JPH0222365U - - Google Patents

Info

Publication number
JPH0222365U
JPH0222365U JP1988100947U JP10094788U JPH0222365U JP H0222365 U JPH0222365 U JP H0222365U JP 1988100947 U JP1988100947 U JP 1988100947U JP 10094788 U JP10094788 U JP 10094788U JP H0222365 U JPH0222365 U JP H0222365U
Authority
JP
Japan
Prior art keywords
mechanism section
nitride film
film growth
section
plasma cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988100947U
Other languages
English (en)
Japanese (ja)
Other versions
JPH065416Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988100947U priority Critical patent/JPH065416Y2/ja
Publication of JPH0222365U publication Critical patent/JPH0222365U/ja
Application granted granted Critical
Publication of JPH065416Y2 publication Critical patent/JPH065416Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Chemical Vapour Deposition (AREA)
JP1988100947U 1988-07-28 1988-07-28 プラズマｃｖｄ窒化膜成長装置 Expired - Lifetime JPH065416Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988100947U JPH065416Y2 (ja) 1988-07-28 1988-07-28 プラズマｃｖｄ窒化膜成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988100947U JPH065416Y2 (ja) 1988-07-28 1988-07-28 プラズマｃｖｄ窒化膜成長装置

Publications (2)

Publication Number Publication Date
JPH0222365U true JPH0222365U (ko) 1990-02-14
JPH065416Y2 JPH065416Y2 (ja) 1994-02-09

Family

ID=31329490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988100947U Expired - Lifetime JPH065416Y2 (ja) 1988-07-28 1988-07-28 プラズマｃｖｄ窒化膜成長装置

Country Status (1)

Country Link
JP (1) JPH065416Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647234A (ja) * 1992-06-09 1994-02-22 Ebara Infilco Co Ltd Ｃｖｄ法排ガスの除害方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647234A (ja) * 1992-06-09 1994-02-22 Ebara Infilco Co Ltd Ｃｖｄ法排ガスの除害方法

Also Published As

Publication number Publication date
JPH065416Y2 (ja) 1994-02-09

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