JPH02277779A - Method for coating surface of synthetic resin structure with metal - Google Patents

Method for coating surface of synthetic resin structure with metal

Info

Publication number
JPH02277779A
JPH02277779A JP9739689A JP9739689A JPH02277779A JP H02277779 A JPH02277779 A JP H02277779A JP 9739689 A JP9739689 A JP 9739689A JP 9739689 A JP9739689 A JP 9739689A JP H02277779 A JPH02277779 A JP H02277779A
Authority
JP
Japan
Prior art keywords
metal
peroxide
plating
synthetic resin
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9739689A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ito
清 伊藤
Toshiya Tanioka
俊哉 谷岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nisshinbo Holdings Inc
Original Assignee
Nisshinbo Industries Inc
Nisshin Spinning Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisshinbo Industries Inc, Nisshin Spinning Co Ltd filed Critical Nisshinbo Industries Inc
Priority to JP9739689A priority Critical patent/JPH02277779A/en
Publication of JPH02277779A publication Critical patent/JPH02277779A/en
Pending legal-status Critical Current

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  • Chemically Coating (AREA)

Abstract

PURPOSE:To form a tightly adhered coating film of a metal on a surface to be plated by sticking a compd. contg. a metal acting as a catalyst for decomposition of peroxide to the surface to be plated, bringing the surface into contact with inorg. peroxide and carrying out electroless plating. CONSTITUTION:A compd. contg. a metal (e.g. copper, iron or zinc) acting as a catalyst for decomposition of peroxide, e.g. copper sulfate or iron nitrate is stuck to a base material and this base material is brought into contact with inorg. peroxide to violently decompose the peroxide by the catalytic action of the stuck compd. Nascent oxygen is generated by the decomposition and superfine ruggedness is imparted to the surface of the base material by oxidative decomposition with the oxygen to activate the surface to electroless plating. Since a catalyst for chemical plating is satisfactorily adsorbed on the activated surface, a coating film of a metal having superior uniformity and adhesion is formed on the surface by electroless plating.

Description

【発明の詳細な説明】 本発明は合成樹脂製構造物表面の金属被覆方法に関し、
さらに詳しくは、合成樹脂製構造物表面に無電解メッキ
法により金属被膜を形成するに際して、無電解メッキに
先立ちメッキすべき表面を無機過酸化物で処理すること
により、均一で且つ密着性に優れた金属被膜を形成する
方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of metal coating the surface of a synthetic resin structure,
More specifically, when forming a metal coating on the surface of a synthetic resin structure by electroless plating, the surface to be plated is treated with an inorganic peroxide prior to electroless plating to ensure uniformity and excellent adhesion. The present invention relates to a method for forming a metal coating.

i般に非導電性構造物の表面に無電解メッキを施すには
、脱脂、触媒付与、活性化等の前処理を行った非導電性
構造物を無電解メッキ浴に浸漬するのが普通であり、そ
の際基材表面の濡れを良好にして、触媒の吸着及び付着
能力を向上させたり、或いは基材と金属との密着性の向
上を目的として、機械的エツチング、化学的エツチング
又は低温プラズマエツチング等の表面処理を併用するこ
とも多く行われている。
Generally, in order to perform electroless plating on the surface of a non-conductive structure, it is common to immerse the non-conductive structure, which has undergone pre-treatments such as degreasing, catalysis, and activation, in an electroless plating bath. At that time, mechanical etching, chemical etching, or low-temperature plasma etching is used to improve the wetting of the substrate surface and improve the adsorption and adhesion ability of the catalyst, or to improve the adhesion between the substrate and metal. Surface treatments such as etching are also often used together.

現在、工業的に無電解メッキの対象とされている合成樹
脂としては、ABS樹脂、ポリプロピレン樹脂、ポリア
ミド樹脂、ポリカーボネート樹脂等があげられる。その
理由は、これらの基材が化学エツチングされ易く、また
無電解メッキの密着性も比較的良好であるからである。
Currently, synthetic resins that are industrially targeted for electroless plating include ABS resins, polypropylene resins, polyamide resins, polycarbonate resins, and the like. This is because these base materials are easily chemically etched and have relatively good adhesion during electroless plating.

一方、メッキし難くい樹脂としては、ポリエステル系樹
脂、塩化ビニル系樹脂、塩化ビニリデン系樹脂等があげ
られる。
On the other hand, examples of resins that are difficult to plate include polyester resins, vinyl chloride resins, vinylidene chloride resins, and the like.

これらの樹脂の化学エツチングに関し、例えば、特公昭
47−19600号公報には、ポリアミド、ポリエステ
ル、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリオレフ
ィン等の樹脂のメッキに先立って、それぞれの樹脂に適
した有機溶剤たとえば、塩化ビニル系樹脂に対しては酢
酸エチル、アセトン、ベンゼン、トリクレン等を、また
ポリエステル系樹脂に対してはm−クレゾール、0−フ
ェノールの10〜20%水溶液を、そしてポリプロピレ
ンに対しては5%の苛性ソーダ水溶液に10〜20%の
デカリン又はテトラリン等の有機溶剤を混入し、さらに
界面活性剤2〜10gzQを加えてエマルジョン化した
浴等において50〜60℃で膨潤処理を行い、次いで、
50〜60%硫酸水溶液に重クロム酸カリ2〜5 gI
Qを加えた浴において50〜70℃で1〜2分間エツチ
ングを行った後、無電解メッキする方法が開示されてい
る。
Regarding chemical etching of these resins, for example, Japanese Patent Publication No. 47-19600 describes that prior to plating resins such as polyamide, polyester, polyvinyl chloride, polyvinylidene chloride, and polyolefin, an organic solvent suitable for each resin is used. For example, for vinyl chloride resins, use ethyl acetate, acetone, benzene, trichlene, etc., for polyester resins, use m-cresol, a 10-20% aqueous solution of 0-phenol, and for polypropylene, use Mix 10 to 20% of an organic solvent such as decalin or tetralin to a 5% aqueous solution of caustic soda, and further add 2 to 10 gzQ of a surfactant to form an emulsion. Swelling treatment is performed at 50 to 60°C in a bath or the like, and then,
2-5 gI of potassium dichromate in 50-60% sulfuric acid aqueous solution
A method is disclosed in which etching is performed for 1 to 2 minutes at 50 to 70 DEG C. in a bath containing Q, followed by electroless plating.

