JPH0447434B2 - - Google Patents
Info
- Publication number
- JPH0447434B2 JPH0447434B2 JP63170275A JP17027588A JPH0447434B2 JP H0447434 B2 JPH0447434 B2 JP H0447434B2 JP 63170275 A JP63170275 A JP 63170275A JP 17027588 A JP17027588 A JP 17027588A JP H0447434 B2 JPH0447434 B2 JP H0447434B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- adsorption
- adhesive layer
- positive
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 claims description 71
- 239000010410 layer Substances 0.000 claims description 60
- 239000012790 adhesive layer Substances 0.000 claims description 49
- 230000002265 prevention Effects 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 238000003780 insertion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 239000002482 conductive additive Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Coupling Device And Connection With Printed Circuit (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はフレキシブル差込み端子を有する静
電吸着板の電極切断防止装置に係り、特に電極が
切断される事故を防止し得て通電不良を回避し得
るフレキシブル差込み端子を有する静電吸着板の
電極切断防止装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electrode breakage prevention device for an electrostatic chuck plate having a flexible plug-in terminal, and in particular, it is capable of preventing an accident in which an electrode is cut, thereby avoiding conduction failure. The present invention relates to a device for preventing electrode breakage of an electrostatic chuck plate having a flexible plug-in terminal.
従来の静電吸着板において、第３，４図に示す
如く、基盤４上の絶縁性（1013〜1017Ωcm）の接
着剤層に正負一組の電極８，１０及び吸着層１４
を接着して設けるとともに、前記吸着層１４端部
から突出させた吸着層突出端１６に前記正負電極
８，１０端部から突出させた電極突出端１８を取
着させて設けたフレキシブル差込み端子２０を有
する静電吸着板２がある。この静電吸着板２は、
差込み端子２０がフレキシブルであることによ
り、第５図に示す如く、どのような方向にも指向
させ得て、電線２４により電源２６に接続された
コネクタ２０を使用し得ることにより電源供給確
実である等の特徴を有している。
In the conventional electrostatic adsorption plate, as shown in FIGS. 3 and 4, a set of positive and negative electrodes 8, 10 and an adsorption layer 14 are attached to an insulating (10 13 to 10 17 Ωcm) adhesive layer on a base 4.
A flexible plug-in terminal 20 is provided by adhering and providing electrode protruding ends 18 protruding from the ends of the positive and negative electrodes 8 and 10 to the adsorption layer protruding ends 16 protruding from the ends of the adsorption layer 14. There is an electrostatic adsorption plate 2 having the following. This electrostatic adsorption plate 2 is
Due to the flexibility of the plug-in terminal 20, it can be oriented in any direction, as shown in FIG. 5, and the power supply is ensured by the use of the connector 20 connected to a power source 26 by a wire 24. It has the following characteristics.
ところで、従来の静電吸着板２は、正負電極
８，１０等が基盤４から剥がれて露出することに
より安全性が損なわれる不都合を防止するため
に、接着剤層６として、例えばアクリル酸アルキ
ルエステル共重合体等の常態粘着力が1000ｇ／cm
以上のものを使用している。
By the way, in the conventional electrostatic adsorption plate 2, in order to prevent the inconvenience that the positive and negative electrodes 8, 10, etc. are peeled off from the base 4 and exposed, resulting in a loss of safety, the adhesive layer 6 is made of, for example, an acrylic acid alkyl ester. Normal adhesive strength of copolymer etc. is 1000g/cm
I am using more than one.
ところが、差込み端子２０がフレキシブルであ
ることにより、第５図に示す如く、差込み端子２
０に接着剤層６から剥脱する方向の力が加えられ
た場合に、差込み端子２０の吸着層突出端１６に
取着された電極突出端１８は接着剤層６から剥脱
する方向に移動される一方、接着剤層６と吸着層
１４との間に接着された正負電極８，１０は前記
の如く接着剤層６の接着力が大であることから、
吸着層１４が剥脱されるにもかかわらず接着剤層
６に残置されることになる。 However, since the plug terminal 20 is flexible, as shown in FIG.
When a force is applied to the terminal 0 in the direction of peeling off from the adhesive layer 6, the electrode protruding end 18 attached to the adsorption layer protruding end 16 of the plug-in terminal 20 is moved in the direction of peeling off from the adhesive layer 6. On the other hand, since the positive and negative electrodes 8 and 10 bonded between the adhesive layer 6 and the adsorption layer 14 have a large adhesive force as described above,
Even though the adsorption layer 14 is peeled off, it remains on the adhesive layer 6.
