositions in dry film type or liquid form have been developed as permanent protective masks for printed wiring boards whose patterns are formed by photography.
ドライフィルム型の感光性樹脂組成物として、例えば、
特開昭57−55914号公報等にウレタンジ(メタ)
アクリレート、線状高分子化合物および光増感剤からな
る感光性樹脂組成物が、また、特開昭62−24735
3号公報に特定のノボラックエポキシ樹脂の(メタ)ア
クリル変性樹脂と光増感剤からなる感光性樹脂組成物が
開示されている。As a dry film type photosensitive resin composition, for example,
Urethane di(meth) in JP-A No. 57-55914 etc.
A photosensitive resin composition comprising an acrylate, a linear polymer compound, and a photosensitizer is also disclosed in JP-A-62-24735.
No. 3 discloses a photosensitive resin composition comprising a (meth)acrylic modified resin of a specific novolac epoxy resin and a photosensitizer.
しかしながら、−船釣に、ドライフィルム型の感光性樹
脂組成物の場合、加熱圧着の際に気泡を生じ易く、耐熱
性や密着性にも不安があり、それらの間頭を解決する為
に、特開昭52−52703号公報等に開示されたよう
に、減圧下で加熱圧着等の特殊な工程を必要とし、さら
には、この様な工程を用いても、完全な耐熱性や密着性
は保証されない。However, in the case of dry film type photosensitive resin compositions for boat fishing, air bubbles are likely to occur during heat-pressing, and there are concerns about heat resistance and adhesion. As disclosed in Japanese Patent Application Laid-Open No. 52-52703, special processes such as heat-compression bonding under reduced pressure are required, and even if such processes are used, perfect heat resistance and adhesion cannot be obtained. Not guaranteed.
一方、液状の現像可能な感光性樹脂組成物は、使用直前
に印刷配線板に液状のまま直接塗布されるため工程数が
少なく、また液状であるため、凹凸の激しい印刷配線板
に対しても優れた画像を形成でき、例えば、導体間隔の
狭い印刷配線板のための永久保護マスク用感光性樹脂組
成物として好適である。On the other hand, liquid developable photosensitive resin compositions require fewer steps because they are applied directly to printed wiring boards in liquid form immediately before use, and because they are liquid, they are also suitable for printed wiring boards with severe unevenness. It can form an excellent image and is suitable, for example, as a photosensitive resin composition for permanent protective masks for printed wiring boards with narrow conductor spacing.
しかしながら、この液状感光性樹脂組成物も、印刷配線
板上に塗布した後、直接パターンマスクを塗膜面に密着
させて露光するとパターンマスクが汚れるという欠点を
有する。However, this liquid photosensitive resin composition also has the disadvantage that, after being applied onto a printed wiring board, if the pattern mask is brought into direct contact with the coating surface and exposed to light, the pattern mask becomes dirty.
このパターンマスクの汚れを解決する方法として、特開
昭57−164595号公報等に開示されているように
、印刷配線板に液状感光性樹脂組成物を塗布した後、乾
燥して造膜する通常の方法とは異なり、乾燥せず液状の
ままパターンマスクを間隔を開けて配置し、露光硬化さ
せ、未硬化の液状感光性樹脂組成物を除去するという特
殊な方法がある。しかし、乾燥造膜しないため、被覆さ
れた液状感光性組成物表面とパターンマスクとの間隔を
開ける必要がありその分だけ解像度が悪くなり、また特
殊な装置を装備するため高価になるなど難点がある。As a method for solving this pattern mask stain, as disclosed in JP-A-57-164595, etc., a conventional method involves coating a printed wiring board with a liquid photosensitive resin composition and then drying it to form a film. Unlike the above method, there is a special method in which patterned masks are placed at intervals in a liquid state without drying, exposed to light and cured, and the uncured liquid photosensitive resin composition is removed. However, because it does not form a dry film, it is necessary to leave a gap between the surface of the liquid photosensitive composition coated and the pattern mask, which reduces resolution, and requires special equipment, which is expensive. be.
また、特開昭58−24144.59−2049号公報
等には、活性光線を透過する透明な可撓性支持体または
パターンマスク上に液状感光性樹脂組成物を均一な厚さ
に塗布し、直ちに、可撓性支持体またはパターンマスク
を移動し液状感光性樹脂組成物の塗布面を印刷配線板に
向は一定圧で押圧することにより、印刷配線板上に液状
感光性樹脂組成物を一定厚に積層し、次いで、露光し、
可撓性支持体またはパターンマスクを剥離し現像するこ
とによるソルダーレジストの製造方法が開示されている
。この方法では、透明な可撓性支持体またはパターンマ
スクに液状感光性樹脂組成物を均一な厚さで塗布した後
、印刷配線板に向けて一定圧で押圧するときに、印刷配
線板に凹凸があるため気泡の巻き込みを生じ、画像中に
気泡が少なからず生じ、耐熱性や密着性に不安があり、
さらに、特定の装置を必要とし高価になるなどの問題が
ある。Furthermore, in JP-A No. 58-24144.59-2049, etc., a liquid photosensitive resin composition is applied to a uniform thickness on a transparent flexible support or patterned mask that transmits actinic rays, and Immediately, move the flexible support or pattern mask and press the surface coated with the liquid photosensitive resin composition against the printed wiring board with a constant pressure to spread the liquid photosensitive resin composition uniformly on the printed wiring board. Laminated thickly, then exposed,
A method of manufacturing a solder resist by peeling off and developing a flexible support or patterned mask is disclosed. In this method, a liquid photosensitive resin composition is applied to a transparent flexible support or a patterned mask in a uniform thickness, and then when pressed with a constant pressure toward a printed wiring board, unevenness is created on the printed wiring board. Because of this, air bubbles may be trapped, causing considerable air bubbles to appear in the image, causing concerns about heat resistance and adhesion.
Furthermore, there are other problems such as the need for specific equipment, which is expensive.
さらに、特開昭61−102652.62−27736
号公報には、印刷配線板上に液状感光性組成物を塗布し
た後、透明な可撓性支持体またはパターンマスクを一定
圧で押圧し、パターンマスクを介して霧光し、可撓性支
持体またはパターンマスクを剥離した後で現像すること
によるソルダーレジストの製造方法が開示されている。Furthermore, JP-A-61-102652.62-27736
The publication discloses that after a liquid photosensitive composition is applied onto a printed wiring board, a transparent flexible support or a pattern mask is pressed with a constant pressure, light is misted through the pattern mask, and the flexible support is coated with a liquid photosensitive composition. A method of manufacturing a solder resist by peeling off a body or pattern mask and then developing it is disclosed.
これらの方法においても可撓性支持体またはパターンマ
スクを一定圧で押圧し、露光するための特定の装置を必
要とし高価になるなどの問題がある。These methods also have problems, such as the need for specific equipment for pressing the flexible support or patterned mask with a constant pressure and exposing the material, resulting in high costs.
さらに、上記に示した液状感光性組成物を乾燥させずに
、そのままレジストパターンに従って露光する方法にお
いて、液状感光性組成物は、多数の反応性モノマーを含
む液状プレポリマーを使用するため、耐酸性、耐薬品性
等の特性が通常の方法に較べて劣るという問題もある。Furthermore, in the method described above in which the liquid photosensitive composition is directly exposed to light according to the resist pattern without drying, the liquid photosensitive composition uses a liquid prepolymer containing a large number of reactive monomers, so the liquid photosensitive composition has acid resistance. There is also the problem that properties such as chemical resistance are inferior to conventional methods.
液状感光性樹脂を塗布後、加熱乾燥し、パターンマスク
を密着させて露光し、現像することにより、ソルダーレ
ジストを形成する方法としては、特開昭61−2438
69等に開示されているような、ノボラック型エポキシ
化合物、不飽和モノカルボン酸および多塩基酸無水物を
反応して得られる化合物を含む液状レジストインキ組成
物、特開昭62−187722等に開示されているよう
な、不飽和基とカルボキシル基を有するビスフェノール
型エポキシ樹脂を主成分とする液状樹脂組成物がある。A method of forming a solder resist by applying a liquid photosensitive resin, heating and drying it, exposing it with a pattern mask, and developing it is described in Japanese Patent Application Laid-Open No. 61-2438.
A liquid resist ink composition containing a compound obtained by reacting a novolac-type epoxy compound, an unsaturated monocarboxylic acid, and a polybasic acid anhydride, as disclosed in JP-A No. 62-187722, etc. There is a liquid resin composition whose main component is a bisphenol-type epoxy resin having an unsaturated group and a carboxyl group.
しかし、これらの液状感光性樹脂組成物も、感度、およ
び硬化後の塗膜の電気特性、耐薬品性等の特性が不十分
である。However, these liquid photosensitive resin compositions also have insufficient sensitivity and properties such as electrical properties and chemical resistance of the coated film after curing.
(発明が解決しようとする間H点)
本発明の目的は、前記従来の技術的課題を解決し、印刷
配線板上に気泡のない均一な厚みの感光性樹脂層を形成
することができ、また、感光性樹脂を塗布した印刷配線
板を露光前に加熱することにより、感光性樹脂塗膜表面
の粘着性をなくして塗膜表面とパターンマスクとを密着
して露光することができる、光硬化および熱硬化がとも
に可能で、高感度であり、硬化後の塗膜の電気特性、機
械的特性、耐薬品性に優れ、しかもアルカリ性水溶液に
より現像可能な液状感光性樹脂組成物を提供することに
ある。(Point H to be solved by the invention) An object of the present invention is to solve the above-mentioned conventional technical problems and to be able to form a photosensitive resin layer of uniform thickness without bubbles on a printed wiring board. In addition, by heating a printed wiring board coated with a photosensitive resin before exposure, the adhesiveness of the photosensitive resin coating surface is eliminated, and the coating surface and pattern mask can be exposed in close contact with each other. To provide a liquid photosensitive resin composition that can be both cured and thermocured, has high sensitivity, provides a cured coating film with excellent electrical properties, mechanical properties, and chemical resistance, and can be developed with an alkaline aqueous solution. It is in.
(問題点を解決する為の手段)
本発明者等は、次の様な液状感光性樹脂組成物を用いる
ことにより、上記の問題点を解決できることを見出し、
本出願に到った。(Means for Solving the Problems) The present inventors have discovered that the above problems can be solved by using the following liquid photosensitive resin composition,
This application has been filed.
(A)下記一般式(I)の繰り返し単位を有する高分子
重合体、同一分子中にカルボキシル基とエチレン性不飽
和二重結合を有する化合物、および飽和あるいは不飽和
多塩基酸無水物を順次反応して得られる変性ポリスチレ
ン樹脂
一般式(I)
はフェニレン、または置換フェニレンを意味する。)
(B)少なくとも1個のエチレン性不飽和二重結合を有
する重合性化合物
(C)少なくとも1個のエポキシ基を有するエポキシ化
合物
(D)光重合開始剤または光重合開始剤系(E)エポキ
シ基を熱反応させる熱硬化性触媒(F)有機溶剤
を含有する液状感光性樹脂組成物。(A) A polymer having a repeating unit of the following general formula (I), a compound having a carboxyl group and an ethylenically unsaturated double bond in the same molecule, and a saturated or unsaturated polybasic acid anhydride are sequentially reacted. The modified polystyrene resin obtained by general formula (I) means phenylene or substituted phenylene. ) (B) Polymerizable compound having at least one ethylenically unsaturated double bond (C) Epoxy compound having at least one epoxy group (D) Photoinitiator or photoinitiator system (E) Epoxy A liquid photosensitive resin composition containing a thermosetting catalyst (F) an organic solvent that causes a group to undergo a thermal reaction.
本発明の、液状感光性樹脂組成物の各成分について以下
に説明する。Each component of the liquid photosensitive resin composition of the present invention will be explained below.
