JPH02242584A - Thin-film el element - Google Patents
Thin-film el elementInfo
- Publication number
- JPH02242584A JPH02242584A JP1062529A JP6252989A JPH02242584A JP H02242584 A JPH02242584 A JP H02242584A JP 1062529 A JP1062529 A JP 1062529A JP 6252989 A JP6252989 A JP 6252989A JP H02242584 A JPH02242584 A JP H02242584A
- Authority
- JP
- Japan
- Prior art keywords
- light
- emitting layer
- thin
- film
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 27
- 150000001875 compounds Chemical class 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 7
- 239000013078 crystal Substances 0.000 claims abstract description 5
- 239000012190 activator Substances 0.000 claims description 6
- 229910052717 sulfur Inorganic materials 0.000 claims description 5
- 239000011521 glass Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract description 3
- BHXBZLPMVFUQBQ-UHFFFAOYSA-K samarium(iii) chloride Chemical compound Cl[Sm](Cl)Cl BHXBZLPMVFUQBQ-UHFFFAOYSA-K 0.000 abstract description 2
- 230000003213 activating effect Effects 0.000 abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 2
- 229910004664 Cerium(III) chloride Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- VYLVYHXQOHJDJL-UHFFFAOYSA-K cerium trichloride Chemical compound Cl[Ce](Cl)Cl VYLVYHXQOHJDJL-UHFFFAOYSA-K 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 23
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 4
- 239000011593 sulfur Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 241000287462 Phalacrocorax carbo Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 本発明は白色発光薄膜EL素子に関するものである。[Detailed description of the invention] Industrial applications The present invention relates to a white light emitting thin film EL device.
従来の技術
薄膜EL素子は自己発光素子であり、また薄型の面状発
光素子である等の優れた利点からモノクロデイスプレィ
パネルの分野を中心に応用が進んでいる。しかし、実用
レベルに達しているのは、発光層材料にZnS:Mnを
用いたアンバー色発光のデイスプレィパネルのみである
。そのためさらに高イ」頒価値のデイスプレィパネルを
目ざしてフルカラーデイスプレィパネルの実現が望まれ
ている。フルカラー表示を実現するために、赤。BACKGROUND OF THE INVENTION Thin film EL devices are self-luminous devices and thin planar light emitting devices, which are excellent advantages, and their applications are progressing mainly in the field of monochrome display panels. However, only an amber color emitting display panel using ZnS:Mn as the emissive layer material has reached a practical level. Therefore, it is desired to realize a full-color display panel with the aim of creating a display panel with even higher distribution value. Red to achieve full color display.
緑、青色発光する薄膜EL素子を積層あるいは平面状に
配置する方法が考えられる。Possible methods include stacking or arranging thin film EL elements that emit green and blue light in a planar manner.
しかしながら、赤色と緑色については高輝度発光する薄
膜EL素子はあるが、青色発光する高輝度の薄膜E L
素子はないのが現状である。このため、発光層材料にS
rS:CeCe3を用いた青緑色発光薄膜EL素子と発
光層材料にCaS :EuCQ3を用いた赤色発光薄膜
EL素子とを積層あるいは平面状に配置し、青色フィル
ターと緑色フィルターを用いることにより、フルカラー
表示を実現しようとしている。However, although there are thin-film EL devices that emit high-brightness light for red and green, there are thin-film EL devices that emit high-brightness blue light.
Currently, there are no elements. For this reason, S
A blue-green light emitting thin film EL device using rS:CeCe3 and a red light emitting thin film EL device using CaS:EuCQ3 as the light emitting layer material are stacked or arranged in a planar manner, and a blue filter and a green filter are used to achieve full color display. are trying to realize this.
発明か解決しようとする課題
しかしながら、これらの方法て゛作製されたフルカラー
薄膜E L素子は母体材料が異なるので、作製プロセス
が複雑である。劣化の違いから赤。Problems to be Solved by the Invention However, since the full-color thin film EL elements manufactured by these methods are made of different base materials, the manufacturing process is complicated. Red because of the difference in deterioration.
緑、青の輝度比が使用と共に変わってしまうという課題
を有していた。The problem was that the brightness ratio of green and blue changed with use.
本発明は上記課題に鑑み、簡単な単層構造による発光層
を用いることにより、生産性に優れた白色発光薄膜EL
素子を提供し、カラーフィルターを併用することにより
フルカラー表示パネルを提供するものである。In view of the above problems, the present invention provides a white light emitting thin film EL with excellent productivity by using a light emitting layer with a simple single layer structure.
