JPH0228913B2 - - Google Patents

Info

Publication number
JPH0228913B2
JPH0228913B2 JP57137307A JP13730782A JPH0228913B2 JP H0228913 B2 JPH0228913 B2 JP H0228913B2 JP 57137307 A JP57137307 A JP 57137307A JP 13730782 A JP13730782 A JP 13730782A JP H0228913 B2 JPH0228913 B2 JP H0228913B2
Authority
JP
Japan
Prior art keywords
circuit
voltage
adjustment
adjusted
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57137307A
Other languages
Japanese (ja)
Other versions
JPS5928367A (en
Inventor
Kazuyoshi Myashita
Osamu Masui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57137307A priority Critical patent/JPS5928367A/en
Publication of JPS5928367A publication Critical patent/JPS5928367A/en
Publication of JPH0228913B2 publication Critical patent/JPH0228913B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current 
    • G05F1/46—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC
    • G05F1/56—Regulating voltage or current  wherein the variable actually regulated by the final control device is DC using semiconductor devices in series with the load as final control devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Continuous-Control Power Sources That Use Transistors (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Description

【発明の詳細な説明】 本発明は、集積回路等を被調整回路とする機能
トリミング装置において、その対象部分の電圧と
調整目標電圧との差を高精度で求め、その値に応
じて当該機能トリミングを正確に行うための調整
目標電圧設定方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides a function trimming device that uses an integrated circuit or the like as a circuit to be adjusted. The present invention relates to a method for setting an adjustment target voltage for accurate trimming.

一般に機能トリミング装置は、被調整回路の調
整対象部分の電圧を測定するとき、A/D変換器
またはそれを応用したデータ読出し可能な電圧計
(例えば、デイジタル電圧計)を使用している。
In general, a functional trimming device uses an A/D converter or a data-readable voltmeter (for example, a digital voltmeter) using an A/D converter to measure the voltage of a portion of a circuit to be adjusted.

しかしながら、それらの測定回路には、その非
直線性、ドリフトが存在するので、測定精度に限
界があり、調整精度の向上を妨げる原因となつて
いた。また、上記のような電圧計は、測定時間が
長く、調整効率の向上も困難であつた。
However, since these measurement circuits have nonlinearity and drift, there is a limit to measurement accuracy, which has been a cause of hindering improvement in adjustment accuracy. Furthermore, the above-mentioned voltmeter takes a long time to measure, and it is difficult to improve adjustment efficiency.

本発明の目的は、上記した従来技術の欠点をな
くし、被調整回路の対象部分の電圧と調整目標電
圧との差を高精度で求め、その値に応じて当該機
能トリミングを正確で効率的に行うことができる
調整目標電圧設定方法を提供することにある。
An object of the present invention is to eliminate the above-mentioned drawbacks of the conventional technology, obtain the difference between the voltage of the target part of the circuit to be adjusted and the adjustment target voltage with high precision, and accurately and efficiently perform trimming of the function according to that value. An object of the present invention is to provide a method for setting an adjusted target voltage that can be performed.

本発明に係る調整目標電圧設定方法の構成は、
被調整回路の対象部分の電圧を測定し、そのデイ
ジタル値と当該調整目標電圧のデイジタル値との
差に応じて所要調整量を算出し、その調整量に応
じて被調整回路の当該対象部分の回路定数を変化
させるように制御・処理をする機能を有する機能
トリミング装置において、調整目標電圧の設定を
被調整回路の各対象部分に対応して所望のデイジ
タル値で行いうるようにするとともに、そのビツ
ト数を上記対象部分の電圧測定結果のA/D変換
のビツト数よりも充分に多くするようにしたもの
である。
The configuration of the adjustment target voltage setting method according to the present invention is as follows:
Measure the voltage of the target part of the circuit to be adjusted, calculate the required adjustment amount according to the difference between the digital value and the digital value of the adjustment target voltage, and adjust the voltage of the target part of the circuit to be adjusted according to the adjustment amount. In a functional trimming device that has the function of controlling and processing to change circuit constants, the adjustment target voltage can be set at a desired digital value corresponding to each target part of the circuit to be adjusted, and the The number of bits is made sufficiently larger than the number of bits for A/D conversion of the voltage measurement result of the target portion.

