JPH0240400Y2 - - Google Patents

Description

[Detailed description of the invention] <Industrial application field> This invention relates to a container valve connection device to an ultra-high purity gas storage container. This technology prevents the gas from entering the tank and contaminating the ultra-high purity gas that is subsequently filled.

<Prior art> In recent years, as semiconductor integrated circuits have become more densely packed, hydrogen and other gases used in their manufacture are increasingly required to be of ultra-high purity (for example, currently 99.99999% or higher). . If even a small amount of dust is mixed into this ultra-high purity gas, contamination and a decrease in purity will occur rapidly, so even the smallest amount of dust must not be mixed into the gas.

Conventionally, as a structure for connecting a container valve to a gas storage container, a tapered female thread is cut in the valve mounting hole at the container mouth of the gas storage container, and a tapered male thread is cut in the leg of the container valve, and a tapered male thread is cut in the valve mounting hole at the container mouth. The legs of the container valve were fixed in an airtight manner by fitting with tapered screws (for example, Japanese Utility Model Application No. 59-75973).

<Problems to be solved by the invention> In the above conventional structure, when screwing the leg of the container valve into the valve mounting hole of the gas storage container, the screw fitting surface is rubs against each other under extremely high surface pressure, generating fine metal abrasion powder.
This fine powder is problematic in that it enters the gas storage container through the valve mounting hole and contaminates or reduces the purity of the ultra-high purity gas that is later filled.

Furthermore, if the metal wear particles flow out together with the gas and adhere to the valve seat of a container valve or pressure regulator, it may cause valve seat leakage.

The object of the present invention is to prevent metal wear particles from entering the gas storage container when the leg portion of the container valve is assembled into the valve mounting hole of the gas storage container.

<Means for Solving the Problems> In order to achieve the above object, the present invention provides a leg portion 6 of the container valve 5 as shown in FIGS. 1 to 3, for example.
The cap nut 8 is rotatably fitted to the outside, and the presser foot 10 is fitted in the upper half of the cap nut 8 to the mid-height portion 9 of the circumferential surface of the leg 6 so that it cannot be moved downwardly with the presser foot 10 protruding in the radial direction. The lower circumferential surface 6a of the leg 6 is inserted into the valve mounting hole 3 of the container mouth 2 so as not to rotate using the stopper means 16, and the gasket 21 is inserted between the lower surfaces 6b, 3b of the leg 6 and the valve mounting hole 3. interposed, screw the cap nut 8 onto the external thread 2a on the outer circumferential surface of the container opening 2, and press the leg 6 against the container opening 2 with the inner flange 22 at the top of the cap nut 8 via the presser foot 10. It is characterized by being fixed.

<Operation> In the present invention, the procedure for attaching the container valve 5 to the gas storage container 1 will be described below.

First, the gasket 21 is inserted into the valve mounting hole 3 of the container mouth 2, and then the leg portion 6 of the container valve 5 is secured to the rotation prevention means 1.
Insert it while locking it with step 6. The cap nut 8 is fitted onto the male thread 2a on the outer peripheral surface of the container mouth 2 and tightened. Then, the leg portion 6 is pushed into the valve mounting hole 3 via the presser foot 10, and is fixed in a sealed state with the gasket 21. This completes the installation of the container valve 5.

During this installation, the leg portion 6 is inserted into the valve installation hole 3 while being prevented from rotating by the rotation prevention means 16, so that a sliding portion with high surface pressure is not formed and metal wear particles are not generated.

On the other hand, rubbing parts with high surface pressure are created between the screw-fitting surfaces of the cap nut 8 and the container mouth 2, and between the abutment surfaces of the cap nut 8 and the presser foot 10, and metal wear particles are generated. . However, this fine powder is difficult to enter into the valve mounting hole 3, and is generated after the gasket 21 performs its sealing action. Therefore, the fine powder is completely prevented from entering the gas storage container 1.

<Example> Hereinafter, an example of this invention will be described with reference to the drawings.

(First example) 1 to 3 show a first embodiment.

