JPH02239593A - Thin film el panel - Google Patents

Thin film el panel

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Publication number
JPH02239593A
JPH02239593A JP1062627A JP6262789A JPH02239593A JP H02239593 A JPH02239593 A JP H02239593A JP 1062627 A JP1062627 A JP 1062627A JP 6262789 A JP6262789 A JP 6262789A JP H02239593 A JPH02239593 A JP H02239593A
Authority
JP
Japan
Prior art keywords
thin film
electrode
dielectric breakdown
breakdown
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1062627A
Other languages
Japanese (ja)
Inventor
Hiroshi Washimi
鷲見 弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP1062627A priority Critical patent/JPH02239593A/en
Publication of JPH02239593A publication Critical patent/JPH02239593A/en
Pending legal-status Critical Current

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  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PURPOSE:To provide a thin film EL panel which has a self-restoration function to suppress the expansion of the breakage when a dielectric breakdown is generated, and prevents the burning-out of an electrode, by placing a thin film with a positive resistant temperature coefficient between a transparent electrode and a back electrode. CONSTITUTION:As the material for a thin film 15 which has a positive resistant temperature coefficient, a material with the coefficient as large as possible is preferable, and a sintered ceramics made by mixing a minute amount of additive such as La2O3, Ce2O3, and Ta2O to BaT:O3, or the like is suitable. Such a material has resistivity of 10<3>-10<5>OMEGAcm at the room temperature, and generates a very large resistance increase as the temperature rises. By making such a material into a thin film by a spattering and forming it on the second insulating layer 14, the resistance is increased rapidly responding to the temperature rise following the current increase at a dielectric breakdown. As a result, the current increase is suppressed to avoid a propagation type dielectric breakdown, the breakdown is made into a self-restoration type breakdown to restrict the breakage into relatively a small spot form, and a burning-out of the above electrode is prevented.

Description

【発明の詳細な説明】 庄1」Jlシ1分盟一 本発明は薄膜ELパネルに関するものである。[Detailed description of the invention] Sho 1” Jl Shi 1 Branch 1 The present invention relates to thin film EL panels.

従釆悲1直 例えば、薄1!ELマトリクス型ディスプレイパネルの
構造例を第2図を参照しながら説明する。
For example, light 1! An example of the structure of an EL matrix type display panel will be explained with reference to FIG.

尚,第2図の左半分はX方向の断面図、右半分はX方向
と直交するY方向の断面図である。第2図において、1
は透光性基板であるガラス基板、2は該ガラス基板1上
に形成されたマトリクス型薄膜EL素子である。この薄
膜EL素子2における3は上記ガラス基板1上にI.T
.0等を蒸着法によりX方向に定ピッチで多数のストラ
イブ状に形成した透明電極、4は透明電極3及びガラス
基板1上に、M208やY208等を蒸着又はスパッタ
法で形成した透明な第1の絶縁層、5はこの第1の絶縁
層4上にZnS:llln等を蒸着法等で形成した発光
層、6は該発光層5上に、M20sやY203等を蒸着
法やスバッタ法により形成した透明な第2の絶縁層、7
は第2の絶縁層6上にY方向に定ピッチで多数のストラ
イプ状に形成したM蒸着膜による背面電極である。
The left half of FIG. 2 is a sectional view in the X direction, and the right half is a sectional view in the Y direction orthogonal to the X direction. In Figure 2, 1
2 is a glass substrate which is a light-transmitting substrate, and 2 is a matrix type thin film EL element formed on the glass substrate 1. 3 in this thin film EL element 2 is an I.D. T
.. A transparent electrode 4 is made of a large number of stripes of M208, Y208, etc. formed by vapor deposition or sputtering on the transparent electrode 3 and the glass substrate 1. 1 is an insulating layer, 5 is a light-emitting layer formed by depositing ZnS:llln or the like on the first insulating layer 4, and 6 is a light-emitting layer formed by depositing M20s, Y203, etc. on the light-emitting layer 5 by vapor deposition or sputtering. the formed transparent second insulating layer, 7
is a back electrode made of a vapor-deposited M film formed on the second insulating layer 6 in the form of a large number of stripes at a constant pitch in the Y direction.