しかし、この方法で樹脂を膨潤処理した後に使われる化
学エツチング剤の硫酸と重クロム酸カリの混合液は、強
い酸化力を有しており、樹脂の欠損、物理的強力の低下
等の問題を生ずる可能性がある。
However, the chemical etching agent used after swelling the resin with this method, a mixture of sulfuric acid and potassium dichromate, has strong oxidizing power, which can cause problems such as resin defects and a decrease in physical strength. This may occur.

その上、クロム酸が溶存した廃液は公害規制が厳しく排
水処理方法が複雑であり、更に沈澱回収したクロムを含
むスラッジの処理等に難問が多いという欠点がある。
Moreover, wastewater containing dissolved chromic acid is subject to strict pollution regulations, and the wastewater treatment method is complicated, and furthermore, there are many difficulties in the treatment of chromium-containing sludge that has been collected by precipitation.

他方、無電解メッキ金属皮膜の密着性を改良する方法と
して、合成樹脂製構造物の表面に微細な凹凸を付与する
ことも考えられるが、プラスチック成型品に対してしば
しば行われているサンドブラスト法などの機械的粗化方
法は繊維のような構造物の場合には損傷が甚しく実際上
使用不可能である。
On the other hand, one way to improve the adhesion of electroless plated metal films is to add fine irregularities to the surface of synthetic resin structures, but sandblasting, which is often used on plastic molded products, etc. The mechanical roughening method causes severe damage to structures such as fibers, making them practically unusable.

また、特開昭60−181362号公報には、ポリエス
テル繊維に化学メッキを施す改良法として、スルホン酸
基及び/又は金属スルホネート基を有する化合物を含む
ポリエステル繊維を、アルカリ浴に浸漬及び/又は通過
させることにより、8〜30重量%の減量処理を施し、
繊維表面に金属スルホネート基を露出させた後、触媒付
与、活性化処理することにより無電解メッキ金属膜を形
成させる方法が開示されている。しかしながら、この方
法では、ポリエステル紡糸原料に金属スルホネート基を
有する化合物を共存させて溶融紡糸するために、紡糸原
料段階から特製しなければならず、一方、溶融紡糸時に
ポリエステル以外の化合物を共存させると、紡糸ノズル
の摩耗又は紡糸中の糸切れが起こり易い等の欠点がある
In addition, JP-A-60-181362 discloses an improved method for chemically plating polyester fibers, in which polyester fibers containing a compound having a sulfonic acid group and/or a metal sulfonate group are immersed and/or passed through an alkaline bath. By doing so, a weight loss treatment of 8 to 30% by weight is performed,
A method is disclosed in which a metal sulfonate group is exposed on the fiber surface, and then a catalyst is applied and an activation treatment is performed to form an electroless plated metal film. However, in this method, in order to perform melt spinning with a compound having a metal sulfonate group coexisting in the polyester spinning raw material, special preparation is required from the spinning raw material stage. However, there are disadvantages such as abrasion of the spinning nozzle or yarn breakage during spinning.

更に、特開昭48−54299号公報には、ポリアミド
繊維の無電解メッキ方法が記載されておりこの方法は、
ポリアミド繊維を物理的又は化学的にエツチングするこ
となくN−アルコキシメチルナイロンのアルコール溶液
をナイロン繊維に付着させ、次いで溶剤であるアルコー
ルの沸点以上の温度で急激に乾燥させるものであって、
この方法では乾燥時にアルコールが速やかに気化し、微
細な気泡となってN−アルコキシメチルナイロンの表面
から離脱し、N−アルコキシメチルナイロンがナイロン
繊維にしっかりと接着される。N−アルコキシメチルナ
イロンの表面はアルコールの気化散逸により微細な凹凸
状態となるので、重クロム酸と硫酸の混合液による化学
エツチングを行なう必要がなく、直接無電解メッキする
ことにより金属メッキ層を形成させることが可能となる
Furthermore, JP-A No. 48-54299 describes a method for electroless plating of polyamide fibers, and this method includes the following steps:
An alcohol solution of N-alkoxymethyl nylon is attached to nylon fibers without physically or chemically etching the polyamide fibers, and then rapidly dried at a temperature higher than the boiling point of the alcohol as a solvent,
In this method, the alcohol quickly vaporizes during drying, forms fine bubbles, and separates from the surface of the N-alkoxymethyl nylon, thereby firmly adhering the N-alkoxymethyl nylon to the nylon fibers. The surface of N-alkoxymethyl nylon becomes finely uneven due to vaporization and dissipation of alcohol, so there is no need for chemical etching with a mixture of dichromic acid and sulfuric acid, and a metal plating layer is formed by direct electroless plating. It becomes possible to do so.

しかし、この方法は、N−アルコキシメチルナイロンの
溶媒としてアルコールを使わなければならず、その上ア
ルコールの沸点以上に急激に加熱気化させる工程を必要
とするので、火災の危険性及び有機溶剤による環境汚染
等の欠点を有している。
However, this method requires the use of alcohol as a solvent for N-alkoxymethyl nylon, and also requires a step of rapidly heating and vaporizing it above the boiling point of the alcohol, which poses a risk of fire and an environmentally friendly environment due to organic solvents. It has drawbacks such as pollution.