(A)の変性ポリスチレン樹脂は、一般式(I)の繰り
返し単位を有する高分子重合体、同一分子中にエポキシ
基とエチレン性不飽和二重結合を有する化合物、および
飽和あるいは不飽和多塩基酸無水物を順次反応させるこ
とにより得られる。The modified polystyrene resin (A) is a polymer having a repeating unit of general formula (I), a compound having an epoxy group and an ethylenically unsaturated double bond in the same molecule, and a saturated or unsaturated polybasic acid. Obtained by sequentially reacting anhydrides.
一般式(I)の繰り返し単位を有する高分子重合体とし
ては、4−ビニルフェニルグリシジルエーfル、4−イ
ソプロペニルフェニルグリシジル(式中、Rはボ素、ま
たはメチル基、Δrエーテル、2−エチル−4−ビニル
フェニルグリシジルエーテル、2−イソプロピル−4−
ビニルフェニルグリシジルエーテル、2.6−タイツプ
ロビル−4−ビニルフェニルグリシジルエーテル、2.
6−ジーt−ブチル−4−ビニルフェニルグリシジルエ
ーテル、2,6−ジーt−ブチル−4−イソプロペニル
フェニルグリシジルエーテル、ブロム化−4−ビニルフ
ェニルグリシジルエーテル、フロム化4−イソプロペニ
ルフェニルグリシジルエーテル等の単独ビニル重合体、
またはこれらと共重合可能なビニル単量体とのビニル共
重合体が挙げられる。また、これらの化合物は、4−ビ
ニルフェノール、4−インプロペニルフェノール、2−
エチル−4−ビニルフェノール、2−イソプロピル−4
−ビニルフェノール、2.6−ジイソプロピル−4−ビ
ニルフェノール、2.6−ジーt−ブチル−4−ビニル
フェノール、2I5−’;−t−jチルー4−インプロ
ペニルフェノール、フロム化−4−ビニルフェノール、
ブロム化4−インプロペニルフェノール等の単独重合体
、またはこれらと共重合可能な単量体との共重合体をア
ルカリ存在下でエピクロルヒドリンを反応せしめて得る
ことができる。これらの内、特に好ましい具体例として
は4−ビニルフェニルグリシジルエーテルのビニル重合
体、4−イソプロペニルフェニルグリシジルエーテルの
ビニル重合体が挙げられる。Examples of the polymer having the repeating unit of general formula (I) include 4-vinylphenylglycidyl ether, 4-isopropenylphenylglycidyl (wherein R is boron, or a methyl group, Δr ether, 2- Ethyl-4-vinylphenyl glycidyl ether, 2-isopropyl-4-
Vinylphenylglycidyl ether, 2.6-taituprobyl-4-vinylphenylglycidyl ether, 2.
6-di-t-butyl-4-vinylphenylglycidyl ether, 2,6-di-t-butyl-4-isopropenylphenylglycidyl ether, brominated-4-vinylphenylglycidyl ether, fluorinated 4-isopropenylphenylglycidyl ether Homovinyl polymers such as
Alternatively, examples include vinyl copolymers with vinyl monomers copolymerizable with these. In addition, these compounds include 4-vinylphenol, 4-impropenylphenol, 2-
Ethyl-4-vinylphenol, 2-isopropyl-4
-vinylphenol, 2.6-diisopropyl-4-vinylphenol, 2.6-di-t-butyl-4-vinylphenol, 2I5-'; -t-j thi-4-impropenylphenol, from-4-vinyl phenol,
It can be obtained by reacting a homopolymer such as brominated 4-impropenylphenol or a copolymer with a monomer copolymerizable with the same with epichlorohydrin in the presence of an alkali. Among these, particularly preferred examples include vinyl polymers of 4-vinylphenyl glycidyl ether and vinyl polymers of 4-isopropenylphenyl glycidyl ether.
また、同一分子中にカルボキシル基とエチレン性不飽和
二重結合を有する化合物としては、アクリル酸、メタク
リル酸、アクリル酸の2量体や3量体以上の多量体、ア
クリル酸またはメタクリル酸とカプロラクトン等の環状
酸無水物との反応生成物、アクリル酸またはメタクリル
酸のヒドロキシアルキルエステルと二塩基酸無水物との
反応生成物、アクリル酸またはメタクリル酸のヒドロキ
シアルキルエステルとハロゲン含有カルボン酸との反応
生成物、ビニル安息香酸等が挙げられる。Compounds having a carboxyl group and an ethylenically unsaturated double bond in the same molecule include acrylic acid, methacrylic acid, dimers, trimers or higher polymers of acrylic acid, acrylic acid or methacrylic acid, and caprolactone. Reaction products of hydroxyalkyl esters of acrylic acid or methacrylic acid and dibasic acid anhydrides, reaction products of hydroxyalkyl esters of acrylic acid or methacrylic acid and halogen-containing carboxylic acids products, vinylbenzoic acid, etc.
さらに、市販品としては、東亜合成化学工業(株)製の
γロニックスM−5300、M−5400、M−550
0およびM−5600、新中村化学工業(株)製のNK
エステルCB−1およびCBX−1、共栄社油脂化学工
業(株)!8!のHOΔ−qPおよびHOA−MS、大
阪有機化学工業(株)製のビスコ−)#2100などを
用いることができる。Furthermore, as commercially available products, γronix M-5300, M-5400, M-550 manufactured by Toagosei Chemical Industry Co., Ltd.
0 and M-5600, NK manufactured by Shin-Nakamura Chemical Industry Co., Ltd.
Ester CB-1 and CBX-1, Kyoeisha Yushi Kagaku Kogyo Co., Ltd.! 8! HOΔ-qP and HOA-MS, Visco) #2100 manufactured by Osaka Organic Chemical Industry Co., Ltd., and the like can be used.
これらの内、特に好ましい具体例としては、アクリル酸
、メタクリル酸、アクリル酸の2量体や3量体以上の多
量体が挙げられる。Among these, particularly preferred specific examples include dimers, trimers, and higher polymers of acrylic acid, methacrylic acid, and acrylic acid.
また、飽和あるいは不飽和多塩基酸無水物としては、無
水コハク酸、無水メチルコハク酸、無水23−ジメチル
コハク酸、無水2.2−ジメチルコハク酸、無水エチル
コハク酸、無水ドデセニルコハク酸、無水ノネニルコハ
ク酸、無水マレイン酸、無水メチルマレイン酸、無水2
.3−ジメチルマレインM、無水2−クロロマレインL
a水2.3−ジクロロマレイン酸、無水ブロモマレイ
ン酸、無水イタコン酸、無水シトラコン酸、無水シスア
コット酸、無水フタル酸、テトラヒドロ無水フタル酸、
テトラクロロ無水フタル酸、テトラブロモ無水フタル酸
、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水
フタル酸、メチルへキサヒドロ無水フタル酸、エンドメ
チレンテトラヒドロ無水フタル酸、メチルエンドメチレ
ンテトラヒドロ無水フタル酸、無水クロレンド酸および
5−(2,5−ジオキソテトラヒドロフリル)−3−メ
チル−3−シクロヘキセン−1,2−ジカルボン酸無水
物などの二塩基酸無水物、無水トリメリット酸、3.3
’、4.4°−ベンゾフェノンテトラカルボン酸等の多
塩基酸無水物などが使用できる。これらの内、上記の二
塩基酸無水物が好ましく、特に無水コハク酸、テトラヒ
ドロ無水フタル酸が好ましい。In addition, examples of saturated or unsaturated polybasic acid anhydrides include succinic anhydride, methylsuccinic anhydride, 23-dimethylsuccinic anhydride, 2,2-dimethylsuccinic anhydride, ethylsuccinic anhydride, dodecenylsuccinic anhydride, nonenylsuccinic anhydride, Maleic anhydride, methylmaleic anhydride, anhydride 2
.. 3-dimethylmalein M, anhydrous 2-chloromalein L
a water 2.3-dichloromaleic acid, bromomaleic anhydride, itaconic anhydride, citraconic anhydride, cis-acottic anhydride, phthalic anhydride, tetrahydrophthalic anhydride,
Tetrachlorophthalic anhydride, tetrabromophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorendic anhydride and 5- Dibasic acid anhydrides such as (2,5-dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, trimellitic anhydride, 3.3
', 4.4°-benzophenonetetracarboxylic acid, and other polybasic acid anhydrides can be used. Among these, the dibasic acid anhydrides mentioned above are preferred, and succinic anhydride and tetrahydrophthalic anhydride are particularly preferred.
それぞれを順次反応させて、変性ポリスチレン樹脂を得
るが、それらを反応させる比率は、一般式(I)の繰り
返し単位を有する高分子重合体のエポキシ基1当量に対
して、同一分子中にカルボキシル基とエチレン性不飽和
二重結合を有する化合物0.5〜1.2当量、好ましく
は、0.8〜1.1当量であり、多塩基酸無水物0.1
〜1゜1当量、好ましくは、0,3〜1. 0当量であ
る。同一分子中にカルホキシル基とエチレン性不飽和二
重結合を有する化合物が0.5当量未満では感度が低下
し、1.2当量を越えると粘着性の問題が生ずる。また
、多塩基酸無水物が0.1当量未満では、現像性の低下
、樹脂のゲル化が起こり、1.1当量を越えると粘着性
や、結晶の析出等の問題が生ずる。A modified polystyrene resin is obtained by reacting each of them in sequence, and the ratio of reacting them is such that the number of carboxyl groups in the same molecule per equivalent of epoxy group of the polymer having the repeating unit of general formula (I) is and 0.5 to 1.2 equivalents, preferably 0.8 to 1.1 equivalents of the compound having an ethylenically unsaturated double bond, and 0.1 equivalent of the polybasic acid anhydride.
~1°1 equivalent, preferably 0.3-1. It is 0 equivalent. If the amount of the compound having a carboxyl group and an ethylenically unsaturated double bond in the same molecule is less than 0.5 equivalent, the sensitivity will decrease, and if it exceeds 1.2 equivalent, a problem of stickiness will occur. Furthermore, if the amount of the polybasic acid anhydride is less than 0.1 equivalent, the developability will deteriorate and the resin will become gelled, while if it exceeds 1.1 equivalent, problems such as stickiness and crystal precipitation will occur.
これ・らの変性ポリスチレン樹脂は単独で、または2種
以上混合して用いてもよく、液状感光性樹脂組成物の固
形分100重!部に対して、10〜60重量部が好まし
く、特に20〜50重量部用いることが好ましい。10
重量部未満では現像性、硬化膜の強度が低下し、60重
量部を越えると液粘度が高く作業性が低下する。These modified polystyrene resins may be used alone or in combination of two or more, and the solid content of the liquid photosensitive resin composition is 100 weight! It is preferably 10 to 60 parts by weight, particularly preferably 20 to 50 parts by weight. 10
If it is less than 60 parts by weight, the developability and strength of the cured film will be reduced, and if it exceeds 60 parts by weight, the liquid viscosity will be high and workability will be reduced.
本発明に用いられる少なくとも1個のエチレン性不飽和
二重結合を有する重合性化合物としては、まず1価また
は多価アルコールのアクリル酸またはメタクリル酸のエ
ステルが挙げられる。Examples of the polymerizable compound having at least one ethylenically unsaturated double bond used in the present invention include esters of acrylic acid or methacrylic acid of monohydric or polyhydric alcohols.