これを要するに、目標調整電圧をデイジタル値
で設定しうるようにすることにより、そのプログ
ラマブル化を容易とするとともに、そのビツト数
を上記電圧測定結果のA/D変換のビツト数より
も充分に多くすることにより、上記A/D変換に
おける誤差、非直線性等を吸収して電圧測定の高
精度化を可能とするものである。
In short, by allowing the target adjustment voltage to be set as a digital value, programmability is facilitated, and the number of bits is sufficiently greater than the number of bits for A/D conversion of the voltage measurement result. By doing so, it is possible to absorb errors, nonlinearity, etc. in the A/D conversion, and to improve the accuracy of voltage measurement.

以下、本発明の実施例を図に基づいて説明す
る。
Embodiments of the present invention will be described below based on the drawings.

第1図は、本発明に係る調整目標電圧設定方法
の一実施例の方式構成図、第2図は、その処理フ
ローチヤートである。
FIG. 1 is a system configuration diagram of an embodiment of the adjustment target voltage setting method according to the present invention, and FIG. 2 is a processing flowchart thereof.

ここで、1は、処理装置、2は、調整駆動ユニ
ツト、3は、D/A変換回路(D/A)、4は、
増幅回路、5は、切換回路、6は、減衰回路、7
は、A/D変換回路(A/D)である。
Here, 1 is a processing device, 2 is an adjustment drive unit, 3 is a D/A conversion circuit (D/A), and 4 is
an amplifier circuit, 5 a switching circuit, 6 an attenuation circuit, 7
is an A/D conversion circuit (A/D).

最初に、上記各部の機能・動作を説明する。 First, the functions and operations of each of the above parts will be explained.

D/A変換回路3は、処理装置1からデイジタ
ルデータを受け、そのデータに従つて種々のアナ
ログ電圧を出力することができる。また、増幅回
路4は、D/A変換回路3の出力を増幅し、被調
整回路ICの調整目標電圧を発生する。
The D/A conversion circuit 3 can receive digital data from the processing device 1 and output various analog voltages according to the data. Furthermore, the amplifier circuit 4 amplifies the output of the D/A conversion circuit 3 and generates an adjustment target voltage for the circuit to be adjusted IC.

すなわち、D/A変換回路3、増幅回路4によ
り、処理装置1から出力するデイジタルデータに
応じて調整目標電圧に等しい任意の基準電圧が得
られるようにし、種々の被調整回路ICの調整目
標電圧に適用できるようにしたものである。
That is, the D/A conversion circuit 3 and the amplifier circuit 4 are configured to obtain an arbitrary reference voltage equal to the adjustment target voltage according to the digital data output from the processing device 1, and to adjust the adjustment target voltages of various adjusted circuit ICs. It is designed to be applicable to

ここで使用するD/A変換回路3、増幅回路4
は、それぞれ、測定回路に使用するA/D変換回
路7の精度よりも充分に高いものを選択して使用
する。例えば、A/D変換回路7に12ビツト精度
の回路を使用する場合、D/A変換回路3には16
ビツト精度の回路を用いるとともに、これに対応
して増幅回路4も誤差の小さい回路を使用する。
D/A conversion circuit 3 and amplifier circuit 4 used here
are selected and used, respectively, with accuracy sufficiently higher than the accuracy of the A/D conversion circuit 7 used in the measurement circuit. For example, when using a 12-bit precision circuit for the A/D conversion circuit 7, the D/A conversion circuit 3 has 16
In addition to using a bit-accurate circuit, the amplifier circuit 4 also uses a circuit with small errors.

次に、切換回路5は、処理装置1によつて制御
され、被調整回路ICの測定信号電圧と、D/A
変換回路3、増幅回路4によつて出力される基準
電圧とのいずれかを選択し、次段の減衰回路6に
入力する。
Next, the switching circuit 5 is controlled by the processing device 1, and the measurement signal voltage of the circuit to be adjusted IC and the D/A
Either one of the reference voltages output by the conversion circuit 3 and the amplifier circuit 4 is selected and inputted to the attenuation circuit 6 at the next stage.