更にまた、特公昭63−35751号公報によれば、繊
維基布の少なくとも1表面を低温プラズマで処理後、処
理した表面にイオンブレーティングを施こして、繊維基
布の表面に金属皮膜を形成させる方法が開示されており
、そしてそこには該低温プラズマ処理は、0.01”l
 OTo r rの極めて低圧下で、プラズマ重合性を
有しないガス、例えばヘリウム、ネオン、アルゴン、窒
素、酸素等を使い、高電圧によりこれらガスを解離、イ
オン化させて該繊維基布表面をスパッタリング効果によ
って凹凸を形成され、且つ繊維表面がプラズマの高エネ
ルギーで改質され、金属との親和性が向上してイオンブ
レーティングにより密着した金属膜が形成されると記載
されている。しかし、上記低温プラズマ処理装置は高価
であり、また高電圧により解離イオン化した原子は直進
性のため、表面にのみバッタリング効果を発揮し、裏面
又は繊維の重なりにより陰になった個所等は殆んど処理
効果が認められない。従って、繊維基布の表裏に低温プ
ラズマ処理を施すには、表と裏を別個に処理する必要が
ある、即ち、同じ繊維基布を表と裏刷々に同じ工程を通
して処理しなければならないという経済的に不利な点が
ある。また、繊維基布のように連続した大面積のものに
、解離、イオン化した原子のスパッタリング効果を均一
に付与することは極めて困難であるという欠点がある。
Furthermore, according to Japanese Patent Publication No. 63-35751, at least one surface of a fiber base fabric is treated with low-temperature plasma, and then ion blasting is applied to the treated surface to form a metal film on the surface of the fiber base fabric. A method is disclosed in which the low temperature plasma treatment is carried out at 0.01"l
Under the extremely low pressure of OTorr, using a gas that does not have plasma polymerizability, such as helium, neon, argon, nitrogen, oxygen, etc., these gases are dissociated and ionized by high voltage to create a sputtering effect on the surface of the fiber base fabric. It is described that the fiber surface is modified by the high energy of plasma, and its affinity with metal is improved, and a metal film that adheres tightly is formed by ion blasting. However, the above-mentioned low-temperature plasma processing equipment is expensive, and since the atoms dissociated and ionized by high voltage travel in a straight line, the battering effect is only exerted on the surface, and the back surface or areas shaded by overlapping fibers are hardly affected. No treatment effect was observed. Therefore, in order to perform low-temperature plasma treatment on the front and back sides of a fiber base fabric, it is necessary to treat the front and back sides separately, that is, the same fiber base fabric must be treated through the same process on the front and back sides. There are economic disadvantages. Another disadvantage is that it is extremely difficult to uniformly apply the sputtering effect of dissociated and ionized atoms to a large continuous area such as a fiber base fabric.

本発明の主たる目的は、合成樹脂製構造物の無電解メッ
キにおける前記の如き欠点を解消すべく、無電解メッキ
すべき合成樹脂製構造物表面を開渠で且つ穏和な条件下
に活性化し、それによって合成樹脂製構造物の物理的強
度の低下や損傷などを生ぜしめることなく均一で且つ堅
固に密着した金属被膜を形成せしめる方法を提供するこ
とである。
The main purpose of the present invention is to activate the surface of a synthetic resin structure to be electrolessly plated under open and mild conditions, in order to eliminate the above-mentioned drawbacks in electroless plating of synthetic resin structures. It is an object of the present invention to provide a method for forming a uniform and firmly adherent metal coating without causing a decrease in physical strength or damage to a synthetic resin structure.

かくして、本発明によれば、合成樹脂製構造物表面に無
電解メッキ法により金属被膜を形成する方法において、
無電解メッキに先立ち、該合成樹脂製構造物の金属被膜
を形成すべき表面に、過酸化物の分解を触媒する金属を
含有する化合物を付着せしめた後、上記構造物の該表面
を無機過酸化物と接触させることを特徴とする合成樹脂
製構造物表面の金属被覆方法が提供される。
Thus, according to the present invention, in the method of forming a metal film on the surface of a synthetic resin structure by electroless plating,
Prior to electroless plating, a compound containing a metal that catalyzes the decomposition of peroxide is adhered to the surface of the synthetic resin structure on which the metal film is to be formed, and then the surface of the structure is coated with an inorganic filtrate. Provided is a method for coating a surface of a synthetic resin structure with metal, which method comprises bringing the surface of a synthetic resin structure into contact with an oxide.

本発明が処理の対象としている合成樹脂製構造物として
は、糸条(フィラメント、ファイバーヤーンなと)、綿
状物、トウ、織物、編物、不織布などの繊維構造物をは
じめ、棒状、板又はフィルム状などが包含される。かか
る構造物の材質は特に制限がなく、例えば、ポリアミド
系、ポリオレフィン系、ポリエステル系、塩化ビニル系
、塩化ビニリデン系、ポリアクリル系、ポリカーボネー
ト系、ABS等の各種の合成樹脂で構成されていること
ができる。
Synthetic resin structures to be treated by the present invention include fiber structures such as filaments, fiber yarns, cotton-like materials, tows, woven fabrics, knitted fabrics, and non-woven fabrics, as well as rod-shaped, plate-like, and This includes film forms. The material of such a structure is not particularly limited, and may be made of various synthetic resins such as polyamide, polyolefin, polyester, vinyl chloride, vinylidene chloride, polyacrylic, polycarbonate, and ABS. I can do it.

このような合成樹脂製構造物(以下、基材という)の表
面に無電解メッキを施すに際して、本発明の方法は、メ
ッキに先立ち、基のメッキを施すべき表面に、過厳化物
の分解反応を触媒する金属を含有する化合物(以下、便
宜上触媒化合物という)を付着せしめた後、基材の該表
面を無機過酸化物と接触させることにより、基材表面を
活性化する点に特徴点がある。
When applying electroless plating to the surface of such a synthetic resin structure (hereinafter referred to as the base material), the method of the present invention applies a decomposition reaction of harsh substances to the surface to be plated as a base prior to plating. The characteristic point is that the surface of the base material is activated by attaching a compound containing a metal that catalyzes (hereinafter referred to as a catalyst compound for convenience) and then bringing the surface of the base material into contact with an inorganic peroxide. be.

基材に対してかかる活性化処理を行なう場合、該処理に
先立ち、合成樹脂製基材の無電解メッキにおいて通常行
なわれている前処理、例えば脱脂、精練等の処理を適宜
行なうことができる。例えば、基材を適当な界面活性剤
を含む水溶液中に加温下に浸漬することにより脱脂、精
練処理することができる。
When carrying out such an activation treatment on a base material, prior to said treatment, pretreatments that are usually carried out in electroless plating of synthetic resin base materials, such as degreasing, scouring, etc., can be carried out as appropriate. For example, the base material can be degreased and refined by immersing it in an aqueous solution containing a suitable surfactant under heating.

このように適宜前地理した基材の表面には、本発明に従
い、先ず触媒化合物が付着せしめられる。
According to the present invention, a catalyst compound is first applied to the surface of the substrate thus suitably prepared.