1価または多価アルコールのアクリル酸またはメタクリ
ル酸のエステルにおける1価アルコールとしでは、例え
ばメタノール、エタノール、プロパツール、インブロバ
ノーノペn−ブタノール、インブタノール、t−ブタノ
ール、シクロへキシルアルコーノヘベンジルアルコール
、オクチルアルコール、2−エチルヘキサノール、ラウ
リルアルコール、n−デカノール、ウンデカノール、七
チルアルコール、ステアリルアルコール、メトキシエチ
ルアルコール、エトキシエチルアルコール、ブトキシエ
チルアルコール、ポリエチレングリコールモノメチルア
ルコール、ポリエチレングリコールモノエチルアルコー
ル、2−ヒドロキシ−3−クロロプロパン、ジメチルア
ミノアルコール、ジエチルアミノアルコール、グリシド
ール、2−トリメトキシシリルエタノール、エチレンク
ロロヒドリン、エチレンブロモヒドリン、2.3−シフ
ロムプロパツール、アリルアルコール、オレイルアルコ
ール、エポキシステアリルアノリコール、フェノール、
ナフトール等が挙げられる。また多価アルコールとして
は、例えばエチレングリコール、1.2−プロパンジオ
ールペ 1.3〜プロパンジオール、1.4−ブタンジ
オール、1,5−ベンタンジオール、ヘキサンジオール
、ヘプタンジオール、オクタンジオール、ノナンジオー
ル、ドデカンジオール、ネオペンチルグリコール、1.
10−デカリジオールペ 2−ブテン−1,4−ジオー
ル、2 n−ブチル−2−エチルプロパンジオール、
シクロへブタンジオール、I、4−シクロヘキサンジメ
タノーノペ3−シクロヘキセン−1,1−ジェタノール
、ポリエチレングリコール(ジエチレングリコーノペ
トリエチレングリコール等)、ポリプロピレングリコー
ル(ジプロピレングリコール、トリプロピレングリコー
ル等)、ポリスチレンオキシドグリコーノペポリテトラ
ヒドロフラングリコール、キシリレンジオール、ビス(
β−ヒドロキシエトキシ)ベンゼン、3−クロル−1,
2−プロパンジオール、2.2−ジメチル−1,3−プ
ロパンジオール、2,2−ジエチル−1,3−プロパン
ジオーノベ2.2−ジフェニル−1,3−プロパンジオ
ール、デカリンジオール、1,5−ジヒドロキシ−1,
2,34−テトラヒドロナフタレン、2.5−ジメチル
−2,5−ヘキサンジオール、2−エチル−13−ヘキ
サンジオール、2−エチル−2−(ヒドロキシメチル)
−1,3−プロパンジオール、2−エチル−2−メチル
−1,3−7’ロバンジオール、3−ヘキセン−2,5
−ジオール、ヒドロキシベンジルアルコール、2−メチ
ル−1,4−ブタンジオール、2−メチル−2,4−ベ
ンタンジオール、1−フェニル−1,2−エタンジオー
ル、2. 2. 4. 4−テトラメチル−1,3−シ
クロブタンジオール、2,3,5.6−テトラメチル−
p−キシレン−α、α“−ジオール、1゜1.4.4−
テトラフェニル−2−ブチン−1゜4−ジオール、1.
1′ −ビー2−ナフトール、ジヒドロキシナフタレン
、1,1°−メチレン−ジー2−ナフトール、ビフェノ
ール、2.2−ビス(4−ヒドロキシフェニル)ブタン
、1.1−ビス(4−ヒドロキシフェニル)シクロヘキ
サン、ビス(ヒドロキシフェニル)メタン、カテコール
、レゾルシノール、2−メチルレゾルシノール、4−ク
ロロレゾルシノール、ピロガロール、α−(I−アミノ
エチル)−p−ヒドロキシベンジルアルコール、2−ア
ミノ−2−メチル−1,3−プロパンジオール、2−ア
ミノ−2−エチル−1,3−プロパンジオール、3−ア
ミノ−1,2−フロパンジオール、N−(3−アミノプ
ロピル)−ジェタノールアミン、N、N−ビス(2−ヒ
ドロキシエチル)ピペラジン、1.3−ビス(ヒドロキ
シメチル)ウレア、1,2−ビス(4−ピリジル>−1
,2−エタンジオール、N−n−ブチルジェタノールア
ミン、ジェタノールアミン、N−エチルジェタノールア
ミン、3−メルカプト−1,2−7’ロパンジオール、
3−ピペリジン−1,2−プロパンジオール、2−(2
−ピリジル)−1,3−プロパンジオール、α−(I−
アミノエチル)−p−ヒドロキシベンジルアルコール、
グリセリン、トリメチロールエタン、トリメチロールプ
ロパン、ペンタエリスリトール、ジペンタエリスリトー
ル、トリペンタエリスリトール、ソルビトール、グルコ
ース、α−マンニトール、ブタントリオール、1.2.
6−トリヒドロキシヘキサン、1.2.4−ベンゼント
リオール、トリエタノールアミン、2.2−ビス(ヒド
ロキシメチル)−2,2’、2″−ニトリロトリエタノ
ール等が挙げられる。これらの1価または多価アルコー
ルのアクリル酸またはメタクリル酸のエステルのうち、
エチレングリコールジアクリレート、エチレングリコー
ルジメタクリレート、ポリエチレングリコールジアクリ
レート、ポリエチレングリコールジメタクリレート、ペ
ンタエリスリトールトリアクリレート、ペンタエリスリ
トールトリメタクリレート、ペンタエリスリトールテト
ラアクリレート、ペンタエリスリトールテトラメタクリ
レート、ジペンタエリスリトールへキサアクリレート、
ジペンタエリスリトールへキサメタクリレート、ジペン
タエリスリトールペンタアクリレート、ジペンタエリス
リトールペンタアクリレート、グリセリントリアクリレ
ート、グリセリントリメタクリレート、トリメチロール
プロパントリアクリレート、トリメチロールプロパント
リメタクリレート、トリメチロールエタントリアクリレ
ート、トリメチロールエタントリメタクリレート、ネオ
ペンチルグリコールジアクリレート、ネオペンチルグリ
コールジメタクリレート、ソルヒトールヘキサアクリレ
ート、ソルビトールへキサメタクリレート、ソルビトー
ルペンタアクリレート、ソルビトールペンタメタクリレ
ート等が好ましい。Examples of monohydric alcohols in the esters of acrylic acid or methacrylic acid of monohydric or polyhydric alcohols include methanol, ethanol, propatool, imbrobanonopen n-butanol, imbutanol, t-butanol, cyclohexylalconohbenzyl. Alcohol, octyl alcohol, 2-ethylhexanol, lauryl alcohol, n-decanol, undecanol, heptyl alcohol, stearyl alcohol, methoxyethyl alcohol, ethoxyethyl alcohol, butoxyethyl alcohol, polyethylene glycol monomethyl alcohol, polyethylene glycol monoethyl alcohol, 2 -Hydroxy-3-chloropropane, dimethylamino alcohol, diethylamino alcohol, glycidol, 2-trimethoxysilylethanol, ethylene chlorohydrin, ethylene bromohydrin, 2,3-sifurompropatur, allyl alcohol, oleyl alcohol, epoxystearyl Anolicol, phenol,
Examples include naphthol. Examples of polyhydric alcohols include ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,4-butanediol, 1,5-bentanediol, hexanediol, heptanediol, octanediol, and nonanediol. , dodecanediol, neopentyl glycol, 1.
10-decalidiolpe 2-butene-1,4-diol, 2 n-butyl-2-ethylpropanediol,
Cyclohebutanediol, I,4-cyclohexanedimethanol, 3-cyclohexene-1,1-jetanol, polyethylene glycol (diethylene glycol)
triethylene glycol, etc.), polypropylene glycol (dipropylene glycol, tripropylene glycol, etc.), polystyrene oxide glycone polytetrahydrofuran glycol, xylylene diol, bis(
β-hydroxyethoxy)benzene, 3-chloro-1,
2-propanediol, 2.2-dimethyl-1,3-propanediol, 2,2-diethyl-1,3-propanedionobe 2.2-diphenyl-1,3-propanediol, decalindiol, 1,5 -dihydroxy-1,
2,34-tetrahydronaphthalene, 2,5-dimethyl-2,5-hexanediol, 2-ethyl-13-hexanediol, 2-ethyl-2-(hydroxymethyl)
-1,3-propanediol, 2-ethyl-2-methyl-1,3-7'lovandiol, 3-hexene-2,5
-diol, hydroxybenzyl alcohol, 2-methyl-1,4-butanediol, 2-methyl-2,4-bentanediol, 1-phenyl-1,2-ethanediol, 2. 2. 4. 4-tetramethyl-1,3-cyclobutanediol, 2,3,5.6-tetramethyl-
p-xylene-α,α“-diol, 1゜1.4.4-
Tetraphenyl-2-butyne-1°4-diol, 1.
1'-bi-2-naphthol, dihydroxynaphthalene, 1,1°-methylene-di-2-naphthol, biphenol, 2,2-bis(4-hydroxyphenyl)butane, 1,1-bis(4-hydroxyphenyl)cyclohexane , bis(hydroxyphenyl)methane, catechol, resorcinol, 2-methylresorcinol, 4-chlororesorcinol, pyrogallol, α-(I-aminoethyl)-p-hydroxybenzyl alcohol, 2-amino-2-methyl-1,3 -propanediol, 2-amino-2-ethyl-1,3-propanediol, 3-amino-1,2-furopanediol, N-(3-aminopropyl)-jetanolamine, N,N-bis( 2-hydroxyethyl)piperazine, 1,3-bis(hydroxymethyl)urea, 1,2-bis(4-pyridyl>-1
, 2-ethanediol, N-n-butylgetanolamine, jetanolamine, N-ethylgetanolamine, 3-mercapto-1,2-7'ropanediol,
3-piperidine-1,2-propanediol, 2-(2
-pyridyl)-1,3-propanediol, α-(I-
aminoethyl)-p-hydroxybenzyl alcohol,
Glycerin, trimethylolethane, trimethylolpropane, pentaerythritol, dipentaerythritol, tripentaerythritol, sorbitol, glucose, α-mannitol, butanetriol, 1.2.
Examples thereof include 6-trihydroxyhexane, 1,2,4-benzenetriol, triethanolamine, 2,2-bis(hydroxymethyl)-2,2',2''-nitrilotriethanol, etc. Among the esters of acrylic acid or methacrylic acid of alcohols,
Ethylene glycol diacrylate, ethylene glycol dimethacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol hexaacrylate,
Dipentaerythritol hexamethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol pentaacrylate, glycerin triacrylate, glycerin trimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, trimethylolethane triacrylate, trimethylolethane trimethacrylate , neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, sorbitol hexaacrylate, sorbitol hexamethacrylate, sorbitol pentaacrylate, sorbitol pentamethacrylate and the like are preferred.
