JPS6237154U - - Google Patents
Info
- Publication number
- JPS6237154U JPS6237154U JP12876285U JP12876285U JPS6237154U JP S6237154 U JPS6237154 U JP S6237154U JP 12876285 U JP12876285 U JP 12876285U JP 12876285 U JP12876285 U JP 12876285U JP S6237154 U JPS6237154 U JP S6237154U
- Authority
- JP
- Japan
- Prior art keywords
- main
- valve
- evacuated
- exhaust
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案の一実施例の構成図、第２図は
他の実施例を説明するための構成図、第３図は従
来例を説明するための構成図である。
１：被排気室、２：主排気管、３，２０：水冷
バツフル、４，２１：油拡散ポンプ、５：冷却ト
ラツプ、６：第１主弁、７：油回転ポンプ、８：
排気管、９，１０：バルブ、１１，１２：リーク
バルブ、１３：第２主弁、１４：バイパス管、１
５：バイパス弁、１６：真空計、１７：バルブ駆
動回路、１８：排気管、１９：調整弁。
FIG. 1 is a block diagram of one embodiment of the present invention, FIG. 2 is a block diagram for explaining another embodiment, and FIG. 3 is a block diagram for explaining a conventional example. 1: Exhaust chamber, 2: Main exhaust pipe, 3, 20: Water cooling buffer, 4, 21: Oil diffusion pump, 5: Cooling trap, 6: First main valve, 7: Oil rotary pump, 8:
Exhaust pipe, 9, 10: Valve, 11, 12: Leak valve, 13: Second main valve, 14: Bypass pipe, 1
5: Bypass valve, 16: Vacuum gauge, 17: Valve drive circuit, 18: Exhaust pipe, 19: Adjustment valve.
Claims (1)
引き用真空ポンプで排気され、該主排気管には冷
却トラツプが内蔵されており、該主排気管の該被
排気室と該冷却トラツプとの間に第１主弁が備え
られた裂置において、前記主排気管の冷却トラツ
プと本引き用真空ポンプとの間に設けられた第２
主弁と、前記被排気室と本引き用真空ポンプとを
接続するためのバイパス管と、該バイパス管に設
けられたバイパス弁と、前記冷却トラツプ近傍の
真空度を検出するための真空計と、該真空計より
の信号によつて第１主弁及びバイパス弁の開閉を
制御するバルブ駆動手段とを備え、該バルブ駆動
手段により該冷却トラツプ近傍の真空度が基準値
より低真空の場合にバイパス管を排気経路として
選択して前記被排気室を排気するように構成した
ことを特徴とする電子線装置の排気系。 The roughly evacuated exhaust chamber is evacuated by a main vacuum pump through a main exhaust pipe, and the main exhaust pipe has a built-in cooling trap, which connects the evacuated chamber of the main exhaust pipe to the cooling A second main valve is provided between the cooling trap of the main exhaust pipe and the main vacuum pump.
A main valve, a bypass pipe for connecting the evacuated chamber and the main vacuum pump, a bypass valve provided in the bypass pipe, and a vacuum gauge for detecting the degree of vacuum near the cooling trap. and valve driving means for controlling the opening and closing of the first main valve and the bypass valve in response to a signal from the vacuum gauge, and when the degree of vacuum near the cooling trap is lower than a reference value by the valve driving means. An exhaust system for an electron beam apparatus, characterized in that the exhaust chamber is configured to be evacuated by selecting a bypass pipe as an exhaust route.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12876285U JPS6237154U (en) | 1985-08-23 | 1985-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12876285U JPS6237154U (en) | 1985-08-23 | 1985-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237154U true JPS6237154U (en) | 1987-03-05 |
Family
ID=31024718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12876285U Pending JPS6237154U (en) | 1985-08-23 | 1985-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237154U (en) |
-
1985
- 1985-08-23 JP JP12876285U patent/JPS6237154U/ja active Pending
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