触媒化合物としては、後述する無機過酸化物の分解反応
を促進する金属を含有するものが使用され、そのような
金属としては、例えば、銅、鉄、ニッケル、アルミニウ
ム、亜鉛、スズ等が挙げられ、これら金属を含有する化
合物の具体例には、例えば、該金属の硫酸塩(硫酸鋼、
硫酸第一鉄、硫酸第二鉄、硫酸ニッケル、硫酸アルミニ
ウムなど)、硝酸塩(硝酸銅、硝酸ニッケル、硝酸鉄、
硝酸アルミニウムなど)、塩化物(塩化第二鉄、塩化銅
、塩化アルミニウム、塩化ニッケルなど)が包含される
As the catalyst compound, one containing a metal that promotes the decomposition reaction of the inorganic peroxide, which will be described later, is used, and examples of such metals include copper, iron, nickel, aluminum, zinc, and tin. , Specific examples of compounds containing these metals include sulfates of the metals (sulfuric acid steel,
ferrous sulfate, ferric sulfate, nickel sulfate, aluminum sulfate, etc.), nitrates (copper nitrate, nickel nitrate, iron nitrate,
aluminum nitrate, etc.), chlorides (ferric chloride, copper chloride, aluminum chloride, nickel chloride, etc.).

これら触媒化合物の基材表面への付着は、該触媒化合物
を含む溶液に浸漬した後、乾燥することにより行なうこ
とができる。該溶液としては一般に水溶液が用いられる
が、触媒化合物及び/又は基材の種類によってはアルコ
ール、エチレングリコールなどの有機溶媒溶液又は水−
有機溶媒混合溶液を用いてもよく、さらに有機溶媒とし
て基材の合成樹脂を膨潤させる性質をもつものを用いる
こともできる。
These catalyst compounds can be attached to the surface of the substrate by immersing it in a solution containing the catalyst compound and then drying it. Generally, an aqueous solution is used as the solution, but depending on the type of the catalyst compound and/or the base material, an organic solvent solution such as alcohol or ethylene glycol or a water solution may be used.
An organic solvent mixed solution may be used, and an organic solvent having a property of swelling the synthetic resin of the base material may also be used.

上記溶液中における触媒化合物の濃度は特に制限されな
いが、一般には0.05〜l OOg/(1、好ましく
は0.1〜50 g/Qの範囲内が好都合である。
The concentration of the catalyst compound in the solution is not particularly limited, but is generally conveniently within the range of 0.05 to 1 OOg/(1, preferably 0.1 to 50 g/Q).

さらに、該溶液には必要jこ応じて、カチオン系、ノニ
オン系、両性等の界面活性剤を含有せしめることにより
、基材表面の濡れ性を向上させるようにしてもよい。
Furthermore, if necessary, the solution may contain a cationic, nonionic, or amphoteric surfactant to improve the wettability of the substrate surface.

触媒化合物を含有する溶液による処理時の温度は通常、
室温で十分であるが場合によっては約100℃までの加
熱下に処理を行なってもよく、また地理時間は大体20
〜180分間程度とすることができる。
The temperature during treatment with the solution containing the catalytic compound is usually
Room temperature is sufficient, but in some cases the treatment may be carried out under heating up to about 100°C, and the geological time is approximately 20°C.
It can be about 180 minutes.

触媒化合物を含有する溶液が付与された基材は常法によ
り溶媒を除去することにより、基材表面に触媒化合物を
付着析出せしめることができる。
By removing the solvent from the base material to which the solution containing the catalyst compound has been applied by a conventional method, the catalyst compound can be deposited on the surface of the base material.

本発明によれば、上記の触媒化合物の付着処理を行なう
前又は同時に、必要に応じて、基材表面を膨潤化処理す
ることにより、触媒化合物の付着量及び/又は付着力を
向上させることができる。
According to the present invention, the amount and/or adhesion force of the catalytic compound can be improved by subjecting the surface of the substrate to a swelling treatment, if necessary, before or at the same time as performing the above-mentioned catalytic compound adhesion treatment. can.

かかる膨潤化処理は、基材のメッキすべき表面を、基材
を構成する合成樹脂に対する溶剤(良溶媒)を含む液体
で処理する、例えば浸漬処理、噴霧処理、塗布処理等の
処理をすることにより行なうことができる。そのような
液体の具体例として、基材がポリアミド系樹脂である場
合にはギ酸水溶液が、ポリエステル系樹脂である場合に
はm−クレゾール又は0−クレゾールの10〜20%水
溶液が、そして塩化ビニル系又は塩化ビニリデン系樹脂
である場合にはテトラヒドロフラン水溶液がそれぞれ好
適なものとして例示することができる。
Such swelling treatment involves treating the surface of the base material to be plated with a liquid containing a solvent (good solvent) for the synthetic resin constituting the base material, such as dipping treatment, spraying treatment, coating treatment, etc. This can be done by Specific examples of such liquids include an aqueous solution of formic acid when the base material is a polyamide resin, a 10 to 20% aqueous solution of m-cresol or 0-cresol when the base material is a polyester resin, and vinyl chloride. or vinylidene chloride-based resin, an aqueous solution of tetrahydrofuran can be exemplified as a suitable example.

上記膨潤化処理は通常室温ないし約60℃の温度で行な
うのが適している。
The above swelling treatment is usually suitably carried out at a temperature of room temperature to about 60°C.

前記の如く触媒化合物を付着せしめた基材は、次いで無
機過酸化物と接触せしめる。無機過酸化物としては、例
えば過酸化水素、過硫酸カリウム、過炭酸ナトリウム、
過硫酸アンモニウム、過ホウ酸ナトリウム、過炭酸ナト
リウム等が挙げられる。
The substrate, to which the catalyst compound has been deposited as described above, is then contacted with an inorganic peroxide. Examples of inorganic peroxides include hydrogen peroxide, potassium persulfate, sodium percarbonate,
Examples include ammonium persulfate, sodium perborate, and sodium percarbonate.

これらは通常水溶液の形で使用されるが、一般には、硫
酸のような酸又は苛性ソーダ、苛性カリなどのアルカリ
と併用するのが好適である。
These are usually used in the form of an aqueous solution, but it is generally preferable to use them in combination with an acid such as sulfuric acid or an alkali such as caustic soda or caustic potash.

