JPH0227170A - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPH0227170A
JPH0227170A JP17505788A JP17505788A JPH0227170A JP H0227170 A JPH0227170 A JP H0227170A JP 17505788 A JP17505788 A JP 17505788A JP 17505788 A JP17505788 A JP 17505788A JP H0227170 A JPH0227170 A JP H0227170A
Authority
JP
Japan
Prior art keywords
cryopanel
screen
temperature
panel
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17505788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454070B2 (2
Inventor
Norihide Saho
典英 佐保
Hironobu Ueda
博信 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17505788A priority Critical patent/JPH0227170A/ja
Publication of JPH0227170A publication Critical patent/JPH0227170A/ja
Publication of JPH0454070B2 publication Critical patent/JPH0454070B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP17505788A 1988-07-15 1988-07-15 クライオポンプ Granted JPH0227170A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17505788A JPH0227170A (ja) 1988-07-15 1988-07-15 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17505788A JPH0227170A (ja) 1988-07-15 1988-07-15 クライオポンプ

Publications (2)

Publication Number Publication Date
JPH0227170A true JPH0227170A (ja) 1990-01-29
JPH0454070B2 JPH0454070B2 (2) 1992-08-28

Family

ID=15989479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17505788A Granted JPH0227170A (ja) 1988-07-15 1988-07-15 クライオポンプ

Country Status (1)

Country Link
JP (1) JPH0227170A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009058800A (ja) * 2007-08-31 2009-03-19 Katsuko Kaneko 文字シール収納教材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131779A (ja) * 1982-09-29 1984-07-28 シ−ヴイ−アイ・インコ−ポレイテツド クライオポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131779A (ja) * 1982-09-29 1984-07-28 シ−ヴイ−アイ・インコ−ポレイテツド クライオポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009058800A (ja) * 2007-08-31 2009-03-19 Katsuko Kaneko 文字シール収納教材

Also Published As

Publication number Publication date
JPH0454070B2 (2) 1992-08-28

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