このため、第６図に示す如く、差込み端子２０
の吸着層突出端１６に取着された電極突出端１８
が接着剤層６と吸着層１４との間に接着された正
負電極８，１０から切断される事故を生じ、通電
不良となる不都合があつた。 Therefore, as shown in FIG.
The electrode protruding end 18 attached to the adsorption layer protruding end 16 of
This caused an accident in which the positive and negative electrodes 8 and 10 bonded between the adhesive layer 6 and the adsorption layer 14 were disconnected, resulting in a problem of poor electrical conduction.
そこでこの発明の目的は、差込み端子に接着剤
層から剥脱する方向の力を加えられた場合に電極
が切断される事故を防止し得て通電不良を回避し
得るフレキシブル差込み端子を有する静電吸着板
の電極切断防止装置を実現することにある。
Therefore, an object of the present invention is to provide an electrostatic adsorption device having a flexible plug-in terminal that can prevent the electrode from being cut off when a force is applied to the plug-in terminal in a direction that causes it to peel off from the adhesive layer, and can avoid conduction defects. The object of the present invention is to realize a device for preventing plate electrode cutting.
この目的を達成するために、この発明は、絶縁
性の接着剤層に正負電極及び吸着層を接着して設
けるとともに前記吸着層端部から突出させた吸着
層突出端に前記正負電極端部から突出させた電極
突出端を取着させて設けたフレキシブル差込み端
子を有する静電吸着板において、前記吸着層突出
端及び電極突出端を含み前記差込み端子の設けら
れる部位の吸着層及び正負電極と前記接着剤層と
の間にこの接着剤層との密着力よりも前記吸着層
及び正負電極との密着力が大なる絶縁性の切断防
止層を介設したことを特徴とする。
In order to achieve this object, the present invention provides a positive and negative electrode and an adsorption layer bonded to an insulating adhesive layer, and a protruding end of the adsorption layer protruding from the end of the adsorption layer. In an electrostatic adsorption plate having a flexible plug-in terminal provided with a protruding electrode protruding end attached thereto, the adsorption layer and the positive and negative electrodes at a portion where the plug-in terminal is provided, including the adsorption layer protrusion end and the electrode protrusion end, and the positive and negative electrodes. The present invention is characterized in that an insulating cut prevention layer is interposed between the adhesive layer and the adhesive layer has a greater adhesive force with the adsorption layer and the positive and negative electrodes than with the adhesive layer.
この発明の構成によれば、接着剤層との密着力
よりも吸着層及び正負電極との密着力が大なる絶
縁性の切断防止層を、吸着層突出端及び電極突出
端を含み前記差込み端子の設けられる部位の吸着
層及び正負電極と前記接着剤層との間に介設した
ことにより、差込み端子に接着剤層から剥脱する
方向の力が加えられた場合に、接着剤層と吸着層
との間に接着された正負電極は接着剤層に残置さ
れることなく吸着層とともに接着剤層から剥脱さ
れる。
According to the configuration of the present invention, the insulating cut prevention layer, which has a greater adhesion force with the adsorption layer and the positive and negative electrodes than the adhesion force with the adhesive layer, is provided at the insertion terminal including the adsorption layer protruding end and the electrode protrusion end. By interposing the adhesive layer between the adhesive layer and the positive and negative electrodes in the area where the adhesive layer is provided, when a force is applied to the plug-in terminal in a direction that causes it to peel off from the adhesive layer, the adhesive layer and the adhesive layer The positive and negative electrodes bonded between the two are peeled off from the adhesive layer together with the adsorption layer without being left on the adhesive layer.
次にこの発明の実施例を図に基づいて詳細に説
明する。
Next, embodiments of the present invention will be described in detail based on the drawings.
第１〜３図は、この発明の実施例を示すもので
ある。図において、２は静電吸着板であり、基盤
４と、絶縁性の接着剤層６と、通電により正負の
電荷を付与される櫛歯状に配設した一組の電極
８，１０と、この一組の電極８，１０により誘電
され静電吸引力により被吸着物１２を吸着保持す
る吸着層１４とを、順次に積層して設けている。
これにより、静電吸着板２は、基盤４上の絶縁性
の接着剤層６に正負一組の電極８，１０及び吸着
層１４を接着して設けている。 1 to 3 show embodiments of this invention. In the figure, 2 is an electrostatic adsorption plate, which includes a base 4, an insulating adhesive layer 6, and a set of comb-shaped electrodes 8, 10 that are given positive and negative charges when energized. An adsorption layer 14 which is dielectrically induced by the pair of electrodes 8 and 10 and which attracts and holds the object 12 by electrostatic attraction is sequentially laminated.