水溶液中における無機過酸化物の濃度は厳密に制限され
るものではないが、一般には5〜60g/Q、好ましく
は10〜50 g/Qの範囲内とすることかできる。ま
た、硫酸を併用する場合、その濃度は通常5〜250g
/12、特に10〜200g/(tの範囲内とすること
ができ、また、アルカリを併用する場合には、その濃度
は一般に1〜200g/ff、好ましくは5〜150g
/Qの範囲内とすることができる。
Although the concentration of the inorganic peroxide in the aqueous solution is not strictly limited, it can generally be in the range of 5 to 60 g/Q, preferably 10 to 50 g/Q. In addition, when sulfuric acid is used together, the concentration is usually 5 to 250 g.
/12, especially within the range of 10 to 200 g/(t), and when an alkali is used in combination, the concentration is generally 1 to 200 g/ff, preferably 5 to 150 g/ff.
/Q.

触媒化合物を付屡せしめた基材と上記無機過酸化物との
接触は、例えば、無機過酸化物を上記の濃度で含有する
水溶液中に浸漬することにより行なうことができる。浸
漬時の温度は一般に室温ないし約6・0℃、好ましくは
室温ないし約55℃の温度とすることができ、浸漬時間
は温度に依存し約20〜約180分間が適当である。
The inorganic peroxide can be brought into contact with the base material loaded with the catalyst compound, for example, by immersing the base material in an aqueous solution containing the inorganic peroxide at the above concentration. The temperature during dipping can generally be from room temperature to about 6.0 DEG C., preferably from room temperature to about 55 DEG C., and the dipping time is suitably about 20 to about 180 minutes depending on the temperature.

これにより、基材表面に付着した触媒化合物が無機過酸
化物を激しく分解し、発生機の酸素を生成し、基材表面
を酸化分解して基材表面に極めて微細は凹凸を形成する
、所謂化学的エツチングが生じ、基材表面が無電解メッ
キに対して活性化される。その結果、本発明の方法に従
い活性化された基材は、化学メッキ触媒の吸着性が向上
し、無電解(化学)メッキにより均−性及び密着性に優
れた金属被膜を形成せしめることができる。
As a result, the catalytic compound attached to the substrate surface violently decomposes the inorganic peroxide and generates oxygen, which oxidizes and decomposes the substrate surface, forming extremely fine irregularities on the substrate surface. Chemical etching occurs and the substrate surface is activated for electroless plating. As a result, the substrate activated according to the method of the present invention has improved adsorption of chemical plating catalysts, and can form a metal coating with excellent uniformity and adhesion by electroless (chemical) plating. .

以上述べた如くして活性化された基材表面への無電解メ
ッキはそれ自体既知の方法、例えば、「表面処理技術総
覧」 (産業技術サービスセンター刊)等の文献に記載
の方法により行なうことができる。例えば、無電解銅メ
ッキはホルムアルデヒドなどの還元剤で溶液中の銅イオ
ンを該メッキ処理物の表面に金属として析出させること
により行なうことができる。無電解銅メッキ析出の主反
応はメッキ溶液中のCu”+の錯体を(Cu−キレート
剤)と表すと、次式で表される自己触媒反応である。
Electroless plating on the surface of the substrate activated as described above is performed by a method known per se, for example, a method described in documents such as "Surface Treatment Technology Overview" (published by Industrial Technology Service Center). I can do it. For example, electroless copper plating can be performed by using a reducing agent such as formaldehyde to deposit copper ions in a solution as metal on the surface of the plated object. The main reaction of electroless copper plating deposition is an autocatalytic reaction expressed by the following formula, when the complex of Cu''+ in the plating solution is expressed as (Cu-chelating agent).

[Cu−キレート] +2HCHO+40H−。[Cu-chelate] +2HCHO+40H-.

Cu’ +2HCOO−+H!↑+2H20+キレート
剤 また、無電解ニッケルメッキの還元剤としては、次亜リ
ン酸塩が最も一般的である。
Cu' +2HCOO-+H! ↑+2H20+chelating agent Also, hypophosphite is the most common reducing agent for electroless nickel plating.

無電解ニッケルメッキの基礎反応式は次のとおりである
(酸性浴)。
The basic reaction formula for electroless nickel plating is as follows (acid bath).

N i’  +H*Po、−+2H” 次に実施例を掲げ、本発明の方法をさらに具体的に説明
する。
N i' +H*Po, -+2H'' Next, the method of the present invention will be explained in more detail with reference to Examples.

実施例1 ポリ塩化ビニリデンフィラメントメツシュ(糸径0.1
mm、60メツシュ/インチ)をノニオン界面活性剤(
ノイゲンWS−20;第−工業製薬)5g/(2水溶液
中で40°Cにて60分間脱脂、精練後水洗した。
Example 1 Polyvinylidene chloride filament mesh (thread diameter 0.1
mm, 60 mesh/inch) with a nonionic surfactant (
Neugen WS-20; Dai-Kogyo Seiyaku) 5g/(2) Degreased in an aqueous solution at 40°C for 60 minutes, and washed with water after scouring.

次いで、25%テトラヒドロフラン水溶液に25°Cで
60分間浸漬し、絞液、水洗後、塩化第二鉄15 gI
Q水溶液に25℃で30分間浸漬し乾燥した。
Next, it was immersed in a 25% tetrahydrofuran aqueous solution at 25°C for 60 minutes, squeezed out, and washed with water, followed by 15 gI of ferric chloride.
It was immersed in Q aqueous solution at 25° C. for 30 minutes and dried.

次に、硫酸80g/(2と過酸化水素(35%)15g
/12の混合物水溶液に45℃で180分間浸漬し、水
洗、乾燥後、次の条件下に無電解銅メッキを行った。
Next, 80g of sulfuric acid/(2) and 15g of hydrogen peroxide (35%)
/12 mixture aqueous solution at 45° C. for 180 minutes, washed with water, dried, and then subjected to electroless copper plating under the following conditions.

メッキ触媒として塩化パラジウムと塩化錫との混合液(
キャタリスt−0PC80;奥野製薬)5QmQ、と塩
酸160mff及び水790+m12の混合液を調製し
た。
A mixed solution of palladium chloride and tin chloride (
A mixed solution of Catalys t-0PC80 (Okuno Pharmaceutical) 5QmQ, 160 mff of hydrochloric acid, and 790 m12 of water was prepared.

