JPH0220328U - - Google Patents
Info
- Publication number
- JPH0220328U JPH0220328U JP9815188U JP9815188U JPH0220328U JP H0220328 U JPH0220328 U JP H0220328U JP 9815188 U JP9815188 U JP 9815188U JP 9815188 U JP9815188 U JP 9815188U JP H0220328 U JPH0220328 U JP H0220328U
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- semiconductor wafers
- heat
- evacuation chamber
- preliminary evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815188U JPH0220328U ( ) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815188U JPH0220328U ( ) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220328U true JPH0220328U ( ) | 1990-02-09 |
Family
ID=31324158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815188U Pending JPH0220328U ( ) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220328U ( ) |
-
1988
- 1988-07-25 JP JP9815188U patent/JPH0220328U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH05335264A (ja) | 封止装置 | |
| JPH0220328U ( ) | ||
| JPS63127125U ( ) | ||
| JPS6280199U ( ) | ||
| JPH063350Y2 (ja) | 真空熱処理炉 | |
| JPH08288262A (ja) | 半導体基板処理装置 | |
| JPS61183962U ( ) | ||
| JPH0257895A (ja) | 真空熱処理方法と装置 | |
| JPS62194760U ( ) | ||
| JPH0331U ( ) | ||
| JPS62160536U ( ) | ||
| JPS6336032U ( ) | ||
| JPS62100493U ( ) | ||
| JPH01123336U ( ) | ||
| JPS6242237U ( ) | ||
| JPS6449675U ( ) | ||
| JPS61285713A (ja) | 熱処理装置 | |
| JPH02131245U ( ) | ||
| JPS6382929U ( ) | ||
| JPH02106823U ( ) | ||
| JPH0244324U ( ) | ||
| JPH0193723U ( ) | ||
| JPH0170327U ( ) | ||
| JPH03111571U ( ) | ||
| JPS61168630U ( ) |