As a result, the electrostatic adsorption plate 2 is provided with a pair of positive and negative electrodes 8 and 10 and an adsorption layer 14 bonded to an insulating adhesive layer 6 on the base plate 4 .
この静電吸着板２は、一組の電極８，１０に直
流電源を供給して夫々正負の電荷を付与する。こ
の一組の電極８，１０により吸着層１４は誘電さ
れるので、被吸着物１２を接触させると、被吸着
物１２は前記各電極８，１０と対向する部位に
夫々静電誘導により各電極８，１０の電荷と異な
る極性の電荷が生じる。これにより、被吸着物１
２に生じた電荷と各電極８，１０の電荷との間に
静電的吸引力が作用し、被吸着物１２を吸着層１
４の表面に吸着保持する。 This electrostatic adsorption plate 2 supplies a DC power source to a pair of electrodes 8 and 10 to apply positive and negative charges to each electrode. Since the adsorption layer 14 is dielectrically generated by this pair of electrodes 8 and 10, when the adsorption object 12 is brought into contact with the adsorption object 12, the adsorption object 12 is applied to each electrode by electrostatic induction at a portion facing each of the electrodes 8 and 10. A charge of a polarity different from the charges of 8 and 10 is generated. As a result, the adsorbed object 1
An electrostatic attractive force acts between the charges generated on the electrode 2 and the charges on each electrode 8, 10, and the object 12 is attracted to the adsorption layer 1.
Hold by adsorption on the surface of 4.
なお、吸着層１４の材料としては、ポリエスト
ル樹脂や塩化ビニル樹脂を、そしてまた、アクリ
ル樹脂等の合成樹脂に導電性添加物を加えてシー
ト状にし、これにより所期の誘電率と抵抗値を発
揮せしめる。 The adsorption layer 14 is made of polyester resin, vinyl chloride resin, or synthetic resin such as acrylic resin with conductive additives added to form a sheet, thereby achieving the desired dielectric constant and resistance value. Demonstrate.
また、前記静電吸着板２は、吸着層１４端部か
ら吸着層突出端１６を突出させて設け、正負電極
８，１０端部から電極突出端１８を突出させて設
ける。この吸着層突出端１６に電極突出端１８を
取着させてフレキシブルの差込み端子２０を形成
して設ける。このとき、電極突出端１８は、吸着
層突出端１６の裏面に露出させて電気的な結合が
可能なように構成する。この差込み端子２０を受
納し、電気的結合を果すべく、第５図の如くコネ
クタ２２を電線２４により電源２６に接続して設
けている。 Further, the electrostatic adsorption plate 2 is provided with an adsorption layer projecting end 16 projecting from the end of the adsorption layer 14, and an electrode projecting end 18 projecting from the ends of the positive and negative electrodes 8 and 10. An electrode protruding end 18 is attached to the adsorption layer protruding end 16 to form a flexible insertion terminal 20. At this time, the electrode protruding end 18 is configured to be exposed on the back surface of the adsorption layer protruding end 16 to enable electrical coupling. In order to receive the plug-in terminal 20 and achieve electrical connection, a connector 22 is provided connected to a power source 26 via an electric wire 24, as shown in FIG.
このようなフレキシブルの差込み端子２０を有
する静電吸着板２において、第１，２図に示す如
く、差込み端子２０の吸着層突出端１６及び電極
突出端１８を含み差込み端子２０の設けられる部
位の吸着層１４及び正負一組の電極８，１０と接
着剤層６との間に、この接着剤層６との密着力よ
りも吸着層１４及び正負一組の電極８，１０との
密着力が大なる絶縁性の切断防止層２８を介設す
る。この切断防止層２８は、体積固有抵抗値が
1013〜1017Ωcm程度の絶縁性を有するウレタン系、
アクリル系、フエノール系等の材料から形成され
る。 In the electrostatic adsorption plate 2 having such a flexible plug-in terminal 20, as shown in FIGS. Between the adsorption layer 14 and the set of positive and negative electrodes 8, 10, and the adhesive layer 6, the adhesion force with the adsorption layer 14 and the set of positive and negative electrodes 8, 10 is greater than the adhesion force with the adhesive layer 6. A large insulating cut prevention layer 28 is provided. This cut prevention layer 28 has a volume resistivity value of
Urethane type with insulation properties of about 10 13 to 10 17 Ωcm,
It is formed from materials such as acrylic and phenol.