尚、上記薄膜EL素子2を囲繞するように、凹板状のカ
バーガラス8をガラス基板1上に接着材を介して固着す
ることにより、薄111ELマトリクス型ディスプレイ
パネルが構成され、更に上記ガラス基板1とカバーガラ
ス8からなる外囲器内に、薄膜EL素子2の耐湿性を向
上させるためシリコンオイル等の絶縁性保護流体が封入
される。
A thin 111EL matrix type display panel is constructed by fixing a concave plate-shaped cover glass 8 onto the glass substrate 1 via an adhesive so as to surround the thin film EL element 2. In order to improve the moisture resistance of the thin film EL element 2, an insulating protective fluid such as silicone oil is sealed in the envelope consisting of the thin film EL element 1 and the cover glass 8.

(特開昭57−708G号公報) この薄IIELマトリクス型ディスプレイ.パネルでは
、透明電極3と背面電極7が第3図に示すようにマトリ
クス状に交差して、多数のマトリクス状の画素mum・
・・を形成する。この透明電極3と背面電極7の各一端
部は、1本おきにガラス基板1の反対側の周辺部上まで
延設され、この両電極3,7の延設端部間に駆動電圧を
選択的に印加すると、発光層5の画素部分が選択的に発
光して所望の情報のドットマトリクス表示が行なわれる
(Japanese Unexamined Patent Publication No. 57-708G) This thin IIEL matrix type display. In the panel, the transparent electrode 3 and the back electrode 7 intersect in a matrix as shown in FIG.
... to form. One end of each of the transparent electrodes 3 and the back electrode 7 is extended to the opposite peripheral part of the glass substrate 1 every other time, and a driving voltage is selected between the extended ends of the two electrodes 3 and 7. When the voltage is applied selectively, the pixel portions of the light emitting layer 5 selectively emit light, thereby displaying desired information in a dot matrix.

ところで、上記薄膜EL素子2の形成時、第1の絶縁層
4、発光層5及び第2の絶縁層6の膜厚が均一になるよ
うに積層形成するのは困難で、上記各層4,5.8の膜
厚が薄い箇所でピンホールが発生し易かった。この結果
、透明電極3と背面電極7間に駆動電圧を印加した際、
第1の絶縁層4、発光層5及び第2の絶縁層6に発生し
たピンホールを介して、1記透明電極3と背面電極1間
で放電現象が生じて両電極3,7が絶縁破壊される。こ
こで、−F記背而電極7は、導電性や第2の絶縁層6に
対する接着性が良好で、比較的高融点(860℃)を有
するMMのものであるため、上述のように透明電極3と
背面電極7間で絶縁破壊が発生すると、Mでは蒸発飛散
機能が乏しい故に、その破壊域1aがスポット杖となる
自己回復型絶縁破壊〔第4図参照〕に留まらず、第5図
に示すように破壊域bが背面電極7の全面に亘って急速
に拡がる伝播型絶縁破壊へと至る。このように伝播型絶
縁破壊が発生して背面電極7の全面に1って破壊域bが
形成されると、その背面電極7の画素mの断線により、
その画素mから給電点とは逆方向の全画素msIn・・
・がすべで発光不能となってその表示機能が大幅に低下
するという問題点があった。
By the way, when forming the thin film EL element 2, it is difficult to laminate the first insulating layer 4, the light emitting layer 5, and the second insulating layer 6 so that their thicknesses are uniform; Pinholes were likely to occur at locations where the film thickness of .8 was thin. As a result, when a driving voltage is applied between the transparent electrode 3 and the back electrode 7,
A discharge phenomenon occurs between the transparent electrode 3 and the back electrode 1 through the pinholes generated in the first insulating layer 4, the light emitting layer 5, and the second insulating layer 6, causing dielectric breakdown of both electrodes 3 and 7. be done. Here, the −F back electrode 7 is made of MM, which has good conductivity and good adhesion to the second insulating layer 6 and has a relatively high melting point (860° C.), so it is transparent as described above. When dielectric breakdown occurs between the electrode 3 and the back electrode 7, since the evaporation and scattering function of M is poor, the breakdown area 1a becomes a spot rod, resulting in not only a self-healing dielectric breakdown [see Figure 4], but also a self-healing type dielectric breakdown as shown in Figure 5. As shown in FIG. 3, the breakdown region b rapidly spreads over the entire surface of the back electrode 7, leading to propagation type dielectric breakdown. When propagation type dielectric breakdown occurs in this way and a breakdown area b is formed on the entire surface of the back electrode 7, the disconnection of the pixel m of the back electrode 7 causes
All pixels msIn in the opposite direction from the pixel m to the feeding point...
・There was a problem in that the display function was significantly degraded because all of the lights could no longer emit light.