また、モノアミンもしくはポリアミンのアクリルアミド
またはメタクリルアミドも使用することができる。ここ
におけるモノアミンとしては、例えばエチルアミン、ブ
チルアミン、アミルアミンヘキシルアミン、オクチルア
ミン、シクロヘキシルアミン、9−アミノデカリン等の
モノアルキルアミン、アリルアミン、メタアリルアミン
、ベンジルアミン等のモノアルケニルアミン、およびア
ニリン、トルイジン、p−アミノスチレン等の芳香族ア
ミンが挙げられる。またポリアミンとしては、例えばエ
チレンジアミン、トリメチレンジアミン、テトラメチレ
ンジアミン、ヘキサメチレンジアミン、オクタメチレン
ジアミン、ヘキサメチレンビス(2−アミノプロピル)
アミン、ジエチレントリアミン、トリエチレンテトラア
ミン、ポリエチレンポリアミン、トリス(2−アミノエ
チル)アミン、4.4°−メチレンビス(シクロヘキシ
ルアミン) 、N、N’ −ビス(2−アミノエチル)
−1,3−プロパンジアミン、N、N’−ビス(3−ア
ミノプロピル)−1,4−ブタンジアミン、N、N’
−ビス(3−アミノプロピル)エチレンジアミン、N、
N’ −ビス(3−アミノプロピル)−1,3−プロパ
ンジアミン、1゜3−シクロヘキサンビス(メチルアミ
ン)、フェニレンジアミン、キシリレンジアミン、β−
(4−アミノフェニル)エチルアミン、ジアミノトルエ
ン、ジアミノアントラセン、ジアミノナフタレン、ジア
ミノスチレン、メチレンジアニリン、24−ビス(4−
アミノベンジル)アニリン、アミノフェニルエーテル等
が挙げられる。It is also possible to use mono- or polyamine acrylamide or methacrylamide. Examples of monoamines include monoalkylamines such as ethylamine, butylamine, amylaminehexylamine, octylamine, cyclohexylamine, and 9-aminodecalin; monoalkenylamines such as allylamine, metaallylamine, and benzylamine; and aniline, toluidine, Aromatic amines such as p-aminostyrene can be mentioned. Examples of polyamines include ethylenediamine, trimethylenediamine, tetramethylenediamine, hexamethylenediamine, octamethylenediamine, hexamethylenebis(2-aminopropyl)
Amine, diethylenetriamine, triethylenetetraamine, polyethylenepolyamine, tris(2-aminoethyl)amine, 4.4°-methylenebis(cyclohexylamine), N,N'-bis(2-aminoethyl)
-1,3-propanediamine, N,N'-bis(3-aminopropyl)-1,4-butanediamine, N,N'
-bis(3-aminopropyl)ethylenediamine, N,
N'-bis(3-aminopropyl)-1,3-propanediamine, 1゜3-cyclohexanebis(methylamine), phenylenediamine, xylylenediamine, β-
(4-aminophenyl)ethylamine, diaminotoluene, diaminoanthracene, diaminonaphthalene, diaminostyrene, methylene dianiline, 24-bis(4-
Examples include aminobenzyl)aniline, aminophenyl ether, and the like.
さらに、アリル化合物、例えばギ酸、酢酸、プロピオン
酸、酪酸、ラウリン酸、安息香酸、クロル安息香酸、マ
ロン酸、シュウ酸、グルタル酸、アジピン酸、セバシン
酸、フタル酸、テレフタル酸、ヘキサヒドロフタル酸、
クロレンド酸およびトリメリット酸等のモノまたはポリ
カルボン酸のモノまたはポリアリルエステル、ベンゼン
ジスルホン酸、ナフタレンジスルホン酸等のモノまたは
ポリスルホン酸のモノまたはポリアリルエステル、ジア
リルアミン、N、N’ −ジアリルシニウ酸ジアミド、
1.3−ジアリル尿素、ジアリルエーテル、トリアリル
イソシアヌレート等も用いることができる。Furthermore, allyl compounds such as formic acid, acetic acid, propionic acid, butyric acid, lauric acid, benzoic acid, chlorobenzoic acid, malonic acid, oxalic acid, glutaric acid, adipic acid, sebacic acid, phthalic acid, terephthalic acid, hexahydrophthalic acid ,
Mono- or polyallylic esters of mono- or polycarboxylic acids such as chlorendic acid and trimellitic acid, mono- or polyallylic esters of mono- or polysulfonic acids such as benzenedisulfonic acid, naphthalenedisulfonic acid, diallylamine, N,N'-diallylsiniuic acid diamide ,
1.3-diallylurea, diallyl ether, triallyl isocyanurate, etc. can also be used.
また、例えばジビニルベンゼン、p−アリルスチレン、
p−インピロベニルスチレン、ジビニルスルホン、エチ
レングリコールジビニルエーテル、グリセロールトリビ
ニルエーテル、ジビニルフタレート、ジビニルフタレー
ト、ジビニルテレフタレート等のポリビニル化合物、2
−ヒドロキシ−3−メタクリロイルオキシプロピルトリ
メチルアンモニウムクロリド、メタクリロイルオキシフ
ェニルトリメチルアンモニウムクロリド等のイオン性基
を有するアクリル酸またはメタクリル酸のエステル化合
物も用いることができる。Also, for example, divinylbenzene, p-allylstyrene,
Polyvinyl compounds such as p-inpyrobenyl styrene, divinyl sulfone, ethylene glycol divinyl ether, glycerol trivinyl ether, divinyl phthalate, divinyl phthalate, divinyl terephthalate, etc., 2
Acrylic acid or methacrylic acid ester compounds having an ionic group such as -hydroxy-3-methacryloyloxypropyltrimethylammonium chloride and methacryloyloxyphenyltrimethylammonium chloride can also be used.
さらに、市販の重合性モノマーまたはオリゴマー、例え
ば東亜合成化学工業社製アロニックスM5700、M6
100、M8030、M152、M2O3、M215、
M315、M325等のアクリレート系モノマー、新中
村化学工業社製のNKエステルABPE−4、U−4H
ASCB−1YAMΔRPM−1、PM−2、サンノブ
コ社製フォトマー4061.5007等のアクリレート
またはメタクリレート系モノマー、昭和高分子社製リポ
キシVR60、VR90,5P15C19等のエポキシ
アクリレート、同社製スピラックE−4000X、U3
000等のスピロアセクール構造とアクリル基またはメ
タクリル基とを有するスピラン樹脂等も用いることがで
きる。Furthermore, commercially available polymerizable monomers or oligomers, such as Aronix M5700 and M6 manufactured by Toagosei Chemical Industry Co., Ltd.
100, M8030, M152, M2O3, M215,
Acrylate monomers such as M315 and M325, NK ester ABPE-4 and U-4H manufactured by Shin-Nakamura Chemical Co., Ltd.
ASCB-1YAMΔRPM-1, PM-2, acrylate or methacrylate monomers such as Photomer 4061.5007 manufactured by San Nobuco, epoxy acrylates such as Lipoxy VR60, VR90, 5P15C19 manufactured by Showa Kobunshi Co., Ltd., Spirac E-4000X, U3 manufactured by Showa Kobunshi Co., Ltd.
A spirane resin having a spiroacecool structure such as 000 and an acrylic group or a methacrylic group can also be used.
これらの化合物は単独で、または2種以上混合して用い
てもよく、液状感光性樹脂組成物の固形分100重量部
に対して、1〜40重量部が好ましく、特に2〜30重
量部用いることが好ましい。1重量部未満では感度が低
下し、40重量部を越えると硬化膜の電気的特性、機械
的特性が低下する。These compounds may be used alone or in combination of two or more, and are preferably used in an amount of 1 to 40 parts by weight, particularly 2 to 30 parts by weight, based on 100 parts by weight of the solid content of the liquid photosensitive resin composition. It is preferable. If it is less than 1 part by weight, the sensitivity will decrease, and if it exceeds 40 parts by weight, the electrical properties and mechanical properties of the cured film will decrease.
本発明に用いられる少なくとも1個のエポキシ基を有す
る化合物としては、例えばブチルグリシジルエーテル、
オクチルグリシジルエーテル、デシルグリシジルエーテ
ル、アリールグリシジルエーテル、フェニルグリシジル
エーテル等の炭素数2〜20のアルコールのグリシジル
エーテル類、ポリエチレングリコールジグリシジルエー
テル、ポリプロピレングリコールジグリシジルエーテル
、エチレングリコールジグリシジルエーテル、プロピレ
ングリコールジグリシジルエーテル、ネオベンチルグリ
コールシフリシジルエーテル、1゜6−ヘキサンシオー
ルジグリシジルエーテル、ジブロモネオペンチルグリコ
ールジグリシジルエーテル、グリセロールトリグリシジ
ルエーテル、トリメチロールプロパントリグリシジルエ
ーテル、ジグリセロールテトラグリシジルエーテノベポ
リグリセロールポリグリシジルエーテル等の、ポリオー
ルのポリグリシジルエーテル類、2.6−シブリシジル
フェニルグリシジルエーテル、2.62’、6’−テト
ラメチル−4,4°−ビフェニルジグリシジルエーテル
、ビスフェノールA型エポキシ樹脂、水素添加型ビスフ
ェノールA型エポキシ樹脂、ビスフェノールF型エポキ
シ樹脂、水素添加型ビスフェノールF型エポキシ樹脂、
ビスフェノールS型エポキシ樹脂、水素添加型ビスフェ
ノールS型エポキシ樹脂、フェノールノボラック型エポ
キシ樹脂、タレゾールノボラック型エポキシ樹脂、ハロ
ゲン化フェノールノボラック型エポキシ樹脂および臭素
化エポキシ樹脂等のグリシジルエーテル型エポキシ化合
物、アリサイクリックジェポキシアセクール、アリサイ
クリックジェポキシアジベイト、アリサイクリックジェ
ポキシアジペートおよびビニルシクロヘキセンジオキサ
イド等の環式脂肪族エポキシ化合物、グリシジルアクリ
レート、グリシジルメタクリレート、テトラヒドロキシ
フタル酸ジグリシジルエステル、ソルビン酸グリシジル
エステノペオレイン酸グリシジルエステルおよびリルイ
ン酸グリシジルエステル等の不飽和酸グリシジルエステ
ル類、ブチルグリシジルエステル、オクチルグリシジル
エステル、ヘキサヒドロフタル酸ジグリシジルエステル
およびダイマー酸グリシジルエステル等のアルキルカル
ボン酸グリシジルエステル類および安息香酸グリシジル
エステル、0−フタル酸ジグリシジルエステルおよびジ
グリシジルp−オキシ安息香酸等の芳香族カルボン酸グ
リシジルエステル類等のグリシジルエステル型エポキシ
化合物、テトラグリシジルジアミノジフェニルメタン、
トリグリシジル−p−アミノフェノール、トリグリシジ
ル−m−アミノフェノール、ジグリシジルアニリン、ジ
グリシジルトルイジン、テトラグリシジル−m−キシリ
レンジアミン、ジグリシジルトリブロムアニリンおよび
テトラグリシジルビスアミノメチルシクロヘキサン等の
グリシジルアミン型エポキシ化合物、ジグリシジルヒダ
ントイン、グリシジルグリシドオキシアルキルヒダント
インおよびトリグリシジジルイソシアヌレート等の複素
環式エポキシ化合物等が挙げられる。これらの内、2.
6.2°、6゛−テトラメチル−4,4゜ビフェニルジ
グリシジルエーテル、ノボラック型エポキシ樹脂、複素
環式エポキシ化合物が好ましい。Examples of the compound having at least one epoxy group used in the present invention include butyl glycidyl ether,
Glycidyl ethers of alcohols having 2 to 20 carbon atoms such as octyl glycidyl ether, decyl glycidyl ether, aryl glycidyl ether, phenyl glycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycidyl ether, etc. Glycidyl ether, neobentyl glycol sifuricidyl ether, 1゜6-hexanethiol diglycidyl ether, dibromoneopentyl glycol diglycidyl ether, glycerol triglycidyl ether, trimethylolpropane triglycidyl ether, diglycerol tetraglycidyl ether novel polyglycerol Polyglycidyl ethers of polyols such as polyglycidyl ether, 2,6-siblycidyl phenylglycidyl ether, 2.62',6'-tetramethyl-4,4°-biphenyl diglycidyl ether, bisphenol A type epoxy resin, Hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, hydrogenated bisphenol F type epoxy resin,
Glycidyl ether type epoxy compounds such as bisphenol S type epoxy resin, hydrogenated bisphenol S type epoxy resin, phenol novolak type epoxy resin, Talezol novolac type epoxy resin, halogenated phenol novolac type epoxy resin and brominated epoxy resin, Arisai Cycloaliphatic epoxy compounds such as Click Gepoxy Acecool, Alicyclic Gepoxy Adibate, Alicyclic Gepoxy Adipate and Vinyl Cyclohexene Dioxide, Glycidyl Acrylate, Glycidyl Methacrylate, Tetrahydroxyphthalic Acid Diglycidyl Ester, Sorbic Acid Unsaturated acid glycidyl esters such as glycidyl estenopeoleic acid glycidyl ester and lyluic acid glycidyl ester; alkyl carboxylic acid glycidyl esters such as butyl glycidyl ester, octyl glycidyl ester, hexahydrophthalic acid diglycidyl ester and dimer acid glycidyl ester; and glycidyl ester type epoxy compounds such as aromatic carboxylic acid glycidyl esters such as benzoic acid glycidyl ester, 0-phthalic acid diglycidyl ester and diglycidyl p-oxybenzoic acid, tetraglycidyl diaminodiphenylmethane,
Glycidylamine types such as triglycidyl-p-aminophenol, triglycidyl-m-aminophenol, diglycidylaniline, diglycidyltoluidine, tetraglycidyl-m-xylylenediamine, diglycidyltribromoaniline and tetraglycidylbisaminomethylcyclohexane. Epoxy compounds, heterocyclic epoxy compounds such as diglycidyl hydantoin, glycidylglycidoxyalkylhydantoin, and triglycidyl isocyanurate can be mentioned. Among these, 2.
