JPH0238466U - - Google Patents
Info
- Publication number
- JPH0238466U JPH0238466U JP11452888U JP11452888U JPH0238466U JP H0238466 U JPH0238466 U JP H0238466U JP 11452888 U JP11452888 U JP 11452888U JP 11452888 U JP11452888 U JP 11452888U JP H0238466 U JPH0238466 U JP H0238466U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ring
- holder
- wafer holder
- transport mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11452888U JPH0238466U (2) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11452888U JPH0238466U (2) | 1988-08-31 | 1988-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238466U true JPH0238466U (2) | 1990-03-14 |
Family
ID=31355362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11452888U Pending JPH0238466U (2) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238466U (2) |
-
1988
- 1988-08-31 JP JP11452888U patent/JPH0238466U/ja active Pending
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