JPH02307A - Pattern forming equipment and its method - Google Patents

Abstract

PURPOSE:To facilitate the replacement of original image by driving and indicating the indication pattern of a transmission type liquid crystal display equipment by a control signal from outside. CONSTITUTION:Laser light 2 generated from a laser oscillator 1 is magnified by a concave lens 3, made parallel by a collimate lens 4, and projected on a transmission type liquid crystal display equipment 10. The laser light transmitted through the equipment 10 is converged and projected on the surface of a sample 7 through a projection lens 6. The lens 6 is so arranged that the image of the equipment 10 is subjected to contraction projection on the surface of a sample 7, and a reduced image of the equipment 10 is printed on the sample surface. A signal control unit 11 makes a storage device store an image signal obtained from a pickup tube 12, reads out the signal from the storage at the time of display mode, makes the equipment 10 indicate it, and controls the oscillator 1.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pattern forming apparatus and method for transferring and imprinting a pattern onto a sample using a transmission type liquid crystal display device.

[Conventional technology]

A conventional example of forming various patterns for printed circuit boards, wiring patterns for high-density modules, photomasks, etc. is shown in FIG. 4
The parallel light is made into parallel light and irradiated onto the original image 5. The laser beam that has passed through the original image 5 is condensed and irradiated onto the surface of the sample 7 via a projection lens 6. At this time, the projection lens 6 is arranged so that the image of the original image 5 is projected onto the surface of the sample 7 in a reduced size.
A reduced image of the original image 5 is instantly printed onto the sample surface.

[Problem to be solved by the invention]

In the conventional example described above, it is necessary to create an enlarged original image of the image that is desired to be processed on the sample surface, and then set it in the optical path, and whenever the image changes, the original image must be replaced.

The object of the present invention is to provide a pattern forming device and its pattern forming apparatus which can immediately replace the original image in the optical path with a new original image without replacing the original image, and project and irradiate this original image as a transmitted laser beam onto the sample surface at a timely manner to perform transfer engraving. The present invention provides a method.

[Means to solve the problem]

The gist of the present invention is to provide a transmissive liquid crystal display device that drives and displays an original image (display pattern) using an external control signal, a laser oscillator that irradiates laser light to the transmissive liquid crystal display device based on a control signal, and A projection lens for projecting and marking an original image displayed on a liquid crystal display device onto a sample; and a signal control means for controlling the timing of control signals input to the transmissive liquid crystal display device and the laser oscillator. This is a characteristic feature.

[Effect]

With the above configuration, a pattern corresponding to a desired original image can be clearly and accurately transferred and engraved onto the sample. Furthermore, a clear and accurate pattern can be imprinted onto the sample without damaging the transmissive liquid crystal display device.

〔Example〕

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. That is, FIG. 2 is a diagram showing an embodiment of the present invention. What is newly provided in FIG. 0 is a transmission type liquid crystal display device 10, a signal control section 11. Image tube 12. They are an imaging lens 14 and an original image 13. The transmissive liquid crystal display device 10 is controlled by a signal control section 11. The control at this time is to determine which image pattern to display on the transmissive liquid crystal display device,
and setting of its display time. Parallel laser light transmitted through the collimator lens 4 enters the display device 10 controlled by the signal control unit 11 .

The laser light incident on the display device 1O is output to the projection lens 6 side of the display device 10 via a position corresponding to the image pattern. This output laser light is transmitted to the projection lens 6
to form an image pattern on the sample surface.

As is well known in the art, the transmission type liquid crystal display device 10 has a polarizing plate (glass) with respect to the laser beam incident surface.
It has a structure in which the transparent electrode, the liquid crystal main body, the transparent electrode, and the glass are integrated. The two transparent electrodes are arranged so as to form a matrix with each other. The display position is set by the electrodes in this matrix configuration.

Selection control of the matrix electrodes is performed by the signal control section 11.

The display image pattern to the signal control unit 11 is the original image 13 captured by the image pickup tube 12 . The signal control unit 11 controls the image pickup tube 1
Temporarily store the video signal obtained from 2 in memory,
In the display mode, the data is read out from the memory and displayed on the display device IO. A specific configuration diagram of the signal control unit 11 is shown in FIG.
G and converts it into data that can be stored in the memory 112, for example, a binary signal.

