JPH0482852U

JPH0482852U -

Info

Publication number: JPH0482852U
Application number: JP1990125241U
Authority: JP
Priority date: 1990-11-29
Filing date: 1990-11-29
Publication date: 1992-07-20

Description

[Brief explanation of drawings]

第１図及び第２図は本考案の第１実施例を示す
もので、第１図はサンプルホルダーの正面図、第
２図は平面図、第３図及び第４図は第２実施例を
示し、第３図は正面図、第４図は右側面図、第５
図は第２実施例のホルダーに設けた押圧手段の部
分を示す図、第６図は同上押圧手段に用いられる
押え部材を示す図、第７図及び第８図は第３実施
例を示し、第７図は正面図、第８図は右側面図、
第９図は従来のサンプルホルダーを示す概念正面
図である。１，２０……サンプルホルダー、２……ウエー
ハ収納部、３，３０……基準面、Ｗ……ウエーハ
。 Figures 1 and 2 show the first embodiment of the present invention, with Figure 1 being a front view of the sample holder, Figure 2 being a plan view, and Figures 3 and 4 showing the second embodiment. Figure 3 is a front view, Figure 4 is a right side view, and Figure 5 is a front view.
The figure shows the pressing means provided on the holder of the second embodiment, FIG. 6 shows the pressing member used in the pressing means, and FIGS. 7 and 8 show the third embodiment. Figure 7 is a front view, Figure 8 is a right side view,
FIG. 9 is a conceptual front view showing a conventional sample holder. 1, 20... Sample holder, 2... Wafer storage section, 3, 30... Reference surface, W... Wafer.

Claims

[Scope of Claim for Utility Model Registration] (1) A sample holder used in a surface analysis device that positions a silicon wafer on predetermined XY coordinate axes and inspects particles on the surface of the wafer, which stores and holds the wafer. A silicon wafer sample holder comprising: a wafer storage section; and a reference surface provided in the wafer storage section and against which an orientation flat of a wafer comes into contact. (2) A sample holder used in a surface analysis device that positions a silicon wafer on predetermined XY coordinate axes and inspects particles on the surface of the wafer, the sample holder comprising: a wafer storage section that stores and holds the wafer; and the wafer. a reference surface provided in the storage section and against which an orientation flat of the wafer comes into contact; a reference surface provided in a direction perpendicular to the reference surface and against which the circumferential surface of the wafer comes into contact; A silicon wafer sample holder comprising: a pressing means for elastically biasing; and a silicon wafer sample holder.