JPH0221585A - Electrode cut prevention device of electrostatic adsorption plate having flexible insert terminal - Google Patents

Abstract

PURPOSE:To prevent trouble of electrode cut caused when a source in the peeling direction from an adhesive layer is applied to an inert terminal by installing an insulating cut prevention layer where an adhesive strength with an adsorption layer and a pair of positive and negative electrodes is greater than an adhesive strength with an adhesive layer between the adsorption layer and the positive-negative electrodes and the adhesive layer. CONSTITUTION:In an electrostatice adsorption plate 2 having a flexible insert terminal 20, an insulating cut prevention layer 28 where an adhesive strength of an adsorption layer 14 with a pair of positive and negative electrodes 8 and 10 is greater than an adhesive strength with an adhesive layer 6 is installed between the adsorption layer and the pair of positive and negative electrodes 8 and 10 in a region where an insert terminal 20 including an adsorption layer projecting layer 16 and an electrode projecting end 18 is installed and the adhesive layer 6. The insulating cut prevention layer 28 is formed of such materials as urethane, acryl, phenol, etc., having insulating properties of approx. 10<12>-10<17>OMEGAcm in terms of volume resistivity value. Accordingly, when a force in a peeling-off direction from the adhesive layer 6 is applied to the insert terminal 20, the pair of positive and negative electrodes 8 and 10 are not left in the adhesive layer 6, but they are peeled off from the adhesive layer 6 together with the adsorption layer 14. Thus, trouble of cutting of the electrodes 8 and 10 can be prevented.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device for preventing electrode breakage of an electrostatic adsorption plate used for flexible plug-in terminals, and in particular, it is capable of preventing accidents in which electrodes are cut and preventing conduction failures. The present invention relates to a device for preventing electrode breakage of an electrostatic chuck plate having a flexible plug-in terminal that can be avoided.

[Conventional technology]

In the conventional electrostatic adsorption plate, as shown in Figs. 3 and 4, the positive and negative pairs of electrodes 8 and 10 and the adsorption layer 14 are adhered to an insulating (10'3 to 1017 Ωcm) adhesive layer on the substrate 4. The electrostatic capacitor has a flexible plug-in terminal 20 in which the electrode protruding ends 18 protruding from the ends of the positive and negative electrodes 8 and 10 are attached to the adsorption layer protruding ends 16 protruding from the ends of the adsorption layer 14. There is an electrostatic adsorption plate 2. This electrostatic attraction plate 2 can be oriented in any direction as shown in FIG. 5 due to the flexibility of the insertion terminal 20, and the connector 2 connected to a power source 26 by an electric wire 24 can be oriented in any direction as shown in FIG.
It has features such as reliable power supply because it can use 0.

[Problem that the invention seeks to solve]

By the way, the conventional electrostatic adsorption plate 2 uses, for example, acrylic acid alkyl ester as the adhesive N6 in order to prevent the inconvenience that the positive and negative electrodes 8, 10, etc. are peeled off from the base 4 and exposed, resulting in a loss of safety. A polymer having a normal adhesive strength of 1000 g/cm or more is used.

However, since the plug-in terminal 20 is flexible, the adhesive layer 6 is formed on the plug-in terminal 20 as shown in FIG.
When a force is applied in the direction of peeling off from the adhesive layer 6, the electrode protruding end 18 attached to the adsorption layer protruding end 16 of the plug-in terminal 20 is moved in the direction of peeling off from the adhesive layer 6. Positive and negative electrodes 8 and 10 bonded between the adsorption layer 14 and the adsorption layer 14
As mentioned above, since the adhesive force of the adhesive layer 6 is large,
Even though the adsorption layer 14 is peeled off, it remains on the adhesive layer 6.

For this reason, as shown in FIG. This caused the inconvenience of disconnection, resulting in poor power supply.

[Object of the Invention] Therefore, the object of the present invention is to provide a flexible plug-in terminal that can prevent the electrode from being cut off when a force is applied to the plug-in terminal in a direction that causes it to peel off from the adhesive layer, thereby avoiding conduction defects. An object of the present invention is to realize a device for preventing electrode breakage of an electrostatic chuck plate.

