JPH02199638A - Glass substrate for master - Google Patents
Glass substrate for masterInfo
- Publication number
- JPH02199638A JPH02199638A JP1908589A JP1908589A JPH02199638A JP H02199638 A JPH02199638 A JP H02199638A JP 1908589 A JP1908589 A JP 1908589A JP 1908589 A JP1908589 A JP 1908589A JP H02199638 A JPH02199638 A JP H02199638A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- master
- glass substrate
- parts
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
本発明は光デイスク製造技術に関するものであり、特に
詳しくは表面に塗布するレジストが剥離し難いマスター
用ガラス基板に関する。The present invention relates to optical disk manufacturing technology, and more particularly to a master glass substrate from which a resist applied to the surface is difficult to peel off.
従来、この種の技術としてはシランカップリング剤等、
適宜のカップリング剤をガラス基板に塗布してレジスト
の密着性を改善する方法、レジストとの密着性の強いク
ロム下地を蒸着、スパッタリング等の手法によって形成
する方法、ガラス基板に同心円状、放射状等の微細な溝
を形成し、密着面積を拡大することにより剥離を防止す
る方法等が周知である。Conventionally, this type of technology uses silane coupling agents, etc.
A method of applying an appropriate coupling agent to a glass substrate to improve the adhesion of the resist, a method of forming a chromium base with strong adhesion to the resist by methods such as vapor deposition or sputtering, and a method of forming a concentric, radial, etc. on the glass substrate. A method of preventing peeling by forming fine grooves and expanding the adhesion area is well known.
しかし、上記向れの方法によってもレジストの剥離を完
全に防止することは困難であり、マスターからスタンパ
−を作る際に行うニッケルめっき工程において、塗布し
たレジストが剥離して折角形成したパターンが破壊され
ることがあった。
従って、マスターからスタンパ−を作成する工程におい
て、レジストが剥離することのないマスター用ガラス基
板の開発が望まれていた。However, even with the method described above, it is difficult to completely prevent the resist from peeling off. During the nickel plating process when making a stamper from a master, the applied resist peels off and the pattern that has been painstakingly formed is destroyed. Sometimes it happened. Therefore, it has been desired to develop a glass substrate for a master in which the resist does not peel off during the process of creating a stamper from a master.
本発明は上記した従来技術の課題を解決するためになさ
れたもので、パターン形成部を除（レジスト塗布部に、
微細な凹凸が形成されたことを特徴とするマスター用ガ
ラス基板である。The present invention has been made in order to solve the problems of the prior art described above, and the present invention has been made in order to solve the problems of the prior art described above.
This is a master glass substrate characterized by having fine irregularities formed thereon.
つぎに本発明を図示の一実施例に基づいて詳細に説明す
る。
図中１は一面にパターン形成部１１と非パターン形成部
１２とが設けられた、２４０■禦φ×５寵の円盤状のマ
スター用ガラス基板（以下ガラス基板と呼ぶ）である。
パターン形成部１１はこの場合半径２０目〜７０ｍ■の
間に設けられており、中心部と外周部の非パターン形成
部１２には何れも４０００番の研摩舐により５分間研摩
されて微細な凹凸が無数に形成されている。
上記構成のガラス基板１は通常の方法により、光デイス
ク製造用マスター、及びスタンパ−の製造に供される。
即ち、ガラス基板１は洗浄命乾燥の後、前記微細な凹凸
が形成された面に適宜のカップリング剤（例えばシラン
カップリング剤）１３が全面に塗布されて、次工程で塗
布するレジスト（例えば富士ハント社製１１ＰＲ−２０
４） １４の密着性が改善される。レジスト１４は適宜
の膜厚（例えばＬ２Ｏｎ＋＋）で塗布され、前記パター
ン形成部１１に適宜のパターン形成用露光手段（例えば
レーザー）２を用いて所望のパターンを形成する。続い
て適宜の手段（例えばアルカリ水溶液等）によってレジ
スト１４を現像し、露光部は全て除去して現像レジスト
１４ａとしては、未露光部のみを残して乾燥すると、所
望のパターンが形成されたマスター３が出来上がる。
マスター３の表面部にスパッタリング、Ｍ着等の手断に
よって適宜の導電性金属薄膜（例えば銀、ニッケル等）
１５を一様に形成させ、該薄膜１５の上に堅固な金属膜
（例えばニッケル膜）１６を適宜の厚さ（例えば０．２
．−程度）に形成させる。最後にガラス基板１から所望
パターンが形成された金属部を剥離させると、樹脂等に
所望のパターンを転写して光ディスクを製造することの
可能なスタンパ−４が完成する。
前記マスター３とスタンパ−４を作る全工程に渡り、ガ
ラス基板１とレジスト１４、又は現像レジスト１４ａと
の間で剥離は観察されなかった。
尚、非パターン形成部１２に形成する微細な無数の凹凸
は、パターン形成部１１を適宜の耐蝕性レジスト（例え
ば富士ハント社製１１ＰＲ−２０４）により被覆した後
、非パターン形成部１２を適宜のエツチング液（例えば
４９％ぶつ酸と４０％ふっ化アンモニュウムとの１＝１
０の混合液）に適宜の時間（例えば前記エツチング液の
場合であれば２分間程度）浸漬して形成することも出来
る。
又、本発明のマスター用ガラス基板は実施例にも示した
ように、従来のレジスト剥離防止手段との併用を妨げる
ものではなく、適宜併用して効果を倍加させることが出
来る。Next, the present invention will be explained in detail based on an illustrated embodiment. In the figure, reference numeral 1 denotes a master glass substrate (hereinafter referred to as a glass substrate) in the shape of a disk having a diameter of 240 mm and a diameter of 5 mm, on which a pattern forming part 11 and a non-pattern forming part 12 are provided. In this case, the pattern forming part 11 is provided between 20th and 70 m in radius, and the non-pattern forming part 12 at the center and the outer periphery is polished for 5 minutes using a No. 4000 polishing tool to form fine irregularities. are formed in countless numbers. The glass substrate 1 having the above structure is used for manufacturing a master for manufacturing an optical disk and a stamper by a conventional method. That is, after the glass substrate 1 is cleaned and dried, a suitable coupling agent (for example, a silane coupling agent) 13 is coated on the entire surface on which the fine irregularities are formed, and a resist (for example, for example) is applied in the next step. Fuji Hunt 11PR-20