そこで上記問題点を解決するための手段として、 !)絶縁膜の膜厚を厚くする。Therefore, as a means to solve the above problems, ! ) Increase the thickness of the insulating film.

2)透明電極や背面電極にスリットをもうけ、一画素内
を複数個の画素に分割する。
2) Create a slit in the transparent electrode or back electrode to divide one pixel into multiple pixels.

3)Mよりも融点の低いSnなどの金属を背面電極に使
用する。
3) Use a metal such as Sn, which has a lower melting point than M, for the back electrode.

などの方法が開発されている。ところが、I)の方法で
は、動作電圧が高くなるため、駆動用のドライバーIC
の入手が困難かつ高価になるという問題点が生じてきた
。又、2)の方法では断線に至る割合は減少するが本質
的な解決にはならないばかりか、絶縁破壊が生じた場合
、断線はまぬがれたとしても、一画素中の正常な発光面
積が減じるために著しく表示機能を損なうという問題点
が生じてきた.3}の方法は断線を防止するのに極めて
有効な方法であるが, Snは機械的強度が弱いため薄
MELパネルの製造工程中で傷がつきやすい等の問題点
がある。
methods have been developed. However, in method I), the operating voltage is high, so the driver IC for driving
A problem has arisen in that it is difficult and expensive to obtain. In addition, although method 2) reduces the rate of wire breakage, it does not provide a fundamental solution, and if dielectric breakdown occurs, even if the wire breakage is avoided, the normal light emitting area in one pixel will be reduced. The problem has arisen that the display function is significantly impaired. Method 3} is an extremely effective method for preventing wire breakage, but it has problems such as Sn having low mechanical strength and being easily damaged during the manufacturing process of thin MEL panels.

そこで、本発明の目的は、絶縁破壊発生時に破壊の拡大
を抑止した自己回復機能を有し、電極の断線を防止した
薄IIELパネルを提供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a thin IIEL panel that has a self-healing function that suppresses the spread of dielectric breakdown when it occurs, and prevents electrode disconnection.

一の 本発明は前記問題点に鑑みて提案されたもので、上記目
的を達成するための技術的手段は、透光性基板上に、透
明電極、第1の絶縁層、発光層、第2の絶縁層及び背面
電極を順次積層形成してなる薄IIELパネルにおいて
、正の抵抗温度係数を有する薄膜を前記透明電極と背面
電極の間に介在させたものである。
One of the present inventions has been proposed in view of the above-mentioned problems, and the technical means for achieving the above-mentioned object is to provide a transparent electrode, a first insulating layer, a light-emitting layer, a second In a thin IIEL panel formed by successively laminating an insulating layer and a back electrode, a thin film having a positive temperature coefficient of resistance is interposed between the transparent electrode and the back electrode.

1且 本発明に係る薄IIELパネルによれば、正の抵抗温度
係数を有する薄膜を透明電極と背面電極の間に介在させ
たから、ピンホール等が絶縁破壊状態になり透明電極き
背面電極の間で電流が急増しても、ジュール熱等により
ビンホール部の温度も急激に増加するため、前記正の抵
抗温度係数を有する薄膜の抵抗も急激に増加する結果、
ピンホール部でのi流急増が抑馴され、絶縁破壊の進展
が抑制される。このため、伝播型絶縁破壊が回避され、
破壊が比較的小さなスポット状に限定される自己回復型
絶縁破壊となり、前記電極の断線を防止する。
1. According to the thin IIEL panel according to the present invention, since a thin film having a positive temperature coefficient of resistance is interposed between the transparent electrode and the back electrode, pinholes and the like can cause dielectric breakdown, and the thin film between the transparent electrode and the back electrode. Even if the current increases rapidly, the temperature of the bottle hole increases rapidly due to Joule heat, etc., so the resistance of the thin film having the positive temperature coefficient of resistance also increases rapidly.
The sudden increase in i-flow at the pinhole portion is suppressed, and the progress of dielectric breakdown is suppressed. Therefore, propagating breakdown is avoided and
A self-healing dielectric breakdown occurs in which the breakdown is limited to a relatively small spot, thereby preventing the electrode from breaking.

