JPH0231127U - - Google Patents
Info
- Publication number
- JPH0231127U JPH0231127U JP1988109383U JP10938388U JPH0231127U JP H0231127 U JPH0231127 U JP H0231127U JP 1988109383 U JP1988109383 U JP 1988109383U JP 10938388 U JP10938388 U JP 10938388U JP H0231127 U JPH0231127 U JP H0231127U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- heater block
- gas supply
- semiconductor
- supply head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109383U JPH0231127U (cs) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988109383U JPH0231127U (cs) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231127U true JPH0231127U (cs) | 1990-02-27 |
Family
ID=31345579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988109383U Pending JPH0231127U (cs) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231127U (cs) |
-
1988
- 1988-08-19 JP JP1988109383U patent/JPH0231127U/ja active Pending
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