このように、フレキシブルの差込み端子２０を
有する静電吸着板２において、差込み端子２０に
接着剤層６から剥脱する方向の力が加えられた場
合に、従来は、差込み端子２０の吸着層突出端１
８に取着された電極突出端１８は接着剤層６から
剥脱する方向に移動される一方、接着剤層６と吸
着層１２との間に接着された正負一組の電極８，
１０は接着剤層６の接着力が大であることから、
吸着層１４が剥脱されるにもかかわらず接着剤層
６に残置される結果、電極突出端１８が正負一組
の電極８，１０から切断される事故を生じ、通電
不良となる不都合があつた。 As described above, in the electrostatic adsorption plate 2 having the flexible plug-in terminal 20, when a force is applied to the plug-in terminal 20 in the direction of peeling it off from the adhesive layer 6, the protruding end of the adsorption layer of the plug-in terminal 20 is conventionally 1
The protruding end 18 of the electrode attached to the adhesive layer 6 is moved in the direction of peeling off from the adhesive layer 6, while the pair of positive and negative electrodes 8, attached between the adhesive layer 6 and the adsorption layer 12
No. 10 has a high adhesive strength of the adhesive layer 6, so
As a result of the adsorption layer 14 remaining on the adhesive layer 6 even though it was peeled off, an accident occurred in which the protruding end of the electrode 18 was disconnected from the pair of positive and negative electrodes 8 and 10, resulting in an inconvenient conduction failure. .
この発明のフレキシブルの差込み端子２０を有
する静電吸着板２においては、前述のごとく、接
着剤層６との密着力よりも吸着層１４及び正負一
組の電極８，１０との密着力が大なる絶縁性の切
断防止層２８を、差込み端子２０の吸着層突出端
１６及び電極突出端１８を含み差込み端子２０の
設けられる部位の吸着層１４及び正負一組の電極
８，１０と接着剤層６との間に介設して設けたこ
とにより、接着剤層６と吸着層１４との間に接着
された正負一組の電極８，１０は接着剤層６に残
置されることなく、吸着層１４とともに接着剤層
６から剥脱される。 In the electrostatic adsorption plate 2 having the flexible plug-in terminal 20 of the present invention, as described above, the adhesion force with the adsorption layer 14 and the pair of positive and negative electrodes 8 and 10 is greater than the adhesion force with the adhesive layer 6. An insulating cut-prevention layer 28 is applied to the adsorption layer 14 of the area where the plug-in terminal 20 is provided, including the adsorption layer protruding end 16 and the electrode protruding end 18 of the plug-in terminal 20, a pair of positive and negative electrodes 8, 10, and an adhesive layer. 6, the pair of positive and negative electrodes 8, 10 bonded between the adhesive layer 6 and the adsorption layer 14 are not left on the adhesive layer 6 and are adsorbed. It is peeled off from the adhesive layer 6 together with the layer 14.
このため、差込み端子２０の電極突出端１８
が、接着剤層６と吸着層１４との間に接着された
正負一組の電極８，１０から切断される事故を防
止することができ、通電不良を回避することがで
きるものであり、実用上大なる効果を奏し得るも
のである。 Therefore, the electrode protruding end 18 of the plug-in terminal 20
However, it is possible to prevent the accident of being disconnected from the pair of positive and negative electrodes 8 and 10 bonded between the adhesive layer 6 and the adsorption layer 14, and to avoid failure of current conduction. This can have a great effect.
このようにこの発明によれば、接着剤層との密
着力よりも吸着剤及び正負電極との密着力が大な
る絶縁性の切断防止層を、吸着層突出端及び電極
突出端を含み前記差込み端子の設けられる部位の
吸着層及び正負電極と前記接着剤層との間に介設
したことにより、差込み端子に接着剤層から剥脱
する方向の力が加えられた場合に、接着剤層と吸
着層との間に接着された正負電極は接着剤層に留
置されることなく、吸着層とともに接着剤層から
剥脱される。
As described above, according to the present invention, the insulating cut-preventing layer, which has a greater adhesion force with the adsorbent and the positive and negative electrodes than the adhesion force with the adhesive layer, is attached to the insertion layer including the protruding end of the adsorption layer and the protruding end of the electrode. By interposing the adsorption layer in the area where the terminal is provided and between the positive and negative electrodes and the adhesive layer, when a force is applied to the plug-in terminal in the direction of peeling off from the adhesive layer, the adhesive layer and adsorption The positive and negative electrodes bonded between the layers are not retained in the adhesive layer, but are peeled off from the adhesive layer together with the adsorption layer.
