JPH0225838U - - Google Patents
Info
- Publication number
- JPH0225838U JPH0225838U JP10359888U JP10359888U JPH0225838U JP H0225838 U JPH0225838 U JP H0225838U JP 10359888 U JP10359888 U JP 10359888U JP 10359888 U JP10359888 U JP 10359888U JP H0225838 U JPH0225838 U JP H0225838U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ellipsometer
- sample table
- moving
- measures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案一実施例の概略構成図、第２図
は試料台の移動の例を示す図、第３図は試料の測
定点を示す図である。
１…Ｈｅ―Ｎｅレーザ、２…チヨツパ、３…ポ
ラライザ、４…λ／４板、５…アナライザ、６…
デイテクタ、７…試料台、８…試料、９…ステー
ジ駆動装置。
FIG. 1 is a schematic diagram of an embodiment of the present invention, FIG. 2 is a diagram showing an example of movement of a sample stage, and FIG. 3 is a diagram showing measurement points of a sample. 1... He-Ne laser, 2... Chipper, 3... Polarizer, 4... λ/4 plate, 5... Analyzer, 6...
Detector, 7... Sample stage, 8... Sample, 9... Stage drive device.
Claims (1)
を測定するエリプソメータにおいて、 試料を載置する試料台をその載置面と平行に移
動させる試料台移動手段を備えることを特徴とす
るエリプソメータ。[Scope of Claim for Utility Model Registration] In an ellipsometer that makes polarized light incident on a sample surface and measures the polarization state of the reflected light, there is provided a sample table moving means for moving a sample table on which a sample is placed parallel to the mounting surface. An ellipsometer characterized by comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10359888U JPH0225838U (en) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10359888U JPH0225838U (en) | 1988-08-04 | 1988-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0225838U true JPH0225838U (en) | 1990-02-20 |
Family
ID=31334578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10359888U Pending JPH0225838U (en) | 1988-08-04 | 1988-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225838U (en) |
-
1988
- 1988-08-04 JP JP10359888U patent/JPH0225838U/ja active Pending
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