JPH0237692A - Manufacture of multicolor electroluminescence display device - Google Patents

Abstract

PURPOSE:To change a pattern into a pattern with a high density by attaching a thin layer of each activator which changes a parent material into an emitter of each color to the top of the parent material and laminating a thin layer of the parent material on the thin layer of the activator and heat-treating them to make each activator to be diffused at a stroke in the parent material layer. CONSTITUTION:A transparent electrode 2 and the first dielectric layer 3 are laminated in order on the surface of a glass substrate 1, and a first parent material thin layer M1 common to emitters of different colors is uniformly laid on the above lamination. The parent material thin layer M1 is activated by different activators A1-A3 so that they change into emitters X-Z which emit, for example, red, green, blue, etc., respectively, and, for example, zinc sulfide, etc., which has a composition of parent material common to these emitters is selected. And after activators, A1-A3, are attached like a thin layer on the parent material M1, a second parent thin layer M2 with the same quality as the parent material thin layer M1 is uniformly laid thereon, and the activators are made to be diffused into the parent material M1 and M2 by heating them with the substrate so that the parent material thin layer M1 and M2 are changed into emitters X-Z. Thus, the pattern can be easily changed into one with a high density.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a color display device for displaying electronically processed information in multiple colors.

(Prior Art) Cathode ray tubes are often used as color display devices for displaying information in multiple colors, but liquid crystal display elements and solid-state light-emitting elements are used to make devices thinner, especially for displaying information in multiple colors. Electroluminescent solid state display devices are preferred due to their volatility.

In order to make such an electroluminescent solid state display element multicolored, there is a method in which a device is constructed by sequentially stacking a plurality of types of light emitting elements on a flat substrate.2. It is more desirable to configure the device by arranging elements two-dimensionally on a flat substrate because of the possibility of insufficient brightness and defects.

As a method for manufacturing such a flat multicolor solid-state display device, a phosphor thin film deposited on a glass substrate using ITL photolithography is left only in desired areas, and all other parts are peeled off together with a resist film. A method is disclosed in which a plurality of types of phosphor thin films are created adjacently by repeating the removal method (Monthly Semiconductor World, 1987, (8), p. 156-157). Such a method is carried out according to the procedure shown in FIG. In the figure, 1 is a glass substrate, 2 is a transparent electrode, 3 is a dielectric layer, R is a resist layer, X is a first light emitter, Y is a second light emitter, and Z
is a third light emitter, 4 is a dielectric layer, and 5 is an electrode. That is, the transparent electrode 2 and the dielectric layer 3 are laminated in this order on the glass substrate 1, and then a resist R is applied, and the resist is removed at the portion where the first light emitter X is to be provided by photolithography (I). Next, the first luminescent material X is deposited on top of this (■)
, Regis) By peeling off the first light emitter X together with R, the first light emitter X is left only in the desired area (III).

Next, a resist R is applied to the entire surface, and the resist is removed from the area where the second light emitter Y is to be provided by photolithography in the same manner as above, and then the second light emitter Y is deposited on this. ), by peeling off the second light emitting body Y together with the resist R, the second light emitting body Y is left only in the desired area, and the first light emitting body Y is removed.
A plate body is obtained in which the light-emitting body X and the second light-emitting body Y are respectively disposed at desired positions (V).

Furthermore, the same operation as above is repeated for the third light emitter Z to obtain a plate in which all the predetermined light emitters are arranged at predetermined locations,
This is covered with a dielectric layer 4, and electrodes 5 corresponding to the respective light emitters are provided at respective positions according to a known method to produce a solid state display (Vl).

[Problem to be solved by the invention]

In the conventional method as described above, the phosphor layer on the resist layer is peeled off and removed along with the resist layer, leaving the phosphor layer deposited in the holes formed in the resist layer. It is necessary to precisely form the button shape of the layer, and it is also necessary to accurately control the deposition thickness of the luminescent layer. In such an element manufacturing method, there is a limit to the high density of the battens because it requires miniaturization of the battens and strict process control.

Therefore, in the present invention, there is no difficulty in process control, and a multi-colored electrolytic material that can easily achieve high density battens is developed.
It is an object of the present invention to provide an improved method of manufacturing a luminescent display device.

[Failure to solve the problem]

The manufacturing method of the multicolor electroluminescent display device of the present invention that can achieve the above-mentioned object is to form a uniform first base thin layer on the surface of a substrate provided with an electrode layer, and use the base as a first color luminescent material. a thin layer containing a first activator capable of converting the matrix into a second color emitter; a thin layer containing a second activator capable of converting the matrix into a second color emitter; and a thin layer containing a second activator capable of converting the matrix into a third color emitter. A thin layer containing a third activator capable of activating the base thin layer is sequentially deposited in different predetermined areas on the base thin layer, and a uniform second base thin layer is further laminated on that surface. Then, the whole is heat-treated to diffuse each of the activators into both the matrix thin layers, thereby forming an integrated multicolor luminescent layer.

Then, by providing electrode layers corresponding to the respective color light emitting regions on the thus formed multicolor light emitting layer, a multicolor electroluminescence display device is completed.

Hereinafter, the manufacturing method of the present invention will be explained in more detail with reference to FIG. Note that the symbols in the drawings are the same as those used in FIG. 2 for explaining the prior art, and are used for convenience.