6.2°, 6′-tetramethyl-4,4° biphenyl diglycidyl ether, novolac type epoxy resin, and heterocyclic epoxy compound are preferred.
これらのエポキシ化合物は単独または2種以上混合して
用いてもよく、液状感光性樹脂組成物の固形分100重
量部に対して、1〜40重量部が好ましく、特に5〜3
0重量部使用することが好ましい。1重量部未満では硬
化膜の強度、耐薬品性、電気的特性が不足し、40重量
部を越えると液の安定性が低下する。These epoxy compounds may be used alone or in a mixture of two or more, and preferably 1 to 40 parts by weight, particularly 5 to 3 parts by weight, based on 100 parts by weight of the solid content of the liquid photosensitive resin composition.
Preferably, 0 part by weight is used. If it is less than 1 part by weight, the strength, chemical resistance, and electrical properties of the cured film will be insufficient, and if it exceeds 40 parts by weight, the stability of the liquid will decrease.
本発明に用いられる光重合開始剤としては、例えばベン
ジル、ジアセチル等のα−ジケトン類、ベンゾイン等の
アシロイン類、ベンゾインメチルエーテル、ベンゾイン
エチルエーテル、ベンゾインイソプロピルエーテル等の
アシロインエーテル頚、チオキサントン、2.4−ジエ
チルチオキサントン、チオキサントン−1−スルホン酸
、チオキサントン−4−スルホン酸等のチオキサントン
類、ベンゾフェノ・ン、4,4° −ビス(ジメチルア
ミノ)ベンゾフェノン、4.4’ −ビス(ジエチルア
ミノ)ベンゾフェノン等のベンゾフェノン頚、アセトフ
ェノン、p−ジメチルアミノアセトフェノン、α、α°
−ジメトキシアセトキシアセトフェノン、2,2° −
ジフトキン−2−フェニルアセトフェノン、p−メトキ
シアセトフェノン、2−メチル−(4−(メチルチオ)
フェニルツー2−モルフォリノ−1−プロパノン等のア
セトフェノン類およびアントラキノン、1.4−ナフト
キノン等のキノン類、フェナシルクロライド、トリフロ
モメチルフェニルスルホン、トリス(トリクロロメチル
)−s−1−リアジン等のハロゲン化合物、ジ−t−ブ
チルパーオキサイド等の過酸化物などが挙げられる。Examples of the photopolymerization initiator used in the present invention include α-diketones such as benzyl and diacetyl, acyloins such as benzoin, acyloin ether necks such as benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether, thioxanthone, 2 Thioxanthone such as 4-diethylthioxanthone, thioxanthone-1-sulfonic acid, thioxanthone-4-sulfonic acid, benzophenone, 4,4°-bis(dimethylamino)benzophenone, 4,4′-bis(diethylamino)benzophenone Benzophenone neck, acetophenone, p-dimethylaminoacetophenone, α, α° etc.
-dimethoxyacetoxyacetophenone, 2,2° -
diftquin-2-phenylacetophenone, p-methoxyacetophenone, 2-methyl-(4-(methylthio)
Acetophenones such as phenyl-2-morpholino-1-propanone, quinones such as anthraquinone and 1,4-naphthoquinone, and halogens such as phenacyl chloride, trifluoromethylphenylsulfone, and tris(trichloromethyl)-s-1-lyazine. compounds, peroxides such as di-t-butyl peroxide, and the like.
これらの光重合開始剤は単独または2種以上混合して用
いてもよく、液状感光性樹脂組成物の固形分100重量
部に対して、0.1〜20重量部が好ましく、特に0.
2〜10重量部使用することが好ましい。0.1重量部
未満では感度が低下し、20重量部を越えると結晶の析
出、下部の硬化不足が起こる。These photopolymerization initiators may be used alone or in combination of two or more, and are preferably 0.1 to 20 parts by weight, particularly 0.1 to 20 parts by weight, based on 100 parts by weight of the solid content of the liquid photosensitive resin composition.
It is preferable to use 2 to 10 parts by weight. If it is less than 0.1 part by weight, sensitivity decreases, and if it exceeds 20 parts by weight, precipitation of crystals and insufficient hardening of the lower part occur.
エポキシ基を熱反応させる熱硬化性触媒としては、ジエ
チレントリアミン、トリエチレンテトラミン、テトラエ
チレンペンタミン、イミノビスプロピルアミン(ジプロ
ピルトリアミン)、ビス(ヘキサメチレン) トリアミ
ン、1.3.6−)リスアミノメチルヘキサン等のポリ
アミン類、トリメチルへキサメチレンジアミン、ポリエ
ーテルジアミン、ジエチルアミノプロビルアミン等のポ
リメチレンジアミン類、メンセンジアミン、インフォロ
ンジアミン、ビス(4−アミノ−3−メチルシクロヘキ
シル)メタンおよびN−アミノエチルピペラジン等の脂
環族ポリアミン類等の脂肪族第一アミン、メタフェニレ
ンジアミン、ジアミノフェニルメタン、ジアミノフェニ
ルスルフォンおよび芳香族ジアミン共融混合物等の芳香
族第一アミン類、ポリアミンエポキシ樹脂アダクト、ポ
リアミンーエチレンオキシドアダクト、ポリアミ2ンー
プロピレンオキシドアダクト、シアノエチル化ポリアミ
ン、ケトイミン等の変性アミン、ピペリジン、ピペラジ
ン、モルフォリン等の第三アミン、および、テトラメチ
ルグアニジン、トリエタノールアミン、ベンジルジメチ
ルアミン、2.4.6−トリス(ジメチルアミノメチル
)フェノール等の第三アミン等のアミン化合物類、無水
フタル酸、無水トリメリット酸、エチレングリコールビ
ス(アンヒドロトリメリテート)、グリセリントリス(
アンヒドロトリメリテート)、無水ピロメリット酸、3
.3’ 、4.4’ −ベンゾフェノンテトラカルボン
酸無水物等の芳呑族酸無水物、無水マレイン酸、無水コ
ハク酸、テトラヒドロ無水フタル酸、メチルテトラヒド
ロ無水フタル酸、エンル無水コハク酸、ヘキサヒドロ無
水フタル酸、メチルへキサヒドロ無水フタル酸、メチル
シクロヘキセンテトラカルボン酸無水物等の環状脂肪族
酸無水物、ポリアジピン酸無水物、ポリアゼライン酸無
水物、ポリセバシン酸無水物等の脂肪族酸無水物、およ
び、クロレンド酸無水物、テトラブロモ無水フタル酸等
のハロゲン化酸無水物等の酸無水物類、2−メチルイミ
ダゾール、2−エチル−4−メチルイミダゾール、2−
ウンデシルイミダゾール、2−ヘプタデシルイミダゾー
ル、2−フェニルイミタソール、1−ベンジル−2−メ
チルイミダゾール、1−シアノエチル−2−メチルイミ
ダゾール、1−シアノエチル−2−エチル−4−メチル
イミダゾール、1−シアノエチル−2−ウンデシルイミ
ダゾール、1−シアノエチル−2−ウンデシルイミダゾ
リウム・トリメリテート、1−シアンエチル−2−フェ
ニルイミダゾリウム・トリメリテート、2−メチルイミ
ダゾリウム・インシアヌレート、2〜フエニルイミダゾ
リウム・イソシアヌレート、2,4−ジアミノ−6−〔
2−メチルイミダゾリル−(I)〕−〕エチルー8−ト
リアジン2,4−ジアミノ−6−〔2−エチル−4−メ
チルイミダゾリル−(I)〕−二チルーS−)リアジン
、2,4−ジアミノ−6−〔2−ウンデシルイミダゾリ
ル−(I))−エチル−8−トリアジン、2−フェニル
−4−メチル−5−t=)’ロキシメチルイミダゾール
、2−フェニル−4,5−ジヒドロキシメチルイミダゾ
ール、1−シアノエチル−2−フェニル−4,5−ジ(
シアノエトキシメチル)イミダゾール、■−ドデシルー
2−メチルー3−ベンジルイミダゾリウム・クロライド
および1.3−ジベンジル−2−メチルイミダゾリウム
・クロライド等のイミダゾール化合物類、ノボラック型
フェノール樹脂、クレゾール型フェノール樹脂、レゾル
シノール型フェノール樹脂およびポリビニルフェノール
等のフェノール類、三フッ化ホウ素−アミン錯体、五フ
ッ化ホウ素−アミン錯体および五フッ化ヒ素−アミン錯
体等のルイス酸−アミン錯体類、ジシアンジアミド、0
−)リルビグアニド、フェニルビグアニドおよびα−2
,5−ジメチルビグアニド等のジシアンジアミド誘導体
、コハク酸ヒドラジド、アジピン酸ヒドラジド、イソフ
タル酸ヒドラジドおよびp−オキシ安息香酸ヒドラジド
等の有機酸ヒドラジド類、ジアミノマレオニトリルおよ
びベンジルジアミノマレオニトリル等のジアミノマレオ
ニトリル誘導体、メラミンおよびN、 N−ジアリルメ
ラミン等のメラミン誘導体、アミンイミド誘導体、ポリ
メルカプタン類等の公知のエポキシ硬化促進剤を用いる
ことができる。Thermosetting catalysts for thermally reacting epoxy groups include diethylenetriamine, triethylenetetramine, tetraethylenepentamine, iminobispropylamine (dipropyltriamine), bis(hexamethylene)triamine, 1.3.6-)risamino Polyamines such as methylhexane, polymethylene diamines such as trimethylhexamethylene diamine, polyether diamine, diethylaminoprobylamine, menthene diamine, infron diamine, bis(4-amino-3-methylcyclohexyl)methane and N - Aliphatic primary amines such as alicyclic polyamines such as aminoethylpiperazine, aromatic primary amines such as metaphenylenediamine, diaminophenylmethane, diaminophenyl sulfone and aromatic diamine eutectic mixtures, polyamine epoxy resin adducts , polyamine-ethylene oxide duct, polyamine-propylene oxide duct, cyanoethylated polyamine, modified amine such as ketoimine, tertiary amine such as piperidine, piperazine, morpholine, and tetramethylguanidine, triethanolamine, benzyldimethylamine, 2 4. Amine compounds such as tertiary amines such as 6-tris(dimethylaminomethyl)phenol, phthalic anhydride, trimellitic anhydride, ethylene glycol bis(anhydrotrimellitate), glycerin tris(
anhydrotrimellitate), pyromellitic anhydride, 3
.. Aromatic acid anhydrides such as 3',4,4'-benzophenonetetracarboxylic anhydride, maleic anhydride, succinic anhydride, tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, enru succinic anhydride, hexahydrophthalic anhydride acids, cyclic aliphatic acid anhydrides such as methylhexahydrophthalic anhydride, methylcyclohexenetetracarboxylic anhydride, aliphatic acid anhydrides such as polyadipic anhydride, polyazelaic anhydride, polysebacic anhydride, and Acid anhydrides such as chlorendic anhydride, halogenated acid anhydrides such as tetrabromo-phthalic anhydride, 2-methylimidazole, 2-ethyl-4-methylimidazole, 2-
Undecylimidazole, 2-heptadecylimidazole, 2-phenylimitasol, 1-benzyl-2-methylimidazole, 1-cyanoethyl-2-methylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1- Cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-undecylimidazolium trimellitate, 1-cyanoethyl-2-phenylimidazolium trimellitate, 2-methylimidazolium incyanurate, 2-phenylimidazolium・Isocyanurate, 2,4-diamino-6-[
2-Methylimidazolyl-(I)]-]ethyl-8-triazine2,4-diamino-6-[2-ethyl-4-methylimidazolyl-(I)]-dithyl-S-)riazine, 2,4-diamino -6-[2-Undecylimidazolyl-(I))-ethyl-8-triazine, 2-phenyl-4-methyl-5-t=)'roxymethylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole , 1-cyanoethyl-2-phenyl-4,5-di(
Imidazole compounds such as cyanoethoxymethyl)imidazole, ■-dodecyl-2-methyl-3-benzylimidazolium chloride and 1,3-dibenzyl-2-methylimidazolium chloride, novolac type phenolic resin, cresol type phenolic resin, resorcinol type phenolic resins and phenols such as polyvinylphenol, Lewis acid-amine complexes such as boron trifluoride-amine complexes, boron pentafluoride-amine complexes and arsenic pentafluoride-amine complexes, dicyandiamide, 0
-) rilbiguanide, phenylbiguanide and α-2
, dicyandiamide derivatives such as 5-dimethylbiguanide, organic acid hydrazides such as succinic acid hydrazide, adipic acid hydrazide, isophthalic acid hydrazide and p-oxybenzoic acid hydrazide, diaminomaleonitrile derivatives such as diaminomaleonitrile and benzyldiaminomaleonitrile, Known epoxy curing accelerators such as melamine and melamine derivatives such as N,N-diallylmelamine, amine imide derivatives, and polymercaptans can be used.