減衰回路6は、入力された信号を、次段のA/
D変換回路7の入力許容電圧以内に減衰させ、
A/D変換回路7に入力する。
The attenuation circuit 6 transmits the input signal to the next stage A/
Attenuate it to within the allowable input voltage of the D conversion circuit 7,
The signal is input to the A/D conversion circuit 7.

A/D変換回路7は、処理装置1から変換開始
信号を受けると、アナログ入力信号電圧をデイジ
タル信号に変換して処理装置1に出力する。
Upon receiving the conversion start signal from the processing device 1 , the A/D conversion circuit 7 converts the analog input signal voltage into a digital signal and outputs the digital signal to the processing device 1 .

処理装置1は、例えば、マイクロコンピユー
タ、ミニコンピユータなどで構成することがで
き、D/A変換回路3、切換回路5、A/D変換
回路7を制御し、A/D変換回路7の出力データ
を取り込み、あらかじめ定められた処理プログラ
ムを実行し、調整駆動ユニツト2を制御する。そ
の動作は、後述する第2図の処理フローチヤート
に示すとおりである。
The processing device 1 can be composed of, for example, a microcomputer, a minicomputer, etc., and controls the D/A conversion circuit 3, the switching circuit 5, and the A/D conversion circuit 7, and outputs the output data of the A/D conversion circuit 7. and executes a predetermined processing program to control the adjustment drive unit 2. The operation is as shown in the processing flowchart of FIG. 2, which will be described later.

調整駆動ユニツト2は、例えば、レーザによる
トリミング装置であつて、処理装置1からトリミ
ング量を入力し、それに従つて被調整回路IC(例
えば、厚膜モジユール)の上に形成された厚膜抵
抗体、コンデンサ等をトリミングし、その回路定
数を変化させて当該関連電圧が調整目標電圧とな
るように調整する。被調整回路ICの調整対象部
品が可変の抵抗器、コンデンサ、コイルなどであ
れば、調整駆動ユニツト2は、それらの部品の定
数を変化させる治具(例えば、回転ドライバ)を
も備えたものである。
The adjustment drive unit 2 is, for example, a laser trimming device, which inputs a trimming amount from the processing device 1 and adjusts a thick film resistor formed on a circuit IC to be adjusted (for example, a thick film module) according to the trimming amount. , trimming the capacitor, etc., and changing the circuit constants so that the related voltage becomes the adjustment target voltage. If the components to be adjusted in the circuit IC to be adjusted are variable resistors, capacitors, coils, etc., the adjustment drive unit 2 is also equipped with a jig (for example, a rotary driver) for changing the constants of those components. be.

次に、全体の動作を第1図、第2図に基づいて
説明する。
Next, the overall operation will be explained based on FIGS. 1 and 2.

まず、処理装置1は、被調整回路ICの電圧測
定、対象部分のトリミングに先立ち、切替回路5
をD/A変換回路3、増幅回路4側にセツトした
後、被調整回路ICの対象部分の調整目標電圧S0
に対応するデイジタルデータC0をD/A変換回
路3へ送出する。
First, before measuring the voltage of the circuit IC to be adjusted and trimming the target portion, the processing device 1 performs the switching circuit 5
After setting the voltage on the D/A conversion circuit 3 and amplifier circuit 4 side, the adjustment target voltage S 0 of the target part of the circuit IC to be adjusted is set.
The digital data C0 corresponding to is sent to the D/A conversion circuit 3.

D/A変換回路3は、その出力C1を増幅率α
の増幅回路4へ入力し、増幅回路4は、その出力
α・C1を切換回路5に入力する。ここで、α・
C1=S0となるように、あらかじめ、上記デイジ
タルデータC0の値を実測等によつて決定してお
く。
The D/A conversion circuit 3 converts its output C 1 into an amplification factor α
The amplifier circuit 4 inputs its output α·C 1 to the switching circuit 5. Here, α・
The value of the digital data C 0 is determined in advance by actual measurement or the like so that C 1 =S 0 .