前記鬼理したポリ塩化ビニリデンフィラメントメツシュ
を、この混合液に25℃で2分間浸漬後水洗し、次いで
活性化浴として硫酸50mffと水950wrQの混合
液に45℃、3分間浸漬して、塩化パラジウムを繊維に
固著させた。
The treated polyvinylidene chloride filament mesh was immersed in this mixed solution for 2 minutes at 25°C, then washed with water, and then immersed in a mixed solution of 50 mff of sulfuric acid and 950 wrQ of water as an activation bath for 3 minutes at 45°C to remove chloride. Palladium is fixed to the fiber.

その後、水洗して下記組成の無電解銅メッキ浴に28℃
で3分間浸漬し、均一な銅メッキ膜を形成せしめること
ができた。
After that, it was washed with water and placed in an electroless copper plating bath with the following composition at 28℃.
It was possible to form a uniform copper plating film by dipping for 3 minutes.

銅メッキ浴組成 硝酸銅           15g/(2炭酸水素ナ
トリウム     lO〃 酒石酸塩          30 〃水素化ナトリウ
ム      207 38%ホルマリン液     100mff/CpH:
11.5 形成した銅層は25%OWfで、表面電気抵抗は0.5
Ω/ c m以下であり、良好な金属皮膜であった。
Copper plating bath composition Copper nitrate 15g/(2sodium bicarbonate 1O) Tartrate 30 Sodium hydride 207 38% formalin solution 100mff/CpH:
11.5 The copper layer formed is 25% OWf and the surface electrical resistance is 0.5
It was Ω/cm or less and was a good metal film.

比較例1 実施例1で使ったと同じポリ塩化ビニリデンフィラメン
ト(糸径0.1mm、60メツシュ/インチ)を、ノニ
オン界面活性剤(ノイゲンws−20第−工業製薬製)
5g/ffの水溶液中で、40°Cにて60分間脱脂、
精練後、水洗し乾燥しtこ 。
Comparative Example 1 The same polyvinylidene chloride filament (thread diameter 0.1 mm, 60 mesh/inch) used in Example 1 was mixed with a nonionic surfactant (Neugen WS-20 manufactured by Kogyo Seiyaku Co., Ltd.).
Degreasing in 5g/ff aqueous solution at 40°C for 60 minutes,
After scouring, wash with water and dry.

次いで、25%テトラヒドロフラン水溶液に25°Cで
60分間浸漬し、絞液、水洗、乾燥した。
Next, it was immersed in a 25% aqueous tetrahydrofuran solution at 25°C for 60 minutes, squeezed, washed with water, and dried.

その後、硫酸80g/Qと過酸化水素(35%)15g
/+2の混合物水溶液に、45℃で180分間浸漬し、
水洗、乾燥後、実施例1と同じ条件下に無電解メッキ浴
に28℃で3分間浸漬し、鋼メッキ膜を形成せしめた。
After that, 80g/Q of sulfuric acid and 15g of hydrogen peroxide (35%)
/+2 mixture aqueous solution for 180 minutes at 45°C,
After washing with water and drying, it was immersed in an electroless plating bath at 28° C. for 3 minutes under the same conditions as in Example 1 to form a steel plating film.

形成した銅層は23%OWfで、表面電気抵抗は0.5
0/ c m以下であり、良好な金属皮膜であったが、
実施例1で得た金属皮膜の密着強さは、上記比較例1で
得た金属皮膜の密着強さに比べて、下記表−1に示すと
おり、はるかに大きかった。
The formed copper layer has a 23% OWf and a surface electrical resistance of 0.5
0/cm or less, and the metal film was good.
The adhesion strength of the metal film obtained in Example 1 was much greater than that of the metal film obtained in Comparative Example 1, as shown in Table 1 below.

く測定法〉 学識式摩擦試験: JIS L 0849荷重200g
で50回摩擦しt;。
Measuring method> Academic friction test: JIS L 0849 load 200g
Rub it 50 times.

セロハンデープ法:市販のセロハンテープを5〜7cm
にカットし、試験面に強く圧 着する。
Cellophane tape method: Use commercially available cellophane tape with a length of 5 to 7 cm.
Cut it and firmly press it to the test surface.

10分後、そのセロハンチープラー気 に剥離し、セロハンテープへの転写の 度合いを評価した。After 10 minutes, the cellophane cheap plastic Peel it off and transfer it to cellophane tape. The degree was evaluated.

表−1 実施例2 ポリ塩化ビニルフィラメントメツシュ(糸径0゜12m
m、50メツシュ/インチ)をノニオン界面活性剤(タ
イセリ凹成0フ;明成化学)5g/Qの水溶液中で50
℃にて60分間脱脂、精練後、水洗し乾燥した。
Table 1 Example 2 Polyvinyl chloride filament mesh (thread diameter 0°12m
m, 50 mesh/inch) in an aqueous solution of 5 g/Q of a nonionic surfactant (Tyseri concave layer; Meisei Chemical Co., Ltd.).
After degreasing and scouring at ℃ for 60 minutes, it was washed with water and dried.

次に20%アセトン水溶液に25℃で180分間浸漬し
、絞液、水洗後、硝酸鋼20g/Qの水溶液に30℃で
120分間浸漬し、乾燥した後、硫酸100g/I2と
過ホウ酸ソーダ20g/Qの混合物水溶液に25℃で1
80分間浸漬し、水洗、乾燥後、無電解銅メッキを行な
った。
Next, it was immersed in a 20% acetone aqueous solution at 25°C for 180 minutes, squeezed and washed with water, then immersed in an aqueous solution of 20g/Q nitric acid steel at 30°C for 120 minutes, dried, and then mixed with sulfuric acid 100g/I2 and sodium perborate. 1 at 25°C to a 20g/Q mixture aqueous solution.
After being immersed for 80 minutes, washed with water, and dried, electroless copper plating was performed.

無電解メッキ条件は実施例1と同様であり、その結果、
均一なメッキ膜が得られた。
The electroless plating conditions were the same as in Example 1, and as a result,
A uniform plating film was obtained.