これらの熱硬化触媒は単独または2種以上混合して用い
てもよく、液状感光性樹脂組成物の固形分100重量部
に対して、0.01〜lO重量部が好ましく、特に0.
05〜5重1部使用することが好ましい。0.01重量
部未満では硬化膜の強度が不足し、10重量部を越える
と結晶の析出、液の安定性の低下が起こる。These thermosetting catalysts may be used alone or in combination of two or more, and are preferably 0.01 to 10 parts by weight, particularly 0.01 to 10 parts by weight, based on 100 parts by weight of solid content of the liquid photosensitive resin composition.
It is preferable to use 1 part of 05-5 weight. If it is less than 0.01 part by weight, the strength of the cured film will be insufficient, and if it exceeds 10 parts by weight, precipitation of crystals and a decrease in stability of the liquid will occur.
本発明に用いられる有機溶剤としては、メチルエチルケ
トン、シクロヘキサノン等のケトン類、トルエン、キシ
レン等の芳香族炭化水素類、セロソルブ、ブチルセロソ
ルブ等のセロソルブ類、カルピトール、ブチルカビトー
ル等のカルピトール類、酢酸エチノペ酢酸ブチル、セロ
ソルブアセテ−ト、ブチルセロソルブアセテート、カル
ピトールアセテート、ブチルカルピトールアセテート等
の酢酸エステル類などがある。Examples of organic solvents used in the present invention include ketones such as methyl ethyl ketone and cyclohexanone, aromatic hydrocarbons such as toluene and xylene, cellosolves such as cellosolve and butyl cellosolve, calpitols such as calpitol and butyl cavitol, and acetic acid ethynopeacetic acid. Examples include acetic acid esters such as butyl, cellosolve acetate, butyl cellosolve acetate, carpitol acetate, and butyl carpitol acetate.
これらの有機溶剤は、液状感光性樹脂組成物100重量
部に対して、10〜50重量部が好ましく、特に20〜
40重量部使用することが好ましい。10重量部未満で
は液粘度が高く、50重量部を越えると液粘度が低くい
ずれも作業性が低下する。The amount of these organic solvents is preferably 10 to 50 parts by weight, particularly 20 to 50 parts by weight, based on 100 parts by weight of the liquid photosensitive resin composition.
Preferably, 40 parts by weight are used. If it is less than 10 parts by weight, the liquid viscosity will be high, and if it exceeds 50 parts by weight, the liquid viscosity will be low and workability will decrease in either case.
本発明の液状感光性樹脂組成物には、乾燥時の重合防止
のために熱重合防止剤を配合することが好ましい。熱重
合防止剤としては、例えば、ハイドロキノン、p−メト
キシフェノール、p−t−ブチルカテコール、2.6−
ジーt−ブチル−p−クレゾール、β−ナフトール、ピ
ロガロール等の芳香族ヒドロキシ化合物、ベンゾキノン
、p−トルキノン等のキノン類、ナフチルアミン、ピリ
ジン、p−トルイジン、フェノチアジン等のアミン類、
N−ニトロンフェニルヒドロキシルアミンのアルミニウ
ム塩またはアンモニウム塩、フロラニール、ニトロベン
ゼン等が挙げられる。The liquid photosensitive resin composition of the present invention preferably contains a thermal polymerization inhibitor to prevent polymerization during drying. Examples of the thermal polymerization inhibitor include hydroquinone, p-methoxyphenol, pt-butylcatechol, 2.6-
Aromatic hydroxy compounds such as di-t-butyl-p-cresol, β-naphthol, and pyrogallol; quinones such as benzoquinone and p-toluquinone; amines such as naphthylamine, pyridine, p-toluidine, and phenothiazine;
Examples include aluminum salt or ammonium salt of N-nitron phenylhydroxylamine, floranil, nitrobenzene, and the like.
さらに、本発明の液状感光性樹脂組成物には、粘着付与
剤、密着促進剤、分散剤、可塑剤、垂れ防止剤、レベリ
ング剤、消泡剤、難燃化剤、光沢剤、着色剤等の補助的
添加剤を必要に応じて配合してもよい。Furthermore, the liquid photosensitive resin composition of the present invention includes a tackifier, an adhesion promoter, a dispersant, a plasticizer, an anti-sagging agent, a leveling agent, an antifoaming agent, a flame retardant, a brightening agent, a coloring agent, etc. Supplementary additives may be added as necessary.
粘着付与剤または密着促進剤としては、例えばアルキル
フェノール/ホルムアルデヒドノボラック
ク樹脂、ポリビニルブチラ−ル、ポリビニルイソブチル
エーテル、ポリビニルブチラール、ポリイソブチレン、
スチレン−ブタジェン共重合体ゴム、ブチルゴム、塩化
ビニル−酢酸ビニル共重合体、塩化ゴム、アクリル樹脂
系粘着剤、芳香族系、脂肪族系または脂環族系の石油樹
脂等が挙げられる。Examples of the tackifier or adhesion promoter include alkylphenol/formaldehyde novolac resin, polyvinyl butyral, polyvinyl isobutyl ether, polyvinyl butyral, polyisobutylene,
Examples include styrene-butadiene copolymer rubber, butyl rubber, vinyl chloride-vinyl acetate copolymer, chlorinated rubber, acrylic resin adhesive, aromatic, aliphatic, or alicyclic petroleum resin.
粘着付与剤または密着促進剤の添加により、光硬化後の
感光性樹脂の基板との密着性が高まり、特に、銅印刷配
線板および半田印刷配線板に使用する際にその効果が大
きく発揮される。Addition of a tackifier or adhesion promoter increases the adhesion of the photosensitive resin to the substrate after photocuring, and this effect is particularly significant when used for copper printed wiring boards and solder printed wiring boards. .
分散剤は液状感光性組成物の分散性、保存安定性等を向
上させるために使用される。可塑剤、垂れ防止剤、レベ
リング剤および消泡剤の配合の必要性は、液状感光性樹
脂組成物の使用方法、すなわち液状感光性樹脂組成物の
塗膜の作成方法に依存し、使用する種類と量は適宜選択
される。A dispersant is used to improve the dispersibility, storage stability, etc. of a liquid photosensitive composition. The necessity of blending plasticizers, anti-sagging agents, leveling agents, and antifoaming agents depends on the method of using the liquid photosensitive resin composition, that is, the method of creating a coating film of the liquid photosensitive resin composition, and depends on the type used. and the amount is selected accordingly.
これらの補助的添加剤は、単一の化合物が一種類の性質
(分散性、可塑性、垂れ防止性、レベリング性または消
泡性)を示すのみではなく、複数の添加効果を示すこと
がある。例えば、分散剤は液状感光性樹脂組成物の可塑
剤、レベリング剤および消泡剤としても働くことがあり
、また分散剤、垂れ防止剤、レベリング剤および消泡剤
は、光硬化後の感光性樹脂組成物の光沢性にも効果を示
し、光沢剤として働くこともある。A single compound of these auxiliary additives may not only exhibit one type of property (dispersibility, plasticity, anti-sagging, leveling or antifoaming properties), but may also exhibit multiple additive effects. For example, dispersants may also act as plasticizers, leveling agents, and antifoaming agents in liquid photopolymer compositions, and dispersants, anti-sag agents, leveling agents, and antifoaming agents may also act as plasticizers, leveling agents, and antifoaming agents in liquid photopolymer compositions, and dispersants, anti-sag agents, leveling agents, and antifoaming agents may also act as plasticizers, leveling agents, and antifoaming agents in liquid photosensitive resin compositions; It also has an effect on the glossiness of resin compositions, and may act as a brightening agent.
分散剤としては、例えばフッ素含有高分子化合物、界面
活性剤、改質レシチン、非シリコン系の長鎖カルボン酸
アミン塩、有機モントモリライトなどが用いられる。As the dispersant, for example, a fluorine-containing polymer compound, a surfactant, a modified lecithin, a non-silicon long chain carboxylic acid amine salt, an organic montmorillite, etc. are used.
可塑剤としては、例えばエチレングリコールシフタレー
ト、ジエチレングリコールシフタレート、エチレングリ
コールシカプリン酸エステル、ジエチレングリコールジ
カブリン酸エステル等のグリコールエステル類、ジメチ
ルフタレート、ジエチルフタレート、ジブチルフタレー
ト、ジオクチルフタレート、ジアリールフタレート、ブ
チルベンジルフタレート等のフタル酸エステル類、トリ
フェニルホスフェート、トリクレジルホスフェート等の
リン酸エステル類、ジエチルマレート、ジブチルアジペ
ート、クエン酸トリエチル、ラウリル酸エチル等が用い
られる。Examples of plasticizers include glycol esters such as ethylene glycol siphthalate, diethylene glycol siphthalate, ethylene glycol capriate, and diethylene glycol dicabrate, dimethyl phthalate, diethyl phthalate, dibutyl phthalate, dioctyl phthalate, diaryl phthalate, and butyl benzyl. Phthalic acid esters such as phthalate, phosphoric acid esters such as triphenyl phosphate and tricresyl phosphate, diethyl maleate, dibutyl adipate, triethyl citrate, and ethyl laurate are used.
垂れ防止剤としては、例えばタルク、マイカ、二酸化ケ
イ素、二酸化チタン、炭酸カルシウム、炭酸マグネシウ
ム、炭酸バリウム、硫酸カルシウム、硫酸マグネシウム
、硫酸バリウム等の無機質の微粉末が用いられる。As the anti-sag agent, inorganic fine powder such as talc, mica, silicon dioxide, titanium dioxide, calcium carbonate, magnesium carbonate, barium carbonate, calcium sulfate, magnesium sulfate, barium sulfate, etc. is used.