天」1例一 本発明に係る薄膜ELパネルの一実施例を第1図を参照
しながら説明する。尚、第1図の左半分はX方向の断面
図,右半分はY方向の断面図である。第1図において、
9は透光性基板であるガラス基板、IOは該ガラス基板
θ上に形成された本発明に係る薄模EL素fである。こ
の薄IIEL素子IOにおける目は上記ガラス基板9上
にI.T.0等をM着法等によりX方向に定ピッチで多
数のストライブ状に形成した透明電極、12は透明電極
■及びガラス基板9上にM203やY203等を蒸着又
はスパッタ法で形成した透明な第1の絶縁層、33はこ
の第1の絶縁層l2上に、ZnS”Mn等を蒸着法等で
形成した発光層、14は該発光層l3上に、Al’20
3やY203等を蒸着やスバフタ法により形成した透明
な第2の絶m層、15はこの第2の絶縁層目上に形成し
た本発明による正の抵抗温度係数を有する薄膜である。
Example 1 An example of a thin film EL panel according to the present invention will be described with reference to FIG. The left half of FIG. 1 is a sectional view in the X direction, and the right half is a sectional view in the Y direction. In Figure 1,
9 is a glass substrate which is a transparent substrate, and IO is a thin EL element f according to the present invention formed on the glass substrate θ. The eyes of this thin IIEL element IO are placed on the glass substrate 9. T. 12 is a transparent electrode in which M203, Y203, etc. is formed by vapor deposition or sputtering on a transparent electrode 1 and a glass substrate 9. A first insulating layer 33 is a light-emitting layer formed by depositing ZnS''Mn or the like on the first insulating layer l2, and 14 is a light-emitting layer formed of Al'20 on the light-emitting layer l3.
A transparent second insulating layer 15 formed of Y203, Y203, or the like by vapor deposition or a sputtering method is a thin film having a positive temperature coefficient of resistance according to the present invention formed on this second insulating layer.

この薄膜材料としてはできるだけ係数の大きな材料が望
ましく、例えばBaT:O sにLa2’s +Ce 
203 +Ta 205などの添加物を微量(例えば0
.1〜0.3モル%)混合して焼結したセラミンクなど
が適している。この材料は室温で103〜1050cm
程度の抵抗率を有するもので、温度上昇に伴って極めて
大きな抵抗増加を生じるものである。一例として室温か
ら約300℃まで上昇し.た場合、3〜5桁位の抵抗変
化がある。このような材料をスバッタ等で薄膜化して前
記第2の絶縁層上に形成することにより、絶縁破壊時の
電流増加に伴う温度上昇に対応して抵抗が急激に増加す
るため、電流増加を抑制して伝播型絶縁破壊を回避し、
破壊が比較的小さなスポット杖に限定される自己回復型
絶縁破壊となり、前記電極の断線を防止する。
As this thin film material, it is desirable to use a material with a coefficient as large as possible; for example, BaT:Os, La2's +Ce
Additives such as 203 + Ta 205 in trace amounts (e.g. 0
.. 1 to 0.3 mol%) and sintered ceramic is suitable. This material is 103-1050cm at room temperature
It has a certain degree of resistivity, and as the temperature rises, the resistance increases significantly. For example, the temperature rises from room temperature to approximately 300℃. In this case, there is a resistance change of 3 to 5 orders of magnitude. By forming such a material into a thin film using sputtering or the like and forming it on the second insulating layer, the resistance increases rapidly in response to the temperature rise accompanying the increase in current at the time of dielectric breakdown, thereby suppressing the increase in current. to avoid propagating breakdown,
This results in a self-healing dielectric breakdown where the breakdown is limited to a relatively small spot, thus preventing the electrode from breaking.

第1図に示した実施例では、正の抵抗温度係数を有する
薄膜15を背面電極iBと第2の絶縁層14の間に形成
したが、この位置に限定されることはなく、第1の絶縁
層l2と透明電極Hの間に形成してもよいし、両方に形
成してもよい。また、正の抵抗温度係数を存する薄膜!
5の材料として前記BaT:O s系に限定されること
はなく、他の酸化物系でもよいし、合金系のものでもよ
い。
In the embodiment shown in FIG. 1, the thin film 15 having a positive temperature coefficient of resistance is formed between the back electrode iB and the second insulating layer 14, but it is not limited to this position; It may be formed between the insulating layer l2 and the transparent electrode H, or may be formed on both. Also, a thin film with a positive temperature coefficient of resistance!
The material of No. 5 is not limited to the above-mentioned BaT:Os-based material, and may be other oxide-based materials or alloy-based materials.