メッキ銅膜の量は30%OWfで、表面電気抵抗は0.
3Ω/ c mであり、良好な導電性金属化繊維であっ
た。
The amount of plated copper film is 30% OWf, and the surface electrical resistance is 0.
3Ω/cm, indicating a good electrically conductive metallized fiber.

比較例2 実施例2と同様にして、精練、脱脂したポリ塩化ビニル
フィラメントメツシュ(糸径0.12mm150メツシ
ュ/インチ)を20%アセトン水溶液に25℃で3時間
浸漬し、絞液、水洗した。
Comparative Example 2 In the same manner as in Example 2, a polyvinyl chloride filament mesh (thread diameter 0.12 mm, 150 meshes/inch) that had been scoured and degreased was immersed in a 20% acetone aqueous solution at 25°C for 3 hours, squeezed, and washed with water. .

次に硫酸100g/<2と過はう酸ソーダ20g/aの
混合水溶液に25℃で180分間浸漬後、水洗、乾燥し
てから無電解銅メッキを行った。
Next, it was immersed in a mixed aqueous solution of 100 g/<2 sulfuric acid and 20 g/a of sodium perphosphate at 25° C. for 180 minutes, washed with water, dried, and electroless copper plating was performed.

無電解銅メッキ条件は実施例1と同様であり、その結果
、均一なメッキ膜が得られた。
The electroless copper plating conditions were the same as in Example 1, and as a result, a uniform plating film was obtained.

メッキ銅膜の量は28%OWfで、表面電気抵抗は0.
3Ω/ c mであり、良好な導電性金属化繊維であっ
たが、実施例2と比較例2のそれぞれの金属皮膜の密着
強さを前記学識式摩擦試験とセロハンテープ法で比較し
た結果は、下記表−2に示すとおりであり、実施例2の
ものの方が密着強力が大であった。
The amount of plated copper film is 28% OWf, and the surface electrical resistance is 0.
3 Ω/cm, indicating that the metalized fibers had good conductivity. However, the results of comparing the adhesion strength of the metal coatings of Example 2 and Comparative Example 2 using the academic friction test and the cellophane tape method were as follows. , as shown in Table 2 below, and the adhesive strength of Example 2 was greater.

表−2 実施例3 ポリニスエルフィラメントメツシュ(糸径00045m
m、135メツシュ/インチ)をノニオン界面活性剤(
タイセリ2酸0フi明成化学)3g/Qの水溶液中で5
0℃にて60分間脱脂、精練後、水洗し乾燥した。次い
で、硝酸ニッケル25g/Q水溶液に30℃で180分
間浸漬し乾燥した。
Table 2 Example 3 Polyester filament mesh (thread diameter 00045 m
m, 135 mesh/inch) with a nonionic surfactant (
5 in an aqueous solution of 3g/Q
After degreasing and scouring at 0°C for 60 minutes, it was washed with water and dried. Next, it was immersed in a 25 g/Q aqueous solution of nickel nitrate at 30° C. for 180 minutes and dried.

次に、苛性ソーダloOg/(1と過硫酸アンモニウム
50g/Qとの混合水溶液に40℃で120分間浸漬し
、水洗、乾燥後、無電解鋼ニッケルメッキを行った。
Next, it was immersed in a mixed aqueous solution of caustic soda loOg/(1 and ammonium persulfate 50 g/Q) at 40° C. for 120 minutes, washed with water, dried, and electroless steel nickel plated.

無電解ニッケルメッキ条件は次のとおりである。The electroless nickel plating conditions are as follows.

ニッケルメッキの浴組成 次亜リン酸ニッケル     28 g/Qホウ酸  
         12 /l硫酸アンモニウム   
    3 〃酢酸ナトリウム        5  
//pH:6.0 ニッケルメッキ浴に33℃で6分間浸漬した結果、均一
なニッケル膜が形成した。析出したニッケルメッキ量は
28%OWfで、表面電気抵抗は1.50/ c mで
あり、導電性の良好な金属化繊維であった。
Nickel plating bath composition Nickel hypophosphite 28 g/Q boric acid
12/l ammonium sulfate
3 Sodium acetate 5
//pH: 6.0 As a result of immersion in a nickel plating bath at 33° C. for 6 minutes, a uniform nickel film was formed. The amount of nickel plating deposited was 28% OWf, the surface electrical resistance was 1.50/cm, and the metallized fiber had good conductivity.

比較例3 実施例3と同様のポリニスエルフィラメントメツシュ(
糸径0.045mm5135メツシュ/インチ)を精練
後、絞液、水洗、乾燥しt;。次いで、苛性ソーダ10
0 g/Qと過硫酸アンモニウム50g/(!との混合
水溶液に40°Cで120分間浸漬し、水洗、乾燥後、
実施例3と同じ条件下に無電解ニッケルメッキを施した
Comparative Example 3 A polyester filament mesh similar to Example 3 (
After scouring 5135 meshes/inch with a thread diameter of 0.045 mm, it was squeezed, washed with water, and dried. Then, 10 ml of caustic soda
After soaking in a mixed aqueous solution of 0 g/Q and ammonium persulfate 50 g/(! at 40°C for 120 minutes, washing with water, and drying,
Electroless nickel plating was performed under the same conditions as in Example 3.

その結果、均一なニッケルメッキ膜が形成され、そのニ
ッケルメッキ膜は25%OWfで、電気抵抗は2.2Ω
/ c mであり、良好な導電性メツシュであったが、
ニッケルメッキ膜の密着強さを比較すると、下記表−3
に示すとおり、実施例−3のものの方が比較例3のもの
より優れていた。
As a result, a uniform nickel plating film was formed, and the nickel plating film had a 25% OWf and an electrical resistance of 2.2Ω.
/ cm, and it was a good conductive mesh, but
Comparing the adhesion strength of nickel plating films, Table 3 below shows
As shown in Figure 3, Example 3 was superior to Comparative Example 3.

