JPH0234169B2 - - Google Patents
Info
- Publication number
- JPH0234169B2 JPH0234169B2 JP59059904A JP5990484A JPH0234169B2 JP H0234169 B2 JPH0234169 B2 JP H0234169B2 JP 59059904 A JP59059904 A JP 59059904A JP 5990484 A JP5990484 A JP 5990484A JP H0234169 B2 JPH0234169 B2 JP H0234169B2
- Authority
- JP
- Japan
- Prior art keywords
- tungsten
- film
- polysilicon
- tungsten silicide
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59059904A JPS60201649A (ja) | 1984-03-27 | 1984-03-27 | 半導体装置及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59059904A JPS60201649A (ja) | 1984-03-27 | 1984-03-27 | 半導体装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201649A JPS60201649A (ja) | 1985-10-12 |
| JPH0234169B2 true JPH0234169B2 (fr) | 1990-08-01 |
Family
ID=13126573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59059904A Granted JPS60201649A (ja) | 1984-03-27 | 1984-03-27 | 半導体装置及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201649A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5084417A (en) * | 1989-01-06 | 1992-01-28 | International Business Machines Corporation | Method for selective deposition of refractory metals on silicon substrates and device formed thereby |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4227944A (en) * | 1979-06-11 | 1980-10-14 | General Electric Company | Methods of making composite conductive structures in integrated circuits |
| JPS58138053A (ja) * | 1982-02-12 | 1983-08-16 | Nec Corp | 半導体装置およびその製造方法 |
-
1984
- 1984-03-27 JP JP59059904A patent/JPS60201649A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60201649A (ja) | 1985-10-12 |
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