JPH02260329A - 酸化物超伝導薄膜作製方法 - Google Patents

酸化物超伝導薄膜作製方法

Info

Publication number
JPH02260329A
JPH02260329A JP1078456A JP7845689A JPH02260329A JP H02260329 A JPH02260329 A JP H02260329A JP 1078456 A JP1078456 A JP 1078456A JP 7845689 A JP7845689 A JP 7845689A JP H02260329 A JPH02260329 A JP H02260329A
Authority
JP
Japan
Prior art keywords
thin film
oxygen
substrate
oxide
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1078456A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579606B2 (2
Inventor
Hiroshi Akaho
博司 赤穂
Mitsuhiro Matsumoto
充裕 松元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Kyocera Corp filed Critical Agency of Industrial Science and Technology
Priority to JP1078456A priority Critical patent/JPH02260329A/ja
Publication of JPH02260329A publication Critical patent/JPH02260329A/ja
Publication of JPH0579606B2 publication Critical patent/JPH0579606B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP1078456A 1989-03-31 1989-03-31 酸化物超伝導薄膜作製方法 Granted JPH02260329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1078456A JPH02260329A (ja) 1989-03-31 1989-03-31 酸化物超伝導薄膜作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1078456A JPH02260329A (ja) 1989-03-31 1989-03-31 酸化物超伝導薄膜作製方法

Publications (2)

Publication Number Publication Date
JPH02260329A true JPH02260329A (ja) 1990-10-23
JPH0579606B2 JPH0579606B2 (2) 1993-11-04

Family

ID=13662539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1078456A Granted JPH02260329A (ja) 1989-03-31 1989-03-31 酸化物超伝導薄膜作製方法

Country Status (1)

Country Link
JP (1) JPH02260329A (2)

Also Published As

Publication number Publication date
JPH0579606B2 (2) 1993-11-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term