表−3 実施例4 ポリアミド製マジックファスナーA面とB面(吉田工業
)をノニオン界面活性剤(WS−20i第−工業製薬)
3g/Qの水溶液中で50°Cにて6分間脱脂、精練後
、水洗し乾燥した。次いで、50%ギ酸水溶液に25°
Cで30分間浸漬し、水洗後、硫酸錫20 g/Q水溶
液に25°0で120分間浸漬し乾燥した。
Table 3 Example 4 Polyamide magic fastener A side and B side (Yoshida Kogyo) were treated with nonionic surfactant (WS-20i Dai-Kogyo Seiyaku)
After degreasing and scouring in a 3 g/Q aqueous solution at 50°C for 6 minutes, it was washed with water and dried. Then, 25° in 50% formic acid aqueous solution.
After washing with water, it was immersed in a 20 g/Q aqueous solution of tin sulfate at 25°0 for 120 minutes and dried.

次に、硫酸50 g/Qと過炭酸ソーダ20g/Qの混
合水溶液に45℃で180分間浸漬し、水洗、乾燥後、
実施例1と同じ条件下に無電解銅メッキを行った。その
結果、均一なメッキ膜が得られた。メッキ銅膜の量は2
5%OWfで、表面電気抵抗は0.50/ c mであ
り、導電性の良好なものであった。
Next, it was immersed in a mixed aqueous solution of 50 g/Q of sulfuric acid and 20 g/Q of sodium percarbonate at 45°C for 180 minutes, washed with water, and dried.
Electroless copper plating was performed under the same conditions as in Example 1. As a result, a uniform plating film was obtained. The amount of plated copper film is 2
At 5% OWf, the surface electrical resistance was 0.50/cm, indicating good conductivity.

比較例4 実施例4と同様のポリアミド製マジック7アスナー(書
出工業製)をノニオン界面活性剤(WS−20:第一工
業製薬)3g/I2の水溶液中で50℃にて60分間脱
脂、精練後、水洗し乾燥した。
Comparative Example 4 The same polyamide Magic 7 Asner (manufactured by Shoide Kogyo) as in Example 4 was degreased in an aqueous solution of 3 g/I2 of a nonionic surfactant (WS-20: Daiichi Kogyo Seiyaku) at 50°C for 60 minutes. After scouring, it was washed with water and dried.

次いで、50%ギ酸水溶液に25°Cで30分間浸漬し
、水洗後、硫酸50g/Qと過炭酸ソーダ20 g/(
lの混合水溶液に45℃、180分間浸漬し、水洗、乾
燥後、実施例1と同じ条件下に銅メッキを行った。その
結果、均一なメッキ膜が得られ、そのメッキ膜の量は2
8%OWfで、表面電気抵抗は0.5Ω/ c mであ
り、導電性の良好なものであったが、メッキしたA面と
B面とを繰り返し50回漕脱させた結果は、下記衣−4
に示すとおり、実施例4のものの方がはるかに優れてい
 tこ。
Next, it was immersed in a 50% formic acid aqueous solution at 25°C for 30 minutes, and after washing with water, 50 g/Q of sulfuric acid and 20 g/Q of sodium percarbonate were added.
The sample was immersed in a mixed aqueous solution of 1.1 at 45° C. for 180 minutes, washed with water, and dried, followed by copper plating under the same conditions as in Example 1. As a result, a uniform plating film was obtained, and the amount of the plating film was 2
At 8% OWf, the surface electrical resistance was 0.5 Ω/cm and the conductivity was good. However, after repeatedly removing the plated A side and B side 50 times, the results were as follows: 4
As shown in Figure 4, the product of Example 4 is far superior.

表−4Table-4

Claims (1)

【特許請求の範囲】 1、合成樹脂製構造物表面に無電解メッキ法により金属
被膜を形成する方法において、無電解メッキに先立ち、
該合成樹脂製構造物の金属被膜を形成すべき表面に、過
酸化物の分解を触媒する金属を含有する化合物を付着せ
しめた後、上記構造物の該表面を無機過酸化物と接触さ
せることを特徴とする合成樹脂製構造物表面の金属被覆
方法。 2、合成樹脂製構造物の金属被膜を形成すべき表面を、
該付着処理の前又は同時に、該合成樹脂に対する溶剤を
含む液体で処理する請求項1記載の方法。
[Claims] 1. In a method for forming a metal coating on the surface of a synthetic resin structure by electroless plating, prior to electroless plating,
A compound containing a metal that catalyzes the decomposition of peroxide is attached to the surface of the synthetic resin structure on which the metal coating is to be formed, and then the surface of the structure is brought into contact with an inorganic peroxide. A method for metal coating the surface of a synthetic resin structure, characterized by: 2. The surface of the synthetic resin structure on which the metal coating is to be formed,
2. The method according to claim 1, wherein the synthetic resin is treated with a liquid containing a solvent before or at the same time as the adhesion treatment.
JP9739689A 1989-04-19 1989-04-19 Method for coating surface of synthetic resin structure with metal Pending JPH02277779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9739689A JPH02277779A (en) 1989-04-19 1989-04-19 Method for coating surface of synthetic resin structure with metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9739689A JPH02277779A (en) 1989-04-19 1989-04-19 Method for coating surface of synthetic resin structure with metal

Publications (1)

Publication Number Publication Date
JPH02277779A true JPH02277779A (en) 1990-11-14

Family

ID=14191358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9739689A Pending JPH02277779A (en) 1989-04-19 1989-04-19 Method for coating surface of synthetic resin structure with metal

Country Status (1)

Country Link
JP (1) JPH02277779A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023019550A (en) * 2021-07-29 2023-02-09 奥野製薬工業株式会社 Etching treatment liquid, pretreatment method, and electroless plating method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418875A (en) * 1977-07-12 1979-02-13 Nippon Denki Kagaku Co Ltd Pretreatment for nonnelectrolytic copper plating on epoxyresin substrate
JPS5594939A (en) * 1979-01-11 1980-07-18 Nippon Denki Kagaku Kk Pretreatment for carrying out electroless copper plating of epoxy resin substrate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418875A (en) * 1977-07-12 1979-02-13 Nippon Denki Kagaku Co Ltd Pretreatment for nonnelectrolytic copper plating on epoxyresin substrate
JPS5594939A (en) * 1979-01-11 1980-07-18 Nippon Denki Kagaku Kk Pretreatment for carrying out electroless copper plating of epoxy resin substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023019550A (en) * 2021-07-29 2023-02-09 奥野製薬工業株式会社 Etching treatment liquid, pretreatment method, and electroless plating method

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