This converted video signal is sent to the memory 112 via the write/read circuit ill, and the memory 112 is sent to the memory 112 according to the address.
2. The memory 112 may have a capacity for one display pattern, or may have a capacity for a plurality of display patterns.When displaying 0, the memory port 2 is set with the write/read circuit 111 in the read mode.
This signal converter 113 drives the two data read out from the memory 112 and reads out the data necessary for the signal converter 113.
The value signal is converted into signals necessary to drive the liquid crystal display device 10, that is, X and Y signals. These X and Y signals are sent to the display device 10 to perform necessary display. signal converter 110,
113, the read/write circuit 111 is controlled by the control circuit 114. The control by this control circuit 114 firstly specifies the mode and secondly specifies its timing. The control circuit 114 also controls the laser oscillator 1.

The motor television 15 is omitted.

Next, an explanation will be given based on a specific numerical example.The power density of the laser beam is selected to an extent that does not damage the liquid crystal.

For example, the beam diameter was set to about 300 m so as to be 10'W/aJ or less, and the laser output was 7 MW. The laser beam that passed through the transmission type liquid crystal display device 5 entered the projection lens 10 for projecting the image at a reduced size of about 1/100, and a planar image displayed on the liquid crystal was printed on the surface of the sample 7 with a size of 17100. The maximum power density on the sample surface at this time is approximately 10”W/a
Reached J. Sample 7 used a glass substrate with about 100 metal films deposited on it, and when irradiated with laser light,
The metal film was removed, and a liquid crystal pattern with a size of 1/loo could be imprinted instantly.

In the above embodiments, the type of display pattern can be set outside the optical path, making it possible to form extremely versatile patterns. Furthermore, since it is possible to enlarge or reduce the pattern, the data itself in the memory can be enlarged or reduced, increasing versatility.

Next, another embodiment will be described. In the above embodiment, the input information to the signal control section 11 is given from the image pickup tube 17, but there are other methods as shown in FIGS. 4 and 5.

In FIG. 4, a video signal recording section 16 is provided, and information from the video signal recording section 16 is provided as original image information. FIG. 5 shows a system in which a video signal is transmitted wirelessly, and the video signal is transmitted wirelessly from a video signal transmitter 18 to a video signal receiver 17, and is further inputted as original image information to a signal controller 1■. It's forcing me. However, in these two embodiments, the memory 112 is not necessarily required. According to the former embodiment, by storing pattern information in the video recording section, there is an advantage that a necessary pattern can be formed when necessary.

According to the latter embodiment, it is suitable for remote control when the part where the pattern is formed and the part where the pattern is supplied are separated.

[Effects of the Invention] As explained above, according to the present invention, the original picture can be handled as an electrical signal, the original picture can be easily replaced, and the display of the transmissive liquid crystal display device and the laser beam oscillation of the laser oscillator can be easily changed. Since the timing can be controlled, it is possible to imprint a clear and accurate pattern on the sample.

Further, according to the present invention, a clear and accurate pattern can be transferred and engraved onto a sample without damaging the transmissive liquid crystal display device.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a conventional example, FIG. 2 is a diagram showing an embodiment of the present invention, and FIGS. 3, 4, and 5 are diagrams showing other embodiments of the present invention. DESCRIPTION OF SYMBOLS 1... Laser oscillator, 7... Sample, 10... Transmissive liquid crystal display device, 11... Signal control part, 12... Image pickup tube.

Claims (1)

[Scope of Claims] 1. A transmissive liquid crystal display device that drives and displays an original image in response to an external control signal, a laser oscillator that irradiates laser light to the transmissive liquid crystal display device in accordance with a control signal, and the transmissive liquid crystal display device. The present invention is characterized by comprising a projection lens that projects and engraves the original image displayed on the device onto the sample, and a signal control means that controls the timing of control signals input to the transmissive liquid crystal display device and the laser oscillator. pattern forming device. 2. An input section that stores original image information; a transmissive liquid crystal display device that reads out the original image information stored in the input section according to a control signal and drives and displays the original image; a laser oscillator that irradiates the image, a projection lens that projects and engraves the original image displayed on the transmissive liquid crystal display device onto the sample, and controls the timing of control signals that are input to the transmissive liquid crystal display device and the laser oscillator. A pattern forming apparatus comprising a signal control means for controlling the pattern. 3. The pattern forming apparatus according to claim 2, wherein the input section includes receiving means for receiving an original image information signal. 4. The original image to be displayed on the transmissive liquid crystal display device is given from the outside by a control signal, and the laser beam from the laser oscillator is controlled by a control signal timed to the control signal at a power density of 10^4W/cm^2 or less. A pattern forming method characterized in that the original image displayed on the transmissive liquid crystal display device is projected onto the sample using a projection lens and is inscribed.