JPH0228612Y2 - - Google Patents
Info
- Publication number
- JPH0228612Y2 JPH0228612Y2 JP8176183U JP8176183U JPH0228612Y2 JP H0228612 Y2 JPH0228612 Y2 JP H0228612Y2 JP 8176183 U JP8176183 U JP 8176183U JP 8176183 U JP8176183 U JP 8176183U JP H0228612 Y2 JPH0228612 Y2 JP H0228612Y2
- Authority
- JP
- Japan
- Prior art keywords
- case
- moving
- cassette
- link
- storage chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 20
- 230000003028 elevating effect Effects 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8176183U JPS59188664U (ja) | 1983-06-01 | 1983-06-01 | ウエハ用カセツトケ−スの装填装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8176183U JPS59188664U (ja) | 1983-06-01 | 1983-06-01 | ウエハ用カセツトケ−スの装填装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59188664U JPS59188664U (ja) | 1984-12-14 |
| JPH0228612Y2 true JPH0228612Y2 (he) | 1990-07-31 |
Family
ID=30211717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8176183U Granted JPS59188664U (ja) | 1983-06-01 | 1983-06-01 | ウエハ用カセツトケ−スの装填装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59188664U (he) |
-
1983
- 1983-06-01 JP JP8176183U patent/JPS59188664U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59188664U (ja) | 1984-12-14 |
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