その出力α・C1=S0は、切替回路5を通して
減衰率1/β(β≧1)の減衰回路6に入力され、
その出力S0/βは、A/D変換回路7に入力され
る。
The output α・C 1 =S 0 is inputted through the switching circuit 5 to the attenuation circuit 6 with an attenuation rate of 1/β (β≧1),
The output S 0 /β is input to the A/D conversion circuit 7.

A/D変換回路7は、処理位置1からのA/D
変換スタート信号により、上記入力S0/βをA/
D変換したデイジタル値S1を処理装置1に読み取
らせる。
The A/D conversion circuit 7 converts the A/D from the processing position 1
The conversion start signal converts the above input S 0 /β to A/
The D-converted digital value S1 is read by the processing device 1.

処理装置1は、そのデータS1を一時記憶し、次
に切換回路5を被調整回路IC側へ切換え、その
測定信号電圧X0iを前述と同様の経路で取り込む。
The processing device 1 temporarily stores the data S1 , then switches the switching circuit 5 to the adjusted circuit IC side, and takes in the measurement signal voltage X0i through the same path as described above.

すなわち、その測定信号電圧X0iが減衰回路6
に入力され、その出力X0i/βがA/D変換回路
7に入力され、これをA/D変換した値Xiが処理
装置1に読み取られて記憶される。
That is, the measurement signal voltage X 0i is
The output X 0i /β is input to the A/D conversion circuit 7, and the value X i obtained by A/D converting this is read and stored in the processing device 1.

処理装置1は、ここで取り込んだデータXiと先
に一時記憶したデータS1との差(S1−Xi)を求
め、あらかじめ処理装置1に設定しておいた当該
対象部分の調整目標範囲の公差T1と上記差(S1
−Xi)との大小を比較する。
The processing device 1 calculates the difference (S 1 −X i ) between the data X i imported here and the data S 1 previously temporarily stored, and determines the adjustment target for the target portion that has been set in the processing device 1 in advance. Range tolerance T 1 and above difference (S 1
−X i ).

差(S1−Xi)が公差T1より大きいときは、更
に、その差の値〔(S1−Xi)−T1〕と、あらかじ
め処理装置1に設定しておいた調整定数Rとの積
(S1−Xi−T1)×R=Diを求め、その値Diを調整
量として調整駆動ユニツト2を制御し、被調整回
路ICの当該対象部分からの測定信号電圧X0iを調
整目標電圧S0に近付けるようにトリミングをせし
める。
When the difference (S 1 −X i ) is larger than the tolerance T 1 , the value of the difference [(S 1 −X i )−T 1 ] and the adjustment constant R set in advance in the processing device 1 are further calculated. The product (S 1 −X i −T 1 )×R=D i is calculated, and the adjustment drive unit 2 is controlled using the value D i as the adjustment amount, and the measurement signal voltage from the target part of the circuit IC to be adjusted is Trimming is performed so that X 0i approaches the adjustment target voltage S 0 .

ここで、調整定数Rは、調整駆動ユニツト2に
対応した定数で、例えば、レーザ式、サンドブラ
スト式のトリマであれば切断長など、また、スク
リユードライバ式のトリマであればボリユーム回
転角などである。
Here, the adjustment constant R is a constant corresponding to the adjustment drive unit 2, such as the cutting length for a laser type or sandblasting type trimmer, or the volume rotation angle for a screwdriver type trimmer. be.

以後、切換回路5をそのままの状態に保ちなが
ら、被調整回路ICの測定信号電圧X0iを再度同じ
経路で処理装置1に取り込み、前述と同様の処理
を行う。
Thereafter, while maintaining the switching circuit 5 as it is, the measurement signal voltage X 0i of the circuit to be adjusted IC is taken into the processing device 1 again through the same route, and the same processing as described above is performed.

