JPH0227794A - Drilling of multilayer wiring board - Google Patents
Drilling of multilayer wiring boardInfo
- Publication number
- JPH0227794A JPH0227794A JP17696388A JP17696388A JPH0227794A JP H0227794 A JPH0227794 A JP H0227794A JP 17696388 A JP17696388 A JP 17696388A JP 17696388 A JP17696388 A JP 17696388A JP H0227794 A JPH0227794 A JP H0227794A
- Authority
- JP
- Japan
- Prior art keywords
- drilling
- laminate
- multilayer wiring
- resin
- wiring board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
- H05K3/0047—Drilling of holes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は有機多層配線板において、t@縁膜層はさんで
上下に存在する導体配線を電気的に接続するために必要
なスルホール、ヴイアホール等の孔明は方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to through-holes and via-holes necessary for electrically connecting conductor wirings located above and below across the t@edge film layer in an organic multilayer wiring board. Confucius such as this is about method.
一般に多層配線板の製造に際して不可欠な孔明けは、数
枚の多層板を重ね、NCドリル等によって行われるが、
この際多層板は大気中に保持された状態である。Holes, which are essential for manufacturing multilayer wiring boards, are generally made by stacking several multilayer boards and using an NC drill, etc.
At this time, the multilayer board is kept in the atmosphere.
上記方法で孔明けする場合、ドリル刃の回転摩擦によっ
て発熱し積層板を構成する樹脂が軟化あるいは溶融して
、導体パターンの表面あるいは端面上に移動付着する、
いわゆるスミアの発生が避は難く、金属メツキを行なう
前にスミア除去が必要である。スミア除去は通常、濃硫
酸、クロム酸等を使用する湿式法、あるいはプラズマを
利用する乾式法があるが、いづれも煩雑であり又、かか
るスミア除去が不充分であると、孔を通じての導通が不
良となり最終製品の信頼性を損なう、そのため、スミア
を発生しない孔明は方法が望まれている。When drilling holes using the above method, the rotational friction of the drill blade generates heat, softens or melts the resin that makes up the laminate, and moves and adheres to the surface or end surface of the conductor pattern.
The occurrence of so-called smear is unavoidable, and it is necessary to remove the smear before metal plating. Smear removal usually involves a wet method using concentrated sulfuric acid, chromic acid, etc., or a dry method using plasma, but both methods are complicated, and if the smear removal is insufficient, conduction through the holes may be lost. This results in defects and impairs the reliability of the final product.Therefore, a method is desired that does not generate smear.
すなわち、本発明は、両面に金属箔を貼付した積層板に
NCドリル等で孔明けを行なう際、該積層板を液体中に
浸漬した状態で孔明けを行なうことを特徴とする多層配
線板の孔明は方法、でありとくに、積層板が樹脂積層板
である孔明は方法、を特徴とするものである。That is, the present invention provides a multilayer wiring board characterized in that when drilling holes in a laminate with metal foil pasted on both sides using an NC drill or the like, the laminate is immersed in a liquid. Komei is a method, and in particular, the Komei method is characterized in that the laminate is a resin laminate.
ここで使用する液体としては、樹脂の軟化温度より低い
沸点を有し、かつ、樹脂に対して不活性で、毒性の低い
ものが好ましく、具体的には水、各種の有機弗素化合物
が使用できる。The liquid used here preferably has a boiling point lower than the softening temperature of the resin, is inert to the resin, and has low toxicity. Specifically, water and various organic fluorine compounds can be used. .
また、場合によっては、適当な界面活性材をし0.01
〜lO%程度添加することも好ましい実施の態様である
。In some cases, a suitable surfactant may be used to
It is also a preferred embodiment to add about 10%.
勿論本発明が対象とする有機積層板は、例えばフェノー
ル樹脂、エポキシ樹脂、不飽和ポリエステル樹脂、ポリ
イミド樹脂などをガラスクロス、ケブラー繊維、紙、布
等に含浸せしめた機材を、所要枚数積層させプレス成形
してなる積層板である。Of course, the organic laminate to which the present invention is directed is made by laminating the required number of sheets of material in which glass cloth, Kevlar fiber, paper, cloth, etc. are impregnated with, for example, phenol resin, epoxy resin, unsaturated polyester resin, polyimide resin, etc. and then pressing them. It is a laminated board made by molding.
本発明においては、以上のごと(、積層板を孔明けする
際、液体中に浸漬することにより、孔の中に液体が侵入
し、ドリル刃の回転摩擦によって発生する熱を速やかに
除去し、樹脂が軟化、あるいは溶融するのを防止し、ス
ミアの発生を防止でき〔実施例〕
厚さ70μΦ銅箔を両面に貼付した厚さ0.3閣のガラ
スクロスエポキシ積層板5枚(G−10FRノ一プレツ
クスオーク社製)を厚さ0.05a++eのガラスクロ
スエポキシプリプレグ(CLGF04 センチユリ−
・ラミネーター社製)を−層あたり5枚を介して常法に
よりプレス成形して厚さ約3.2則の10層の積層板を
得た。In the present invention, as described above (when drilling a hole in a laminate plate, by immersing it in liquid, the liquid enters the hole and quickly removes the heat generated by the rotational friction of the drill blade, It prevents the resin from softening or melting and prevents the occurrence of smear. [Example] Five glass cloth epoxy laminates with a thickness of 0.3 cm (G-10FR) with 70 μΦ copper foil pasted on both sides. manufactured by Noichi Prex Oak Co., Ltd.) with a thickness of 0.05a++e (CLGF04 Centiuri).