生匪盆夏敦 本発明に係る薄gELパネルによれば、正の抵抗温度係
数を有する薄膜を透明電極と背面電極の間に介在させた
から、電極間が絶縁破壊状態になって電流が急増しても
、温度の急上昇にともなって抵抗が急増する結果、電流
増加が抑制され、絶縁破壊の進展が抑制される。このた
め伝播型絶縁破壊が回避され、破壊が比較的小さなスボ
ノト状に限定される自己回復型絶縁破壊となり、電極の
断線を防止するという効果がある。
According to the thin GEL panel according to the present invention, since a thin film having a positive temperature coefficient of resistance is interposed between the transparent electrode and the back electrode, dielectric breakdown occurs between the electrodes and the current increases rapidly. However, as a result of the sudden increase in resistance as the temperature rises, the increase in current is suppressed and the progress of dielectric breakdown is suppressed. Therefore, propagation-type dielectric breakdown is avoided, and self-recovery type dielectric breakdown occurs in which the breakdown is limited to a relatively small, suboto-like shape, which has the effect of preventing disconnection of the electrode.

【図面の簡単な説明】 第1図は本発明に係る薄1iELパネルの一実施例を示
す断面図で、左半分はX方向の断面図、右t分はY方向
の断面図である。 第2図は従来の薄IIELパネルの構造例を示す断面図
で、左半分はX方向の断面図、右半分はY方向の断面図
である。 第3図は薄模ELパネルでの画素部分を示す部分平面図
である。 第4図は背面電極での自己回復型絶縁破壊を示す部分平
面図、第5図は背面電極での伝播型破壊を示す部分平面
図である。 9・・・透光性基板、 0・・・薄膜EL素子、 !・・・透明電極、 2・・・第1の絶縁層、 3・・・発光層、 4・・・第2の絶縁層、 5・・・正の抵抗温度係数を有する薄膜、6・・・背面
電極。 ″<一ノ 第 コ 囚 15 Js2省一、fL!j臣L,ノー1イ鷹=4片;
:砕1「4テffi第 S 第 図 第 図 第 図
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing an embodiment of a thin 1iEL panel according to the present invention, in which the left half is a cross-sectional view in the X direction, and the right half is a cross-sectional view in the Y direction. FIG. 2 is a sectional view showing an example of the structure of a conventional thin IIEL panel, with the left half being a sectional view in the X direction and the right half being a sectional view in the Y direction. FIG. 3 is a partial plan view showing a pixel portion in a thin EL panel. FIG. 4 is a partial plan view showing self-recovery dielectric breakdown at the back electrode, and FIG. 5 is a partial plan view showing propagation type breakdown at the back electrode. 9...Transparent substrate, 0...Thin film EL element,! ...Transparent electrode, 2...First insulating layer, 3...Light emitting layer, 4...Second insulating layer, 5...Thin film having a positive temperature coefficient of resistance, 6... Back electrode. ``<Ichi no Dai Ko Prisoner 15 Js2 Shoichi, fL!j Minister L, No 1 I Taka = 4 pieces;
: Breaking 1 "4 teffi s. fig. fig. fig.

Claims (1)

【特許請求の範囲】  透光性基板上に、透明電極、第1の絶縁層、発光層、
第2の絶縁層及び背面電極を順次積層形成してなる薄膜
ELパネルにおいて、  正の抵抗温度係数を有する薄膜層を前記電極間に介在
させたことを特徴とする薄膜ELパネル。
[Claims] On a transparent substrate, a transparent electrode, a first insulating layer, a light emitting layer,
What is claimed is: 1. A thin film EL panel comprising a second insulating layer and a back electrode layered in sequence, characterized in that a thin film layer having a positive temperature coefficient of resistance is interposed between the electrodes.
JP1062627A 1989-03-14 1989-03-14 Thin film el panel Pending JPH02239593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1062627A JPH02239593A (en) 1989-03-14 1989-03-14 Thin film el panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1062627A JPH02239593A (en) 1989-03-14 1989-03-14 Thin film el panel

Publications (1)

Publication Number Publication Date
JPH02239593A true JPH02239593A (en) 1990-09-21

Family

ID=13205746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1062627A Pending JPH02239593A (en) 1989-03-14 1989-03-14 Thin film el panel

Country Status (1)

Country Link
JP (1) JPH02239593A (en)

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