このようにして、調整を複数回繰り返し、被調
整回路ICの対象部分の測定信号電圧X0iが調整目
標範囲S0±T0となるように調整する。公差T0、
T1間の関係は、T0/β=T1である。
In this way, the adjustment is repeated a plurality of times so that the measurement signal voltage X 0i of the target portion of the circuit IC to be adjusted falls within the adjustment target range S 0 ±T 0 . Tolerance T 0 ,
The relationship between T 1 is T 0 /β=T 1 .

ここで、調整量Diは、回路定数が調整目標範囲
に近付くに従つて減少するが、目標値近傍で公差
を逸脱しないように、あらかじめ実験等によつて
調整定数Rを求めておく。
Here, the adjustment amount D i decreases as the circuit constant approaches the adjustment target range, but the adjustment constant R is determined in advance through experiments or the like so as not to deviate from the tolerance near the target value.

このようにして調整を繰り返すことにより、目
標値との差が大きいときは大きな調整量で、目標
に近付くに従つて小さな調整量で調整を行い、高
精度で高速に目標電圧に調整しようとするもので
ある。
By repeating the adjustment in this way, when the difference from the target value is large, the adjustment amount is large, and as you get closer to the target, the adjustment amount is smaller, trying to adjust to the target voltage with high precision and high speed. It is something.

このように本実施例によれば、電圧を測定する
A/D変換回路7に非直線性、ドリフトによる誤
差があつても、精度の良い調整目標電圧を前もつ
て同一の測定系を通して処理装置1に記憶してお
き、被調整回路ICの特性測定時に誤差分を相殺
することにより、比較的精度の良くない測定系の
特性を救済して高い調整精度を得ることができ
る。
According to this embodiment, even if the A/D conversion circuit 7 that measures the voltage has errors due to nonlinearity or drift, the highly accurate adjustment target voltage can be passed through the same measurement system to the processing device in advance. 1 and offset the error when measuring the characteristics of the circuit IC to be adjusted, it is possible to salvage the relatively inaccurate characteristics of the measurement system and obtain high adjustment accuracy.

すなわち、被調整回路ICの測定系と上記精度
のの良い調整目標電圧の測定系がA/D変換回路
7を含めて同一であるため、該A/D変換回路7
の非直接性は両電圧の差を求める段階で相殺さ
れ、また一般に調整目標電圧設定後被調整回路
ICの測定までの時間は周囲の温度変化等に起因
する上記ドリフトより十分短いため該ドリフトも
相殺される。
That is, since the measurement system of the circuit to be adjusted IC and the measurement system of the highly accurate adjustment target voltage are the same including the A/D conversion circuit 7, the A/D conversion circuit 7
The indirectness of
Since the time until IC measurement is sufficiently shorter than the above-mentioned drift caused by changes in ambient temperature, etc., this drift is also canceled out.

以上、詳細に説明したように、本発明によれ
ば、被調整回路の調整を一般の電圧測定回路を用
いて高精度で高速に行うことができるので、この
種の機能トリミング装置または同調整工程の信頼
性向上、効率向上、経済化に顕著な効果が得られ
る。
As described above in detail, according to the present invention, the adjustment of the circuit to be adjusted can be performed with high precision and at high speed using a general voltage measuring circuit. Significant effects can be obtained in improving reliability, efficiency, and economy.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明に係る調整目標電圧設定方法
の一実施例の方式構成図、第2図は、その処理フ
ローチヤートである。 1……処理装置、2……調整駆動ユニツト、3
……D/A変換回路、4……増幅回路、5……切
替回路、6……減衰回路、7……A/D変換回
路。
FIG. 1 is a system configuration diagram of an embodiment of the adjustment target voltage setting method according to the present invention, and FIG. 2 is a processing flowchart thereof. 1...processing device, 2...adjustment drive unit, 3
...D/A conversion circuit, 4...Amplification circuit, 5...Switching circuit, 6...Attenuation circuit, 7...A/D conversion circuit.