[Means for solving problems]

In order to achieve this object, the present invention provides a positive and negative electrode and an adsorption layer bonded to an insulating adhesive layer, and a protruding end of the adsorption layer protruding from the end of the adsorption layer. In an electrostatic adsorption plate having a flexible plug-in terminal provided with a protruding electrode protruding end attached thereto, the adsorption layer and the positive and negative electrodes at a portion where the plug-in terminal is provided, including the adsorption layer protrusion end and the electrode protrusion end, and the positive and negative electrodes. The present invention is characterized in that an insulating cut prevention layer is interposed between the adhesive layer and the adhesive layer has a greater adhesive force with the adsorption layer and the positive and negative electrodes than with the adhesive layer.

[Effect]

According to the configuration of the present invention, the insulating cut prevention layer, which has a greater adhesion force with the adsorption layer and the positive and negative electrodes than the adhesion force with the adhesive layer, is provided at the insertion terminal including the adsorption layer protruding end and the electrode protrusion end. By interposing the adhesive layer between the adhesive layer and the positive and negative electrodes in the area where the adhesive layer is provided, when a force is applied to the plug-in terminal in a direction that causes it to peel off from the adhesive layer, the adhesive layer and the adhesive layer The positive and negative electrodes bonded between the two are peeled off from the adhesive layer together with the adsorption layer without being left on the adhesive layer.

〔Example〕

Next, embodiments of the present invention will be described in detail based on the drawings.

1 to 3 show embodiments of this invention. In the figure, 2 is an electrostatic adsorption plate, which includes a base 4, an insulating adhesive layer 6, and a set of electrodes 8 and 10 arranged in a comb-like shape that are given positive and negative charges when energized. This set of electrodes 8
- An adsorption layer 14 which is dielectrically dielectrically held by 10 and which attracts and holds the object 12 by electrostatic attraction force is sequentially laminated. Thereby, the electrostatic adsorption plate 2 is provided by bonding the positive and negative pairs of electrodes 8 and 10 and the adsorption layer 14 to the insulating adhesive layer 6 on the base 4.

This electrostatic adsorption plate 2 supplies DC power to the negative set of electrodes 8 and 10 to apply positive and negative charges to them, respectively. This set of electrodes 8
・Since the adsorption layer 14 is dielectric by 10, the object to be adsorbed 1
When the two electrodes 8 and 10 are brought into contact with each other, the object to be attracted 12 is attached to each of the electrodes 8 and 10.
Charges having polarities different from those of the electrodes 8 and 10 are generated by electrostatic induction at the portions facing the electrodes 8 and 10, respectively. As a result, an electrostatic attraction force acts between the charges generated on the attracting object 12 and the charges on each of the electrodes 8 and 10, and the attracting object 12 is attracted and held on the surface of the adsorption layer 14.

The material for the adsorption layer 14 is polynistole resin, vinyl chloride resin, or synthetic resin such as acrylic resin with conductive additives added to form a sheet, thereby achieving the desired dielectric constant and resistance value. Demonstrate.

Further, the electrostatic adsorption plate 2 is provided with an adsorption layer projecting end 16 projecting from the end of the adsorption layer 14, and an electrode projecting end 18 projecting from the ends of the positive and negative electrodes 8 and 10. An electrode protruding end 18 is attached to the adsorption layer protruding end 16 to form a flexible insertion end 7'20. At this time, the electrode protruding end 18 is configured to be exposed on the back surface of the adsorption layer protruding end 16 to enable electrical coupling. In order to receive the plug-in terminal 20 and achieve electrical connection, a connector 22 is provided connected to a power source 26 via an electric wire 24, as shown in FIG.

In the electrostatic adsorption plate 2 having such a flexible plug-in terminal 20, as shown in FIGS. This adhesive layer 6 is provided between the adsorption layer 14 and the positive and negative pairs of electrodes 8 and 10 and the adhesive layer 6.
The adsorption layer 14 and the positive and negative pairs of electrodes 8 and 1
An insulating cut-preventing layer 28 that has a high adhesion to zero is interposed. This cutting prevention layer 28 has a volume resistivity value of 1013
It is formed from a urethane-based, acrylic-based, phenol-based, or other material having an insulating property of about 101'7 Ωcn+.

As described above, in the electrostatic adsorption plate 2 having the flexible plug-in terminal 20, when a force is applied to the plug-in terminal 20 in the direction of peeling it off from the adhesive layer 6, the protruding end of the adsorption layer of the plug-in terminal 20 is conventionally Electrode protruding end 1 attached to 18
8 is moved in the direction of peeling off from the adhesive layer 6, while the positive and negative pairs of electrodes 8 and 10 bonded between the adhesive layer 6 and the adsorption layer 12 are moved due to the strong adhesive force of the adhesive layer 6. For some reason,
As a result of the adsorption layer 14 remaining on the adhesive layer 6 even though it is peeled off, the protruding ends 18 of the electrodes are connected to the positive and negative pairs of electrodes 8.
There was an inconvenience that an accident occurred where the wire was disconnected from O, resulting in poor energization.