4) The adhesion of 14 is improved. The resist 14 is applied to an appropriate thickness (for example, L2On++), and a desired pattern is formed on the pattern forming portion 11 using an appropriate pattern-forming exposure means (for example, a laser) 2. Subsequently, the resist 14 is developed by an appropriate means (for example, an alkaline aqueous solution, etc.), all exposed areas are removed, and only the unexposed areas are left as a developed resist 14a. When dried, a master 3 with a desired pattern formed thereon is obtained. is completed. A suitable conductive metal thin film (for example, silver, nickel, etc.) is applied to the surface of the master 3 by sputtering, M-plating, etc.
15 is uniformly formed, and a strong metal film (for example, a nickel film) 16 is formed on the thin film 15 to an appropriate thickness (for example, 0.2
．． - degree). Finally, when the metal portion on which the desired pattern has been formed is peeled off from the glass substrate 1, a stamper 4 is completed which is capable of manufacturing an optical disk by transferring the desired pattern onto a resin or the like. No peeling was observed between the glass substrate 1 and the resist 14 or the developed resist 14a during the entire process of making the master 3 and stamper 4. Incidentally, the countless fine irregularities formed in the non-pattern-formed area 12 can be obtained by coating the pattern-forming area 11 with an appropriate corrosion-resistant resist (for example, 11PR-204 manufactured by Fuji Hunt Co., Ltd.), and then coating the non-pattern-forming area 12 with an appropriate coating. Etching solution (for example, 1=1 of 49% acetic acid and 40% ammonium fluoride)
It can also be formed by immersing it in a mixed solution of 0.0 and 0.0 for an appropriate period of time (for example, about 2 minutes in the case of the above-mentioned etching solution). Further, as shown in the examples, the master glass substrate of the present invention does not preclude its use in combination with conventional resist peeling prevention means, and can be used in combination as appropriate to double the effect.
以上説明したように、本発明になるマスター用ガラス基
板は表面に塗布するレジストとの密着性が良好であるた
め、マスター及びスタンパ−を作成する工程でガラス基
板とレジストとの剥離が極めて起こり難い。従うて、製
品の大幅な歩留まり向上が可能となった。As explained above, the master glass substrate of the present invention has good adhesion with the resist applied to the surface, so it is extremely difficult for the glass substrate and the resist to separate during the process of creating the master and stamper. . Therefore, it has become possible to significantly improve the yield of products.
第１図は本発明のマスター用ガラス基板を断面で示す説
明図、第２図はマスターの断面説明図、第３図はスタン
パ−の作成を断面で示す説明図である。
１・・・ガラス基板、
１１・・・パターン形成部、
１２・・・非パターン形成部、
１３・・・カップリング剤、
１４・・・レジスト、
１４ａ・・・現像レジスト、
１５・・・導電性金属薄膜、
１６・・・金属膜、
２・・・露光手段、
３・・・マスター
４・・・スタンパ−FIG. 1 is an explanatory cross-sectional view showing a master glass substrate of the present invention, FIG. 2 is a cross-sectional view of the master, and FIG. 3 is a cross-sectional view showing the creation of a stamper. DESCRIPTION OF SYMBOLS 1... Glass substrate, 11... Pattern formation part, 12... Non-pattern formation part, 13... Coupling agent, 14... Resist, 14a... Development resist, 15... Conductive 16... Metal film, 2... Exposure means, 3... Master 4... Stamper
Claims (1)
形成されたことを特徴とするマスター用ガラス基板。A master glass substrate characterized in that fine irregularities are formed in a resist coated area excluding a pattern forming area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908589A JPH02199638A (en) | 1989-01-27 | 1989-01-27 | Glass substrate for master |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1908589A JPH02199638A (en) | 1989-01-27 | 1989-01-27 | Glass substrate for master |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02199638A true JPH02199638A (en) | 1990-08-08 |
Family
ID=11989614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1908589A Pending JPH02199638A (en) | 1989-01-27 | 1989-01-27 | Glass substrate for master |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02199638A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111511543A (en) * | 2018-02-20 | 2020-08-07 | 三井金属矿业株式会社 | Copper foil with glass carrier and method for producing the same |
-
1989
- 1989-01-27 JP JP1908589A patent/JPH02199638A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111511543A (en) * | 2018-02-20 | 2020-08-07 | 三井金属矿业株式会社 | Copper foil with glass carrier and method for producing the same |
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