By providing an element and using a color filter in combination, a full-color display panel is provided.
課題を解決するだめの手段
本発明の薄膜EL素子は、少なくとも一方が透明電極で
ある二つの電極とこの電極間に発光層と少なくとも一つ
の誘電体層とを有し、前記発光層が2種以上の付活剤を
有して構成されている。Means for Solving the Problems The thin film EL device of the present invention has two electrodes, at least one of which is a transparent electrode, a light-emitting layer and at least one dielectric layer between the electrodes, and the light-emitting layer has two types. It is configured with the above activator.
作用
本発明によれば、簡単な単層構造による発光層を用いる
ことにより、生産性に優れた白色発光薄膜EL素子が実
現でき、さらに、カラーフィルターを併用することによ
りフルカラー表示パネルが実現できる。According to the present invention, by using a light-emitting layer with a simple single-layer structure, a white light-emitting thin film EL device with excellent productivity can be realized, and furthermore, by using a color filter in combination, a full-color display panel can be realized.
実施例
本発明の一実施例について、図面を用いて簡単に説明す
る。第1図は本発明の薄膜EL素子の断面構造図を示す
。Embodiment An embodiment of the present invention will be briefly described with reference to the drawings. FIG. 1 shows a cross-sectional structural diagram of a thin film EL device of the present invention.
第1図において、カラス基板1上にインジウム・スズ混
晶酸化物(以下、ITOと記す。〉をターゲラI・とす
る直流スパッタ法により、ITOによる透明電極2を形
成する。In FIG. 1, a transparent electrode 2 made of ITO is formed on a glass substrate 1 by a DC sputtering method using an indium-tin mixed crystal oxide (hereinafter referred to as ITO) as a target layer.
次に、この上に、高周波マグネトロンスパッタ法により
、Ta205薄膜を第1誘電体層3として厚さ0.2μ
m程度形成する。この後、SrS粉末中に付活剤として
CeCe3とSmCl 3とを合わせて0.2moi!
%以下添加し、さらに、蒸着時にイオウ(S)が再蒸発
することにより欠損するのを補うためにイオウを過剰に
添加したものを混合、成形したのち、△r雰囲気中で焼
結したタブレットをターゲットとして電子線蒸着法で厚
さ1μm程度の発光層4を形成する。このとき、カラス
基板1は蒸着時600℃程度に保持し、かつ、さらにイ
オウの再蒸発欠損を補うために、イオウの蒸発を同時に
別のるつぼから行なうことに注意する。Next, on top of this, a Ta205 thin film with a thickness of 0.2 μm was formed as a first dielectric layer 3 by high-frequency magnetron sputtering.
Form about m. After this, CeCe3 and SmCl3 were combined as activators in the SrS powder, and the total amount was 0.2 moi!
% or less, and in addition, to compensate for the loss of sulfur (S) due to re-evaporation during vapor deposition, an excess of sulfur (S) is added. After mixing and molding, a tablet is sintered in a △r atmosphere. A light emitting layer 4 having a thickness of about 1 μm is formed using an electron beam evaporation method as a target. At this time, care should be taken to maintain the glass substrate 1 at about 600° C. during vapor deposition, and to simultaneously evaporate sulfur from another crucible in order to compensate for the re-evaporation loss of sulfur.
この後、高周波マグネl−r+ノンスパッタ法3より、
A& 203薄膜を第2誘電体層5として厚さ0.2μ
m程度形成する。After this, from high frequency magneto l-r + non-sputtering method 3,
A & 203 thin film is used as the second dielectric layer 5 with a thickness of 0.2μ.
Form about m.
最後に、背面電極6として直流スパッタ法によりAe薄
膜を形成し、薄III E L素子が完成される。Finally, an Ae thin film is formed as the back electrode 6 by direct current sputtering to complete a thin III E L element.
以上の様にして作製された薄膜EL素子は、イ」活剤と
して添加したCeCl、3からのCe”+固有の450
nm〜580nmにわたるブロードな発光と、Sm(1
3からのSm”固有の565nm600nm、655n
mイ」近の3本のピークとが合成され、ペーパー色の白
色発光を呈する。第2図に本発明の薄膜EL素子の発光
スペクトルを示し、第3図にCIE色度座標点を示す図
を示す。The thin film EL device fabricated as described above has a unique 450
Broad emission ranging from nm to 580 nm and Sm(1
Sm from 3” specific 565nm 600nm, 655n
The three peaks near ``m'' are combined to produce paper-colored white light emission. FIG. 2 shows the emission spectrum of the thin film EL device of the present invention, and FIG. 3 shows the CIE chromaticity coordinate points.