Claims (1)

【特許請求の範囲】[Claims] 1 被調整回路の対象部分の電圧を測定し、その
デイジタル値と当該調整目標電圧のデイジタル値
との差に応じて所要調整量を算出し、その調整量
に応じて被調整回路の当該対象部分の回路定数を
変化させるように制御・処理をする機能を有する
機能トリミング装置において、被調整回路の各対
象部分の測定電圧をデジタル値で得る測定系と同
一の測定系を経由して、上記各対象部分に対応す
る所望の調整目標電圧の設定をデイジタル値で行
い、上記各対象部分の電圧測定のA/D変換精度
より高精度の調整目標電圧を設定するため、上記
所望の調整目標電圧のデジタル値のビツト数を上
記A/D変換のビツト数よりも多くすることを特
徴とする調整目標電圧設定方法。
1. Measure the voltage of the target part of the circuit to be adjusted, calculate the required adjustment amount according to the difference between the digital value and the digital value of the adjustment target voltage, and adjust the voltage of the target part of the circuit to be adjusted according to the adjustment amount. In a functional trimming device that has the function of controlling and processing so as to change the circuit constants of the circuit, each of the above-mentioned values is The desired adjustment target voltage corresponding to the target part is set using a digital value, and in order to set the adjustment target voltage with higher accuracy than the A/D conversion accuracy of the voltage measurement of each target part, the desired adjustment target voltage is set as a digital value. An adjustment target voltage setting method characterized in that the number of bits of the digital value is greater than the number of bits of the A/D conversion.
JP57137307A 1982-08-09 1982-08-09 System of setting adjustment target voltage Granted JPS5928367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57137307A JPS5928367A (en) 1982-08-09 1982-08-09 System of setting adjustment target voltage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57137307A JPS5928367A (en) 1982-08-09 1982-08-09 System of setting adjustment target voltage

Publications (2)

Publication Number Publication Date
JPS5928367A JPS5928367A (en) 1984-02-15
JPH0228913B2 true JPH0228913B2 (en) 1990-06-27

Family

ID=15195619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57137307A Granted JPS5928367A (en) 1982-08-09 1982-08-09 System of setting adjustment target voltage

Country Status (1)

Country Link
JP (1) JPS5928367A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210057529A (en) * 2019-11-12 2021-05-21 현대위아 주식회사 Measureing and correcting method and system for spindle thermal displacement of machining center

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2815601B2 (en) * 1989-02-16 1998-10-27 富士通株式会社 Reference voltage generation circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210057529A (en) * 2019-11-12 2021-05-21 현대위아 주식회사 Measureing and correcting method and system for spindle thermal displacement of machining center

Also Published As

Publication number Publication date
JPS5928367A (en) 1984-02-15

Similar Documents

Publication Publication Date Title
US4739197A (en) Process and arrangement for regulating the keying ratio of at least one electrical signal
US4545248A (en) Ultrasonic thickness gauge
JPS5825209B2 (en) automatic correction system
JPS5928367A (en) System of setting adjustment target voltage
US4918584A (en) Self-adjusting servo device and method
JPH11118617A (en) air conditioner
US3689754A (en) Function generator
US4484177A (en) Analog-to-digital converter apparatus for condition responsive transducer
KR0160997B1 (en) Compensation method for servo-worm up drift in robot position control system
US4634985A (en) Time-interval signal generating apparatus
US3949393A (en) Analog sweep calibrator
RU2018899C1 (en) Digital tracking system
JPH0550841B2 (en)
JP3205603B2 (en) Mass calibration method for magnetic field type mass spectrometer
JPS59188158A (en) Function trimming system
SU442467A1 (en) Precision stabilizer
JPS63121320A (en) Da converter with error correcting circuit
JPH0565805B2 (en)
JPH02211085A (en) Automatic zero adjuster for speed command
JPS60146143A (en) hygrometer
JPS6150756A (en) Positioning control device
KR820000860B1 (en) Automatic correction device
JPH0653830A (en) Non-linear sensor connection circuit automatic calibration method
SU974335A1 (en) Relay automatic adjusting system
SU533879A1 (en) Phasometric device