In the electrostatic adsorption plate 2 having the flexible insertion terminal 20 of the present invention, as described above, the adhesion force with the adsorption layer 14 and the positive and negative pairs of electrodes 8 and 10 is greater than the adhesion force with the adhesive layer 6. An insulating cut-prevention layer 28 is applied to the adsorption layer 14 of the area where the plug-in terminal 20 is provided, including the adsorption layer protruding end 16 and the electrode protruding end 18 of the plug-in terminal 20, the positive and negative pairs of electrodes 8 and 10, and the adhesive layer. 6, the positive and negative pairs of electrodes 8 and 10 bonded between the adhesive layer 6 and the adsorption layer 14 are not left on the adhesive layer 6 and are adsorbed. It is peeled off from the adhesive layer 6 together with the layer 14.

Therefore, the electrode protruding end 18 of the plug-in terminal 20 is connected to the positive and negative pairs of electrodes 8 bonded between the adhesive layer 6 and the adsorption layer 14.
- It is possible to prevent the accident of being disconnected from the IO, and it is possible to avoid poor conduction of electricity, and it is possible to have a great effect on practical engineering.

〔Effect of the invention〕

As described above, according to the present invention, the insulating cut-preventing layer, which has a greater adhesion force with the adsorption layer and the positive and negative electrodes than the adhesion force with the adhesive layer, is attached to the insertion layer including the protruding end of the adsorption layer and the protruding end of the electrode. By interposing the adsorption layer in the area where the terminal is provided and between the positive and negative electrodes and the adhesive layer, when a force is applied to the plug-in terminal in the direction of peeling off from the adhesive layer, the adhesive layer and adsorption The positive and negative electrodes bonded between the layers are not retained in the adhesive layer, but are peeled off from the adhesive layer together with the adsorption layer.

Therefore, it is possible to prevent an accident in which the protruding end of the electrode attached to the protruding end of the adsorption layer of the plug-in terminal is disconnected from the positive and negative electrodes adhered between the adhesive layer and the adsorption layer, thereby avoiding failure in conduction. be able to.

[Brief explanation of the drawing]

Figures 1 to 3 show examples of the present invention, Figure 1 is an enlarged plan view of the plug-in terminal, Figure 2 is a sectional view taken along the line ■■ in Figure 1, and Figure 3 is a plan view of the electrostatic adsorption plate. It is. 4 to 6 are enlarged sectional views of conventional plug-in terminals, respectively. In the figure, 2 is an electrostatic adsorption plate, 4 is a base, 6 is an insulating adhesive layer, 8 and 10 are electrodes, 12 is an object to be adsorbed, 14 is an adsorption layer, 16 is a protruding end of the adsorption layer, and 18 is an electrode. 20 is a plug-in terminal, 22 is a connector, 24 is an electric wire, 26 is a power source, and 28 is an adhesive layer for preventing cutting. Patent Applicant: Abisare Co., Ltd. Patent Attorney: Yoshi Saigo (Blind Action with Amended Procedures) 1. Indication of the case Japanese Patent Application No. 170275/1983 2 Title of the invention Electrode breakage prevention device for electrostatic adsorption plate with flexible plug-in terminal 3 Person making the amendment Relationship to the case Patent applicant Address Ryoke, Kakeyo City, Shizuoka Prefecture Address 864 1 name Abisare Co., Ltd. Representative Keiji Kasahara

Claims (1)

[Claims] 1. Positive and negative electrodes and an adsorption layer are bonded and provided on an insulating adhesive layer, and the protruding ends of the electrodes protruding from the ends of the positive and negative electrodes are attached to the protruding ends of the adsorption layer protruding from the ends of the adsorption layer. In an electrostatic adsorption plate having a flexible plug-in terminal, the adhesive is applied between the adsorption layer, the positive and negative electrodes, and the adhesive layer at a portion where the plug-in terminal is provided, including the protruding end of the adsorption layer and the protruding end of the electrode. An electrode cut prevention device for an electrostatic chuck plate having a flexible plug-in terminal, characterized in that an insulating cut prevention layer is interposed which has a greater adhesion force with the adsorption layer and the positive and negative electrodes than with the adhesion layer.