JPH022830U - - Google Patents
Info
- Publication number
- JPH022830U JPH022830U JP7907888U JP7907888U JPH022830U JP H022830 U JPH022830 U JP H022830U JP 7907888 U JP7907888 U JP 7907888U JP 7907888 U JP7907888 U JP 7907888U JP H022830 U JPH022830 U JP H022830U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- coating film
- top surface
- thermal conductivity
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例の要部を示す縦断面
図、第２図はＥＣＲプラズマプロセス装置におけ
る本考案の実施態様を示す断面図、第３図は本考
案と従来の試料台との比較実験による試料温度の
測定結果を示すグラフである。
１は試料台、２は塗膜、Ａは試料。
Fig. 1 is a longitudinal cross-sectional view showing the essential parts of an embodiment of the present invention, Fig. 2 is a cross-sectional view showing an embodiment of the present invention in an ECR plasma processing device, and Fig. 3 is a cross-sectional view of the present invention and a conventional sample stage. 3 is a graph showing the measurement results of sample temperature in a comparative experiment. 1 is the sample stage, 2 is the coating film, and A is the sample.
Claims (1)
伝導率の良好な中間材の塗膜を所要厚さ形成して
なる試料台を備えたことを特徴とする半導体素子
等の製造装置。 1. A manufacturing device for semiconductor devices, etc., characterized in that the device is equipped with a sample stage on the top surface of which a coating film of an intermediate material with good thermal conductivity is formed to a required thickness.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907888U JPH022830U (en) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907888U JPH022830U (en) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH022830U true JPH022830U (en) | 1990-01-10 |
Family
ID=31303966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7907888U Pending JPH022830U (en) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH022830U (en) |
-
1988
- 1988-06-15 JP JP7907888U patent/JPH022830U/ja active Pending