なお、本発明の一実施例においては発光層の母体材料と
してSrSを用いたが、CaSてもZnSでもこれらの
混晶化合物でもよい。In one embodiment of the present invention, SrS was used as the host material for the light emitting layer, but it may also be CaS, ZnS, or a mixed crystal compound thereof.
また、本発明の一実施例においては、誘電体材料として
Ta205とAe203とを用いて、2層の誘電体層と
したが、SiC2,S i 3N4.B a T i
O3等の他の誘電体材料を用いてもよいし、これらの]
層だけの誘電体層としてもよいことは言うまでもない。Further, in one embodiment of the present invention, Ta205 and Ae203 are used as dielectric materials to form a two-layer dielectric layer, but SiC2, Si3N4. B a Ti
Other dielectric materials such as O3 may be used, and these]
Needless to say, it is also possible to use only a dielectric layer.
発明の効果
本発明の薄膜E L素子は少なくとも一方が透明電極で
ある二つの電極とこの電極間に発光層と少なくとも一つ
の誘電体層とを有する薄膜EL素子において、前記発光
層が少なくとも2種以上の付活剤を有する、ずなわち、
SrSあるいはCaSあるいはZnSあるいはSrS、
CaS、ZnSの3種の化合物のうぢ少なくとも2種か
らなる混晶化合物からなる母体材料に付活剤としてCe
Ce3とS m Ce 3とを有する構造により、簡単
な単層構造による発光層を用い、生産性に優れた白色発
光薄膜E L素子が実現でき、さらに、カラーフィルタ
ーを併用することによりフルカラー表示パネルが実現て
きる。この効果は大なるものがある。Effects of the Invention The thin film EL device of the present invention has two electrodes, at least one of which is a transparent electrode, and a light emitting layer and at least one dielectric layer between the electrodes, in which the light emitting layer comprises at least two types of dielectric layers. Having the above activator, that is,
SrS or CaS or ZnS or SrS,
Ce is added as an activator to a base material consisting of a mixed crystal compound consisting of at least two of three types of compounds: CaS and ZnS.
With the structure comprising Ce3 and S m Ce3, a white light-emitting thin film E-L device with excellent productivity can be realized using a light-emitting layer with a simple single-layer structure.Furthermore, by using a color filter in combination, a full-color display panel can be realized. will come true. This effect is significant.
(う(cormorant
第1図は本発明の一実施例における薄膜EL素全発明薄
膜EL素子のCIE色度座標点を示す図である。
1・・・・・・カラス基板、2・・・・・透明電極、:
3・・・・・・第1誘電体層、4・・・・・・発光層、
5・・・・・・第2誘電体層、6・・・・・・背面電極
。FIG. 1 is a diagram showing CIE chromaticity coordinate points of a thin film EL device according to an embodiment of the present invention. 1... Glass substrate, 2... Transparent electrode, :
3...First dielectric layer, 4...Light emitting layer,
5... Second dielectric layer, 6... Back electrode.
Claims (2)
の電極間に発光層と少なくとも一つの誘電体層とを有し
、前記発光層が2種以上の付活剤を含むことを特徴とす
る薄膜EL素子。(1) It has two electrodes, at least one of which is a transparent electrode, and a light-emitting layer and at least one dielectric layer between the electrodes, and the light-emitting layer contains two or more types of activators. Thin film EL element.
Sのいずれか、又は前記3種の化合物のうち少なくとも
2種の化合物からなる混晶化合物からなり、付活剤とし
てCeCl_3とSmCl_3とを含んでいることを特
徴とする特許請求の範囲第1項記載の薄膜EL素子。(2) The host material of the light emitting layer is SrS, CaS or Zn
Claim 1, characterized in that it is made of a mixed crystal compound consisting of any one of S or at least two of the three types of compounds, and contains CeCl_3 and SmCl_3 as activators. The thin film EL device described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1062529A JPH02242584A (en) | 1989-03-15 | 1989-03-15 | Thin-film el element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1062529A JPH02242584A (en) | 1989-03-15 | 1989-03-15 | Thin-film el element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02242584A true JPH02242584A (en) | 1990-09-26 |
Family
ID=13202812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1062529A Pending JPH02242584A (en) | 1989-03-15 | 1989-03-15 | Thin-film el element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02242584A (en) |
-
1989
- 1989-03-15 JP JP1062529A patent/JPH02242584A/en active Pending
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