JPH023074U - - Google Patents

Info

Publication number
JPH023074U
JPH023074U JP7999888U JP7999888U JPH023074U JP H023074 U JPH023074 U JP H023074U JP 7999888 U JP7999888 U JP 7999888U JP 7999888 U JP7999888 U JP 7999888U JP H023074 U JPH023074 U JP H023074U
Authority
JP
Japan
Prior art keywords
cryopump
refrigerator
liquid nitrogen
stage
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7999888U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7999888U priority Critical patent/JPH023074U/ja
Publication of JPH023074U publication Critical patent/JPH023074U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案のクライオポンプ急冷システム
を取付けた構成図、第２図は従来例を示す構成図
である。 １……冷凍機、２……冷凍機第１ステージ、３
……冷凍機第２ステージ、４……真空容器、５…
…温度計、６……コンプレツサ、７……荒引きバ
ルブ、８……荒引き用真空ポンプ、９……金属管
、１０……判断・処理・制御部、１１……ベツセ
ル、１２……液体窒素、１３……真空計、１４…
…高圧空気管、１５……高圧空気導入バルブ、１
６……液体窒素導入バルブ、１７……液体窒素大
気開放バルブ、１８……真空引きバルブ。 FIG. 1 is a block diagram showing a cryopump quenching system of the present invention installed, and FIG. 2 is a block diagram showing a conventional example. 1... Refrigerator, 2... Refrigerator first stage, 3
... Refrigerator second stage, 4... Vacuum container, 5...
...Thermometer, 6...Compressor, 7...Roughing valve, 8...Vacuum pump for roughing, 9...Metal tube, 10...Judgment/processing/control unit, 11...Betsu cell, 12...Liquid Nitrogen, 13... Vacuum gauge, 14...
...High pressure air pipe, 15...High pressure air introduction valve, 1
6...Liquid nitrogen introduction valve, 17...Liquid nitrogen atmosphere release valve, 18...Evacuation valve.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオポンプの冷凍機に連なる冷凍機第１ス
テージを液体窒素により急速冷却を行う急冷機構
を装備したことを特徴とするクライオポンプ。 A cryopump characterized by being equipped with a rapid cooling mechanism that rapidly cools the first stage of the cryopump connected to the cryopump's refrigerator using liquid nitrogen.
JP7999888U 1988-06-16 1988-06-16 Pending JPH023074U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7999888U JPH023074U (en) 1988-06-16 1988-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7999888U JPH023074U (en) 1988-06-16 1988-06-16

Publications (1)

Publication Number Publication Date
JPH023074U true JPH023074U (en) 1990-01-10

Family

ID=31304845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7999888U Pending JPH023074U (en) 1988-06-16 1988-06-16

Country Status (1)

Country Link
JP (1) JPH023074U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911138U (en) * 1972-05-09 1974-01-30
JPS59195227U (en) * 1983-06-13 1984-12-25 篠塚　賢二 shaft joint

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911138U (en) * 1972-05-09 1974-01-30
JPS59195227U (en) * 1983-06-13 1984-12-25 篠塚　賢二 shaft joint

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