In the present invention, the transparent electrode 2 and the first dielectric layer 3 are sequentially laminated on the surface of the glass substrate 1, as in the conventional case. a common first matrix layer MM of light emitters that emit light in different colors;
is uniformly deposited (al.
J M + are different activators A+, Az
, A3, respectively, for example, red,
It converts into luminescent materials X, Y, and Z that emit green, blue, etc., and a material having a common matrix composition among these luminescent materials, such as zinc sulfide, is selected. Such a matrix thin layer M
, preferably has a well-developed crystal structure in order to obtain good light-emitting characteristics, and is preferably formed into a film with a thickness of 0.3 to 1.0 pm by, for example, a vacuum evaporation method.

The base thin layer M and the activators A'+ and AzA3 to be deposited on the base thin layer M are respectively provided in different light emitting regions in the form of thin layers. Methods such as printing on top or vapor deposition can be used.

When particularly high precision is not required, it is preferable to use a conventional printing method, but when a fine pattern is required, a combination of printing or vapor deposition and photoetching can be used. However, the method of attaching the activator to each predetermined area is not particularly limited.

After the activators AI, A2, and A3 have been deposited in a thin layer in this way, a second thin matrix layer M2 is evenly provided thereon (C), but the second thin matrix layer M2 is It is preferably of the same quality as the first base thin layer M1 and formed by the same method.

The activators A+, A2, and A attached in a thin film in this way
Tdl is heated together with the substrate and diffused into the matrix thin layers M1 and M2, respectively, to convert the matrix thin layers M and M2 into luminescent bodies X, Y, and Z that emit light of different colors. Such thermal diffusion conditions are 400 to 800°C in vacuum and 5 to 50°C.
It can be about an hour. In this way, a monolithically fixed multicolor phosphor layer is obtained. On this surface, a second dielectric layer 4 is further deposited, and then a second electrode layer 5 corresponding to each color phosphor region is applied thereon. The electroluminescent display device of the present invention can be obtained by depositing the film on top of the film (e).

Note that although a double insulation type AC voltage application type multicolor electroluminescence display device has been described as an example, it is also possible to omit the dielectric layer or use a DC voltage application type as a conductive layer. can. Furthermore, the electrode may be formed of a transparent electrode material and then a multicolor luminescent layer may be stacked thereon. It is not particularly limited.

[Effects of the Invention] According to the method for producing a multicolor electroluminescent display device of the present invention, each of the additives that can convert the matrix into each color luminescent material is added on a thin layer of a matrix having a composition common to each color luminescent material. After depositing a thin layer of activator, a thin layer of base material is further laminated on top of the thin layer of activator, and this is heat-treated to diffuse each activator into the base layer at once, thereby creating an integrated multicolor luminescent material. Since layers are formed, the number of steps is reduced compared to conventional manufacturing methods, and in particular, the labor and waste of partially removing the light emitting body after forming it is eliminated. Conventionally, since the phosphor layer is formed on a photoresist, high-temperature conditions cannot be used, and the film formation conditions that determine the composition, crystal structure, etc. of the phosphor cannot be freely selected. There is no such restriction at all, and there is an advantage that arbitrary film forming conditions can be selected.

In addition, since the activator is thermally diffused while being sandwiched in the base layer, there is no wasteful volatilization of the activator and no contamination occurs, resulting in a luminescent material with excellent performance and a uniform composition. Another advantage is that the layers can be easily obtained.

Furthermore, the method for depositing the activator layer on the base layer can be appropriately selected from a method that satisfies both accuracy and economy, and in particular, a printing method can be used, which has the advantage of being mass-producible.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of the procedure for manufacturing a multicolor electroluminescent display device of the present invention, and FIG. 2 is an explanatory diagram of the procedure of a conventional method for manufacturing a multicolor solid state display device. ■... Substrate, 2... Transparent electrode, 3, 4... Dielectric layer, 5... Electrode, A1, A2, A3... Activator, M, , M2... Base thin Layer, R...Resist, X,
Y, Z... Luminous body.

Claims (3)

[Claims] (1) Forming a uniform first matrix thin layer on the substrate surface provided with the electrode layer, and converting the matrix into a first color luminescent material.
a thin layer comprising an activator capable of converting the host into a second color emitter; and a third activator capable of converting the host into a third color emitter. The thin layers containing the base thin layer are sequentially deposited in different predetermined areas on the base thin layer, and a second base thin layer is laminated uniformly on that surface, and then the whole is heat-treated. A method for manufacturing a multicolor electroluminescent display device, characterized in that each of the activators is diffused into both the matrix thin layers to form an integrated multicolor phosphor layer. (2) A transparent electrode layer and a first electrode layer are placed on a transparent glass plate as a substrate.
A second dielectric layer that at least covers the formed multicolored light emitting layer, and each color light emitting region on the surface of the second dielectric layer. 2. The method for manufacturing a multicolor electroluminescent display device according to claim 1, wherein the second electrode layer corresponding to the second electrode layer is sequentially laminated. (3) A method for producing a multicolor electroluminescent display device according to claim 1 or 2, wherein each of the thin layers containing the activator is adhered to the base thin layer by printing means.