JPH02245203A - フロンまたは低沸点溶剤回収機構 - Google Patents

フロンまたは低沸点溶剤回収機構

Info

Publication number: JPH02245203A
Authority: JP; Japan
Prior art keywords: low; fluorocarbon; boiling point; tank; heat exchanger
Prior art date: 1989-03-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1068243A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0529482B2 (cs

Inventor

Tetsuo Tsukada

塚田　哲夫

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

TSUKADA TEKKO KK

Original Assignee

TSUKADA TEKKO KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-20

Filing date

1989-03-20

Publication date

1990-10-01

1989-03-20 Application filed by TSUKADA TEKKO KK filed Critical TSUKADA TEKKO KK

1989-03-20 Priority to JP1068243A priority Critical patent/JPH02245203A/ja

1990-10-01 Publication of JPH02245203A publication Critical patent/JPH02245203A/ja

1993-04-30 Publication of JPH0529482B2 publication Critical patent/JPH0529482B2/ja

Status Granted legal-status Critical Current

Links

239000002904 solvent Substances 0.000 title claims abstract description 47
NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 title claims abstract description 32
230000007246 mechanism Effects 0.000 title claims description 18
238000004140 cleaning Methods 0.000 claims abstract description 35
238000010438 heat treatment Methods 0.000 claims abstract description 8
238000009835 boiling Methods 0.000 claims description 29
238000011084 recovery Methods 0.000 claims description 18
238000001816 cooling Methods 0.000 description 7
230000005494 condensation Effects 0.000 description 4
238000009833 condensation Methods 0.000 description 4
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
238000001704 evaporation Methods 0.000 description 2
230000008020 evaporation Effects 0.000 description 2
230000000717 retained effect Effects 0.000 description 2
CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
238000003915 air pollution Methods 0.000 description 1
231100000132 chronic toxicity testing Toxicity 0.000 description 1
230000006378 damage Effects 0.000 description 1
239000003814 drug Substances 0.000 description 1
229940079593 drug Drugs 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000003673 groundwater Substances 0.000 description 1
239000003960 organic solvent Substances 0.000 description 1
238000003911 water pollution Methods 0.000 description 1

Classifications

- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

Cleaning Or Drying Semiconductors (AREA)
Cleaning By Liquid Or Steam (AREA)
Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

JP1068243A 1989-03-20 1989-03-20 フロンまたは低沸点溶剤回収機構 Granted JPH02245203A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1068243A JPH02245203A (ja)	1989-03-20	1989-03-20	フロンまたは低沸点溶剤回収機構

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1068243A JPH02245203A (ja)	1989-03-20	1989-03-20	フロンまたは低沸点溶剤回収機構

Publications (2)

Publication Number	Publication Date
JPH02245203A true JPH02245203A (ja)	1990-10-01
JPH0529482B2 JPH0529482B2 (cs)	1993-04-30

Family

ID=13368135

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1068243A Granted JPH02245203A (ja)	1989-03-20	1989-03-20	フロンまたは低沸点溶剤回収機構

Country Status (1)

Country	Link
JP (1)	JPH02245203A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH06178912A (ja) *	1991-11-11	1994-06-28	Morikawa Sangyo Kk	溶剤気体の吸引方法及びそれを用いた溶剤回収装置
US5454390A (en) *	1994-05-16	1995-10-03	International Business Machines Corporation	Vapor rinse-vapor dry process tool
US6355113B1 (en)	1991-12-02	2002-03-12	3M Innovative Properties Company	Multiple solvent cleaning system

1989
- 1989-03-20 JP JP1068243A patent/JPH02245203A/ja active Granted

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH06178912A (ja) *	1991-11-11	1994-06-28	Morikawa Sangyo Kk	溶剤気体の吸引方法及びそれを用いた溶剤回収装置
US6355113B1 (en)	1991-12-02	2002-03-12	3M Innovative Properties Company	Multiple solvent cleaning system
US5454390A (en) *	1994-05-16	1995-10-03	International Business Machines Corporation	Vapor rinse-vapor dry process tool

Also Published As

Publication number	Publication date
JPH0529482B2 (cs)	1993-04-30

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