着色剤としては、例えば酸化チタン、カーボンブラック
、酸化鉄などの無機顔料、メチレンプル、クリスタルバ
イオレット、ローダミンB1フクシン、オーラミン、ア
ゾ系染料、アントラキノン系染料等の有機染料、フタロ
シアニンブルーフタロシアニングリーン等のフタロシア
ニン系またはアゾ系有FB顔料が用いられる。Examples of coloring agents include inorganic pigments such as titanium oxide, carbon black, and iron oxide, organic dyes such as methylene chloride, crystal violet, rhodamine B1 fuchsin, auramine, azo dyes, and anthraquinone dyes, and phthalocyanine dyes such as phthalocyanine blue and phthalocyanine green. Alternatively, an azo-based FB pigment is used.
また難燃化剤としては、例えば三酸化アンチモン、水酸
化ジルコニウム、メタホウ酸バリウム、水酸化マグネシ
ウム、水酸化アルミニウム等の無う
機系難燃化剤、テ)ffブロモビスフェノールA、塩素
化ハラフィン、パークロロペンタシクロデカン、テトラ
ブロモベンゼン、塩fi化ジフェニル等のハロゲン系!
#燃化剤、および塩化ホスフォニトリル誘導体、ビニル
ホスフォネート、アリルホスフォネート、トリス(β−
クロロエチル)ホスフォネート、トリクレジルホスフォ
ネート、リン酸アンモミウム等のリン系難燃化剤が用い
られる。Examples of flame retardants include non-organic flame retardants such as antimony trioxide, zirconium hydroxide, barium metaborate, magnesium hydroxide, and aluminum hydroxide; Halogen-based products such as perchloropentacyclodecane, tetrabromobenzene, and diphenyl chloride!
#Flameants, and chlorinated phosphonitrile derivatives, vinyl phosphonates, allyl phosphonates, tris(β-
Phosphorous flame retardants such as chloroethyl) phosphonate, tricresyl phosphonate, and ammonium phosphate are used.
このようにして得られる本発明の液状感光性樹脂組成物
を用いて画像を形成するに際しては、この液状感光性樹
脂組成物を基板に塗布後、加熱硬化して表面を非粘着性
とし、次いで硬化塗膜にパターンマスクを密着させて露
光しアルカリ性水溶液により現像し、未硬化膜を溶出し
、画像を得る本発明の液状感光性樹脂組成物を基板上に
塗布する方法としては、たとえば、スプレー法、デイツ
プ法、はけ塗り法、ローラー塗装法、フローコーター法
、カーテンコート法、スクリーン印刷法等が挙げられ、
特に印刷配線板や薄膜金属等に塗布するには、ローラー
塗装法、カーテンコート法、スクリーン印刷法等が好ま
しい。When forming an image using the liquid photosensitive resin composition of the present invention obtained in this manner, the liquid photosensitive resin composition is applied to a substrate, heated and cured to make the surface non-adhesive, and then The method of applying the liquid photosensitive resin composition of the present invention onto a substrate by applying a pattern mask to the cured coating film, exposing it to light, developing it with an alkaline aqueous solution, and eluting the uncured film to obtain an image includes, for example, spraying. method, dip method, brush coating method, roller coating method, flow coater method, curtain coating method, screen printing method, etc.
In particular, for coating printed wiring boards, thin metal films, etc., roller coating methods, curtain coating methods, screen printing methods, etc. are preferred.
本発明の液状感光性樹脂組成物は、熱および光のいずれ
を用いても硬化することができ、特にホトレジストとし
て用いる際には、活性光線を照射する前に、塗膜を加熱
硬化して塗膜表面の粘着性を消失させる。この際の加熱
硬化の条件は、例えば70〜120℃で5〜30分が好
ましい。このように加熱硬化する結果、非粘着性となり
、硬化塗膜にパターンマスクを密着させて露光すること
が可能となる。The liquid photosensitive resin composition of the present invention can be cured using both heat and light. In particular, when used as a photoresist, the coating film is cured by heating before irradiation with actinic rays. Eliminates the stickiness of the membrane surface. The heat curing conditions at this time are preferably, for example, 70 to 120°C for 5 to 30 minutes. As a result of heating and curing in this manner, it becomes non-adhesive, and it becomes possible to expose the cured coating film with a pattern mask in close contact with it.
本発明の液状感光性樹脂組成物の光硬化に用いられる露
光光源としては、低圧水銀灯、中圧水銀灯、高圧水銀灯
、超高圧水銀灯、キセノンランプ、メタルハライドラン
プおよびレーザー光線等が挙げられるが、300ntn
〜400T1rl’l付近の紫外線を放射する高圧水銀
灯、超高圧水銀灯またはメタルハライドランプを光源と
した露光装置を用いることが好ましい。Examples of the exposure light source used for photocuring the liquid photosensitive resin composition of the present invention include low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, metal halide lamps, laser beams, etc., and 300 ntn
It is preferable to use an exposure apparatus whose light source is a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, or a metal halide lamp that emits ultraviolet rays around 400 T1rl'l.
本発明の液状感光性樹脂組成物は、アルカリ水溶液によ
り現像することができる。現像液としては、例えば水酸
化ナトリウム、水酸化カリウム、水酸化リチウム、炭酸
ナトリウム、炭酸カリウム、炭酸リチウム、アンモニア
等の0.1〜10重量%の水溶液を用いることができる
が、しかし場合によっては、アミン類、例えばブチルア
ミン、ヘキシルアミン、ベンジルアミン、アリルアミン
等の1級アミン、ジエチルアミン、ベンジルエチルアミ
ン等の2級アミン、トリエチルアミン等の3級アミン、
エタノールアミン、ジェタノールアミン、トリエタノー
ルアミン、2−アミノ〜1゜3−プロ冬パンジオール等
のヒドロキシルアミン、モルホリン、ピリジン、ピペラ
ジン、ピペリジン等の環状アミン、ヒドラジン、エチレ
ンジアミン、ヘキサメチレンジアミン等のポリアミン、
前記アミンの硫酸塩、炭酸塩、重炭酸塩、アルカリ金属
リン酸塩、ピロリン酸塩等の塩基性塩、テトラメチルア
ンモニウムヒドロキシド、コリン等の4級アンモニウム
塩ヒドロキシド等を使用することもできる。The liquid photosensitive resin composition of the present invention can be developed with an alkaline aqueous solution. As the developer, for example, a 0.1 to 10% by weight aqueous solution of sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate, lithium carbonate, ammonia, etc. can be used, but in some cases. , amines such as primary amines such as butylamine, hexylamine, benzylamine, allylamine, secondary amines such as diethylamine and benzylethylamine, tertiary amines such as triethylamine,
Hydroxylamines such as ethanolamine, jetanolamine, triethanolamine, 2-amino to 1゜3-prowinterpanediol, cyclic amines such as morpholine, pyridine, piperazine, piperidine, etc., polyamines such as hydrazine, ethylenediamine, hexamethylenediamine, etc. ,
Basic salts of the amines such as sulfates, carbonates, bicarbonates, alkali metal phosphates, pyrophosphates, quaternary ammonium salts such as tetramethylammonium hydroxide, choline hydroxide, etc. can also be used. .
また、本発明の液状感光性樹脂組成物は、画像形成後、
必要に応じて加熱処理により後硬化することによって、
耐熱性のより向上した硬化膜とすることもできる。この
際の条件は、例えば、120〜170℃で10〜60分
が好ましい。Further, the liquid photosensitive resin composition of the present invention can be used after image formation.
By post-curing by heat treatment as necessary,
It is also possible to form a cured film with improved heat resistance. The conditions at this time are preferably, for example, 120 to 170°C for 10 to 60 minutes.
露光前の硬化および画像形成後の後硬化における加熱処
理は、熱風循環式乾燥炉、遠赤外線乾燥炉など加熱装置
をもちいることが出来る。For the heat treatment in curing before exposure and post-curing after image formation, a heating device such as a hot air circulation drying oven or a far-infrared drying oven can be used.
以下、本発明を実施例に基づいて更に詳細に説明するが
、本発明はこの実施例によって限定されるものではない
。なお、他にことわりのない限り「部」は「重量部Jを
表す。Hereinafter, the present invention will be explained in more detail based on Examples, but the present invention is not limited by these Examples. In addition, unless otherwise specified, "parts" represent "parts by weight J."
(合成例−1)
4−ビニルフェニルグリシジルエーテルのビニル重合体
100部、メタクリル酸51.3部、フエッチアジン0
.11Nをカルピトールアセテ−)101.7部に溶解
し、ベンジルトリエチルアンモニウムクロライド1.
3部を加え、80℃で12時間撹拌する。(Synthesis Example-1) 100 parts of vinyl polymer of 4-vinylphenyl glycidyl ether, 51.3 parts of methacrylic acid, 0 fetchazine
.. 11N was dissolved in 101.7 parts of carpitol acetate, and 1.1N of benzyltriethylammonium chloride was dissolved.
Add 3 parts and stir at 80°C for 12 hours.
この反応物に、テトラヒドロ無水フタル酸846Bを加
え、80℃で4時間撹拌することにより、変性ポリスチ
レン樹脂lを得た。Tetrahydrophthalic anhydride 846B was added to this reaction product, and the mixture was stirred at 80°C for 4 hours to obtain modified polystyrene resin 1.
(合成例−2)
合成例−1のカルピトールアセテ−[01゜7部を89
.3部に、テトラヒドロ無水フタル酸84.6部を無水
コハク酸55.7部に変更する他は合成例−1と同様に
して変性ポリスチレン樹脂2を得た。(Synthesis Example-2) Carpitol acetate [01°7 parts of Synthesis Example-1 was converted to 89
.. Modified polystyrene resin 2 was obtained in the same manner as in Synthesis Example 1, except that 84.6 parts of tetrahydrophthalic anhydride was replaced with 55.7 parts of succinic anhydride.
(合成例−3)
エビクロンN−673(大日本インキ@製 クレゾール
ノボラック型エポキシ樹脂 エポキシ当量210)10
0部、アクリル酸35.7部、ハイドロキノン0.07
部をカルピトールアセテ−)88.8部に溶解し、ベン
ジルトリエチルアンモニウムクロライド1.07部を加
え、80℃で12時間撹拌する。(Synthesis example-3) Ebicuron N-673 (Dainippon Ink @ cresol novolac type epoxy resin epoxy equivalent 210) 10
0 parts, 35.7 parts of acrylic acid, 0.07 parts of hydroquinone
1.07 parts of benzyltriethylammonium chloride was added to the solution, and the mixture was stirred at 80°C for 12 hours.
この反応物に、テトラヒドロ無水フタル酸704部を加
え、80℃で4時間撹拌することにより、重合性樹脂3
を得た。By adding 704 parts of tetrahydrophthalic anhydride to this reaction product and stirring at 80°C for 4 hours, the polymerizable resin 3.
I got it.
(合成例−4ン
合成例−3のカルピトールアセテート88.8部を78
.4部に、テトラヒドロ無水フタル酸70.4部を無水
コハク酸46.−28に変更する他は合成例−3と同様
にして重合性樹脂4を得た。(Synthesis Example-4) 88.8 parts of carpitol acetate of Synthesis Example-3 was added to 78
.. 4 parts, 70.4 parts of tetrahydrophthalic anhydride and 46.4 parts of succinic anhydride. Polymerizable resin 4 was obtained in the same manner as in Synthesis Example 3 except that -28 was used.
