JPH0231123U - - Google Patents
Info
- Publication number
- JPH0231123U JPH0231123U JP10875788U JP10875788U JPH0231123U JP H0231123 U JPH0231123 U JP H0231123U JP 10875788 U JP10875788 U JP 10875788U JP 10875788 U JP10875788 U JP 10875788U JP H0231123 U JPH0231123 U JP H0231123U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- equipment
- wafer
- holder
- sandwich
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875788U JPH0231123U (2) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10875788U JPH0231123U (2) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231123U true JPH0231123U (2) | 1990-02-27 |
Family
ID=31344392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10875788U Pending JPH0231123U (2) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231123U (2) |
-
1988
- 1988-08-19 JP JP10875788U patent/JPH0231123U/ja active Pending
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