このため、差込み端子の吸着層突出端に取着さ
れた電極突出端が接着剤層と吸着層との間に接着
された正負電極から切断される事故を防止し得
て、通電不良を回避することができる。 Therefore, it is possible to prevent an accident in which the protruding end of the electrode attached to the protruding end of the adsorption layer of the plug-in terminal is disconnected from the positive and negative electrodes adhered between the adhesive layer and the adsorption layer, thereby avoiding failure in conduction. be able to.
第１〜３図はこの発明の実施例を示し、第１図
は差込み端子の拡大平面図、第２図は第１図の
−線断面図、第３図は静電吸着板の平面図であ
る。第４〜６図は、夫々従来の差込み端子の拡大
断面図である。
図において、２は静電吸着板、４は基盤、６は
絶縁性の接着剤層、８，１０は電極、１２は被吸
着物、１４は吸着層、１６は吸着層突出端、１８
は電極突出端、２０は差込み端子、２２はコネク
タ、２４は電線、２６は電源、２８は切断防止用
接着剤層である。
Figures 1 to 3 show embodiments of the present invention, with Figure 1 being an enlarged plan view of a plug-in terminal, Figure 2 being a sectional view taken along the - line in Figure 1, and Figure 3 being a plan view of an electrostatic adsorption plate. be. 4 to 6 are enlarged sectional views of conventional plug-in terminals, respectively. In the figure, 2 is an electrostatic adsorption plate, 4 is a base, 6 is an insulating adhesive layer, 8 and 10 are electrodes, 12 is an object to be adsorbed, 14 is an adsorption layer, 16 is a protruding end of the adsorption layer, and 18
20 is a protruding end of an electrode, 20 is an insertion terminal, 22 is a connector, 24 is an electric wire, 26 is a power source, and 28 is an adhesive layer for preventing cutting.
Claims (1)
着して設けるとともに前記吸着層端部から突出さ
せた吸着層突出端に前記正負電極端部から突出さ
せた電極突出端を取着させて設けたフレキシブル
差込み端子を有する静電吸着板において、前記吸
着層突出端及び電極突出端を含み前記差込み端子
の設けられる部位の吸着層及び正負電極と前記接
着剤層との間にこの接着剤層との密着力よりも前
記吸着層及び正負電極との密着力が大なる絶縁性
の切断防止層を介設したことを特徴とするフレキ
シブル差込み端子を有する静電吸着板の電極切断
防止装置。1. Positive and negative electrodes and an adsorption layer are bonded and provided on an insulating adhesive layer, and the protruding ends of the electrodes protruding from the ends of the positive and negative electrodes are attached to the protruding ends of the adsorption layer protruding from the ends of the adsorption layer. In the electrostatic adsorption plate having a flexible plug-in terminal provided, this adhesive layer is provided between the adsorption layer and the positive and negative electrodes at the portion where the plug-in terminal is provided, including the protruding end of the adsorption layer and the protruding end of the electrode, and the adhesive layer. An electrode cut prevention device for an electrostatic chuck plate having a flexible plug-in terminal, characterized in that an insulating cut prevention layer is interposed which has a greater adhesion force with the adsorption layer and the positive and negative electrodes than with the adsorption layer and the positive and negative electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63170275A JPH0221585A (en) | 1988-07-08 | 1988-07-08 | Electrode cut prevention device of electrostatic adsorption plate having flexible insert terminal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63170275A JPH0221585A (en) | 1988-07-08 | 1988-07-08 | Electrode cut prevention device of electrostatic adsorption plate having flexible insert terminal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221585A JPH0221585A (en) | 1990-01-24 |
| JPH0447434B2 true JPH0447434B2 (en) | 1992-08-03 |
Family
ID=15901927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63170275A Granted JPH0221585A (en) | 1988-07-08 | 1988-07-08 | Electrode cut prevention device of electrostatic adsorption plate having flexible insert terminal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221585A (en) |
-
1988
- 1988-07-08 JP JP63170275A patent/JPH0221585A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0221585A (en) | 1990-01-24 |
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