A 10-layer laminate with a thickness of about 3.2 was obtained by press-molding 5 sheets per layer (manufactured by Laminator) by a conventional method.
図−■に示す如く、積層板■にベークライト類のあて板
■を施し、固定ビン■を有する金属容器■に固定した。As shown in Figure -■, a Bakelite plate (■) was applied to the laminated plate (■), and it was fixed in a metal container (■) having a fixing bottle (■).
これに0.3%の界面活性剤(エマール1〇ニードル
花王■製)を溶かした市水を、積N板表面が完全に浸漬
するように加えた0次いでドリルを用いて直径0.8鴫
、0.3mの孔を貫通させた。Add to this 0.3% surfactant (Emarl 10 Needle)
City water containing Kao (manufactured by Kao Corporation) was added to the plate so that the surface of the plate was completely immersed.Then, a hole with a diameter of 0.8 mm and 0.3 m was penetrated using a drill.
実施例と同じ積層板を用いて、水に浸漬させず、大気中
で孔を貫通させた。Using the same laminate as in the example, the holes were penetrated in the atmosphere without being immersed in water.
次いで実施例と比較例で得られた積N板の貫通孔部分を
それぞれ切断し、切断面のスミアの有無を観察した。観
察の結果、比較例においては0.8備径で20%、0.
3M径で50%に除去を必要とするスミアが発生した。Next, the through-hole portions of the N-laminated plates obtained in Examples and Comparative Examples were cut, and the presence or absence of smear on the cut surfaces was observed. As a result of observation, in the comparative example, the diameter was 20% with 0.8 diameter, and 0.8%.
Smears requiring removal were generated in 50% of cases with a 3M diameter.
実施例においては、いづれの孔径にも除去を必要とする
スミアの発生は皆無であった。In the examples, no smear requiring removal occurred for any pore size.
以上説明したように、本発明の方法は有機多層配線板製
造において不可欠な孔明は工程において問題となってい
るスミアの発生の防止に顕著な効果がある。As explained above, the method of the present invention is extremely effective in preventing the formation of smear, which is a problem in the process, since the pores are essential in the production of organic multilayer wiring boards.
図−1は本発明の実施の状況の一例を示す説明図である
。
図−1FIG. 1 is an explanatory diagram showing an example of the state of implementation of the present invention. Figure-1
Claims (2)
孔明けを行なう際、該積層板を液体中に浸漬した状態で
孔明けを行なうことを特徴とする多層配線板の孔明け方
法。(1) A method for drilling holes in a multilayer wiring board, characterized in that when drilling holes in a laminate with metal foil pasted on both sides using an NC drill, etc., the holes are drilled while the laminate is immersed in a liquid. .
方法。(2) The method for drilling holes according to claim 1, wherein the laminate is a resin laminate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17696388A JPH0227794A (en) | 1988-07-18 | 1988-07-18 | Drilling of multilayer wiring board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17696388A JPH0227794A (en) | 1988-07-18 | 1988-07-18 | Drilling of multilayer wiring board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0227794A true JPH0227794A (en) | 1990-01-30 |
Family
ID=16022775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17696388A Pending JPH0227794A (en) | 1988-07-18 | 1988-07-18 | Drilling of multilayer wiring board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0227794A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244398A (en) * | 2007-03-29 | 2008-10-09 | Nissan Motor Co Ltd | Cooling device |
| CN112291932A (en) * | 2020-09-28 | 2021-01-29 | 惠州中京电子科技有限公司 | Method for improving utilization rate of electric wood board for PCB drilling processing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962959A (en) * | 1972-10-23 | 1974-06-18 | ||
| JPS6254610A (en) * | 1985-08-30 | 1987-03-10 | Hitachi Condenser Co Ltd | Manufacture of multilayer printed circuit board |
-
1988
- 1988-07-18 JP JP17696388A patent/JPH0227794A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962959A (en) * | 1972-10-23 | 1974-06-18 | ||
| JPS6254610A (en) * | 1985-08-30 | 1987-03-10 | Hitachi Condenser Co Ltd | Manufacture of multilayer printed circuit board |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244398A (en) * | 2007-03-29 | 2008-10-09 | Nissan Motor Co Ltd | Cooling device |
| CN112291932A (en) * | 2020-09-28 | 2021-01-29 | 惠州中京电子科技有限公司 | Method for improving utilization rate of electric wood board for PCB drilling processing |
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