(実施例−1)
〈成分 M〉
合成例−1で得た変性ポリスチレン樹脂1350部
フローレンrAc−3Q OJ 15部(共
栄社油脂化学工業(株)製の消泡剤ンフタロシアニン・
グリーン 2.5部イルガキニア907
27.5部(チバガイギー社製の光重合開始剤)
シリカ 5部硫酸バリウム
90部
1−ベンジル−2−メチルイミダソール10部
く成分 N 〉
トリグリシジル 100部インシア
ヌレート
ジペンタエリスリトール 361fflへ
キサアクリレート
タルク 14部セロソル
ブアセテート 50部成分 N 合計
200部
上記成分MSN を、それぞれ別々にロールミルによ
り混練してインキを調整した。(Example-1) <Component M> 1350 parts of the modified polystyrene resin obtained in Synthesis Example-1 15 parts of Florene rAc-3Q OJ (antifoaming agent Nphthalocyanine manufactured by Kyoeisha Yushi Kagaku Kogyo Co., Ltd.)
Green 2.5 part Irgakinia 907
27.5 parts (photopolymerization initiator manufactured by Ciba Geigy) Silica 5 parts Barium sulfate 90 parts 1-benzyl-2-methylimidazole 10 parts Ingredients N > Triglycidyl 100 parts Incyanurate Dipentaerythritol 361 ffl Hexa Acrylate talc 14 parts Cellosolve acetate 50 parts Ingredients N Total
200 parts of the above components MSN were individually kneaded using a roll mill to prepare an ink.
次いで、成分Mと成分N を混練し、液状感光性樹脂組
成物を得た。Next, component M and component N were kneaded to obtain a liquid photosensitive resin composition.
(比較例−1)
実施例−1の変性ポリスチレン樹脂lの代わりに、合成
例−3で得た重合性樹脂3を用いる他は実施例−1と同
様にして、液状感光性樹脂組成物を得た。(Comparative Example-1) A liquid photosensitive resin composition was prepared in the same manner as in Example-1 except that the polymerizable resin 3 obtained in Synthesis Example-3 was used instead of the modified polystyrene resin 1 in Example-1. Obtained.
(実施例−2)
実施例−1の変性ポリスチレン樹脂10代わりに、合成
例−2で得た変性ポリスチレン樹脂2を用いる他は実施
例−1と同様にして、液状感光性樹脂組成物を得た。(Example-2) A liquid photosensitive resin composition was obtained in the same manner as in Example-1 except that modified polystyrene resin 2 obtained in Synthesis Example-2 was used instead of modified polystyrene resin 10 in Example-1. Ta.
(比較例−2)
実施例−1の変性ポリスチレン樹脂1の代わりに、合成
例−4で得た重合性樹脂4を用いる他は実施例−1と同
様にして、液状感光性樹脂組成物を得た。(Comparative Example-2) A liquid photosensitive resin composition was prepared in the same manner as in Example-1 except that polymerizable resin 4 obtained in Synthesis Example-4 was used instead of modified polystyrene resin 1 in Example-1. Obtained.
これらの液状感光性樹脂組成物の性能を、以下の方法に
より、評価した結果を表−1に示す。Table 1 shows the results of evaluating the performance of these liquid photosensitive resin compositions by the following method.
■、塗膜の形成
銅張積層板を、研磨、洗浄、水分除去により前処理を行
う。前処理した銅張積層板上に各種条件で調整した液状
感光性樹脂組成物をスクリーン印側法により全面に塗布
し、熱風循環式乾燥炉中において70℃で30分間乾燥
し、塗膜を得た。(2) Formation of coating film The copper-clad laminate is pretreated by polishing, cleaning, and removing moisture. A liquid photosensitive resin composition adjusted under various conditions was applied to the entire surface of the pretreated copper-clad laminate using a screen printing method, and dried at 70°C for 30 minutes in a hot air circulation drying oven to obtain a coating film. Ta.
■、現像性の評価
下記の条件にて塗膜を現像し、塗膜が溶解する時間を測
定した。(2) Evaluation of developability The coating film was developed under the following conditions, and the time required for the coating film to dissolve was measured.
■、感度の評価
濃度の段差0.15(ΔlogE)の階段ウェッジを塗
膜に密着させ、5KW超高圧水銀灯で1000m j/
cm2露光し、塗膜が溶解する時間の2倍の時間で現像
してウェッジに対応する陰画像を得、画像が完全に溶出
した段数(クリア段数)を調べた。■Evaluation of sensitivity A step wedge with a density difference of 0.15 (ΔlogE) was brought into close contact with the paint film, and a 5KW ultra-high pressure mercury lamp was used to illuminate the film for 1000 m/j/
A negative image corresponding to the wedge was obtained by exposing the film to light of cm2 and developing it for twice the time taken for the coating film to dissolve.The number of stages at which the image was completely dissolved (clear stage number) was determined.
■、鉛筆硬度の評価
クリア段数が12段になる露光量でベタ露光し、■と同
様に現像した後、熱風乾燥炉中において140℃で50
分間後硬化し、JIS K 5400 6−14に
準じて測定した。■、Continuous exposure with an exposure amount that makes the pencil hardness evaluation clear stage number 12 steps、Developed in the same way as ■、50℃ at 140℃ in a hot air drying oven
After curing for a few minutes, measurements were made according to JIS K 5400 6-14.
■、密着性の評価
鉛筆硬度の評価と同様に、露光・現像・後硬化を行い、
JIS K 5400 6−15に準じて、基盤目
試験を行った。■ Evaluation of adhesion In the same way as the evaluation of pencil hardness, perform exposure, development, and post-curing.
A substrate test was conducted according to JIS K 5400 6-15.
■、絶縁抵抗の評価
[’C−B−25テストパターンを形成した両面銅張積
層板を用いた以外は、鉛筆硬度の評価方法と同様に、露
光・現像・後硬化を行い、JISZ 3197に従っ
て、絶縁抵抗を、アトパンテスト(株)製のrTR−8
601Jを用いて、DC500V印加後、1分での抵抗
値を調べた。■ Evaluation of insulation resistance ['C-B-25 Except that a double-sided copper-clad laminate with a test pattern formed thereon was used, exposure, development, and post-curing were performed in the same manner as the pencil hardness evaluation method, and in accordance with JISZ 3197. , the insulation resistance was determined using rTR-8 manufactured by Atopan Test Co., Ltd.
Using 601J, the resistance value was measured 1 minute after applying 500V DC.
■、耐溶剤性の評価
絶縁抵抗の評価と同様に、露光・現像・後硬化を行い、
試料を1.1.1− )ジクロロエタン中に、20℃で
1時間浸漬させたのち、塗膜の状態と密着性を総合的に
判定した。■、Solvent resistance evaluationSimilar to the insulation resistance evaluation, perform exposure, development, and post-curing.
The sample was immersed in 1.1.1-) dichloroethane at 20° C. for 1 hour, and then the state and adhesion of the coating film were comprehensively evaluated.
■、耐酸性の評価
耐溶剤性と同様に、露光・現像・後硬化を行い、試料を
1Qvo1%の硫酸水溶液中に、20℃で30分間浸漬
させたのち、塗膜の状態と密着性を総合的に判定した。■ Evaluation of Acid Resistance Similar to solvent resistance, exposure, development, and post-curing were performed, and the sample was immersed in a 1Qvo 1% sulfuric acid aqueous solution at 20°C for 30 minutes, and then the condition and adhesion of the coating film were evaluated. Judgment was made comprehensively.
(発明の効果)
上記の実施例から明らかなように、本発明の液状感光性
樹脂組成物は、印刷配線板に塗布後、加熱による乾燥に
より塗膜表面の粘着性をなくしパターンマスクを密着さ
せて露光することができ、高感度であり、アルカリ性水
溶液により現像が可能である。(Effects of the Invention) As is clear from the above examples, the liquid photosensitive resin composition of the present invention, after being applied to a printed wiring board, is dried by heating to eliminate the tackiness of the coating film surface and allow the pattern mask to adhere tightly. It has high sensitivity and can be developed with an alkaline aqueous solution.
さらに、現像後、熱硬化により電気特性、機械的特性お
よび耐薬品性に優れた組成物であり、印刷配線板の永久
保護マスクとして使用可能な液状感光性樹脂組成物であ
る。Further, the composition has excellent electrical properties, mechanical properties, and chemical resistance by thermosetting after development, and is a liquid photosensitive resin composition that can be used as a permanent protective mask for printed wiring boards.
特許出願人 富士写真フィルム株式会社手続補正書 (自発)Patent Applicant: Fuji Photo Film Co., Ltd. Procedural Amendment (spontaneous)
Claims (1)
子重合体、同一分子中にカルボキシ ル基とエチレン性不飽和二重結合を有する 化合物、および飽和あるいは不飽和多塩基 酸無水物を順次反応して得られる変性ポリ スチレン樹脂 一般式( I ) ▲数式、化学式、表等があります▼ (式中、Rは水素、またはメチル基、Ar はフェニレン、または置換フェニレンを意 味する。) (B)少なくとも1個のエチレン性不飽和二重結合を有
する重合性化合物 (C)少なくとも1個のエポキシ基を有するエポキシ化
合物 (D)光重合開始剤または光重合開始剤系 (E)エポキシ基を熱反応させる熱硬化性触媒(F)有
機溶剤 を含有する液状感光性樹脂組成物。[Scope of Claims] (A) A polymer having a repeating unit of the following general formula (I), a compound having a carboxyl group and an ethylenically unsaturated double bond in the same molecule, and a saturated or unsaturated polybase General formula (I) of a modified polystyrene resin obtained by sequentially reacting acid anhydrides ▲Mathematical formulas, chemical formulas, tables, etc.▼ (In the formula, R means hydrogen or a methyl group, and Ar means phenylene or substituted phenylene. (B) Polymerizable compound having at least one ethylenically unsaturated double bond (C) Epoxy compound having at least one epoxy group (D) Photoinitiator or photoinitiator system (E) A liquid photosensitive resin composition containing a thermosetting catalyst (F) an organic solvent that causes an epoxy group to undergo a thermal reaction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1011263A JP2554276B2 (en) | 1989-01-20 | 1989-01-20 | Liquid photosensitive resin composition |
| US07/715,709 US5124234A (en) | 1989-01-20 | 1991-06-17 | Liquid light-sensitive resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1011263A JP2554276B2 (en) | 1989-01-20 | 1989-01-20 | Liquid photosensitive resin composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02190860A true JPH02190860A (en) | 1990-07-26 |
| JP2554276B2 JP2554276B2 (en) | 1996-11-13 |
Family
ID=11773067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1011263A Expired - Fee Related JP2554276B2 (en) | 1989-01-20 | 1989-01-20 | Liquid photosensitive resin composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2554276B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0339746A (en) * | 1989-07-06 | 1991-02-20 | Unitika Ltd | Alkali developable photosensitive resin composition |
| KR100733847B1 (en) * | 2000-01-13 | 2007-06-29 | 후지필름 가부시키가이샤 | Negative-working resist composition for electron rays or x-rays |
| WO2008093513A1 (en) * | 2007-02-02 | 2008-08-07 | Soken Chemical & Engineering Co., Ltd. | Crosslinkable polymer compound and photosensitive resin composition containing the same |
-
1989
- 1989-01-20 JP JP1011263A patent/JP2554276B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0339746A (en) * | 1989-07-06 | 1991-02-20 | Unitika Ltd | Alkali developable photosensitive resin composition |
| KR100733847B1 (en) * | 2000-01-13 | 2007-06-29 | 후지필름 가부시키가이샤 | Negative-working resist composition for electron rays or x-rays |
| WO2008093513A1 (en) * | 2007-02-02 | 2008-08-07 | Soken Chemical & Engineering Co., Ltd. | Crosslinkable polymer compound and photosensitive resin composition containing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2554276B2 (en) | 1996-11-13 |
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