In Figure 2, code 1 is an ultra-high purity gas storage container;
The leg portion 6 of the container valve 5 is inserted into the valve mounting hole 3 of the container mouth 2 and is fixed in an airtight manner.

Regarding the above container valve connection device, Figures 1 and 3
This will be explained in more detail based on the figures.

A cap nut 8 is provided into which the leg portion 6 of the container valve 5 is rotatably fitted. Inside the upper half of the cap nut 8, a cylindrical presser foot 10 is fitted into an intermediate height portion 9 of the circumferential surface of the leg portion 6 so as to project outward in the radial direction and cannot be moved downwardly.

That is, a male thread 12 is formed on the outer periphery of the mid-height portion 9 of the leg portion 6, and a female thread 13 that is screwed into the male thread 12 is formed within the cylinder of the presser foot 10. Further, a plurality of rotation grooves 14 are formed in the lower part of the presser foot 10 along its outer peripheral wall.

When assembling the presser foot 10 to the leg portion 6, the presser foot 10 is screwed through the rotation groove 14 described above. The upward movement beyond a predetermined amount is regulated by the upper edge 9a of the intermediate height portion 9 of the leg portion 6. In this state, a jig (not shown) is inserted into the rotation groove 14 and the male screw 12 is caulked or welded. This prevents the presser foot 10 from rotating, in other words from moving downward.

On the other hand, a rotation preventing means 16 is provided for non-rotatably inserting the lower circumferential surface 6a of the leg portion 6 into the valve mounting hole 3 of the container mouth 2. The anti-rotation means 16 includes a recess 17 formed in the lower circumferential surface 6a and having a semicircular shape in plan view, and a recess 17 formed in the peripheral wall 3a of the valve mounting hole 3, facing the recess 17 and having the same shape. It consists of a recess 18 and a detent pin 19 fitted between these recesses 17 and 18.

In addition, the lower surface 6b of the leg portion 6 and the lower surface 3 of the valve mounting hole 3
A metal gasket 21 is interposed between the This gasket 21 is composed of a spring-loaded metal C ring.

When inserting the leg portion 6, the cap nut 8 (indicated by the two-dot chain line in FIG. 1), which had been moved upward, is screwed into the male screw 2a formed on the outer circumferential surface of the container opening 2 (indicated by the two-dot chain line in FIG. 1). (solid line diagram), this bag nut 8
The presser foot 10 is pressed downward by the inner flange 22 of the presser foot 10. As a result, the leg portion 6 is pressed against the container mouth 2 and fixed in an airtight manner via the gasket 21.

Note that the reference numeral 23 in FIG. 1 is a lock nut.

Means is provided to prevent the leg portion 6 of the container valve 5 in the above configuration from being damaged when the container falls.
That is, the outer diameter Da at the midway point in the vertical direction of the leg portion 6
is formed to have approximately the same dimension as the root diameter Db of the male thread 12 formed in the mid-height portion 9. In this way, when the ultra-high purity gas storage container 1 falls and an impact is applied to the container valve 5, this impact force is dispersed over the entire length of the leg 6, and the root diameter Db of the male thread 12 is
Stress will no longer be concentrated in the area.

Therefore, damage to the leg portion 6 is effectively prevented.

(Second Embodiment) FIG. 4 shows a second embodiment, and a different configuration from the first embodiment will be explained. In this case, a circumferential groove 26 is formed in the intermediate height portion 9 of the circumferential surface of the leg portion 6 . On the other hand, the presser foot 10 is formed into a cylindrical shape and is divided into two parts with a plane passing through its vertical axis interposed therebetween. Both of these divided bodies are fitted into the circumferential groove 26, respectively, and are clamped to the circumferential groove 26 via a retaining ring 27 made of a spring.

In this way, there is no need to form the male threaded portion 12 on the leg portion 6 as in the first embodiment.
The effort of processing can be saved.

<Effects of the invention> As explained in the operation section above, in the present invention, the legs are inserted into the valve mounting hole while being prevented from rotating, which eliminates the generation of metal abrasion particles due to friction due to high surface pressure. I can do things. Moreover, metal abrasion fine particles are generated between the screw-fitting surfaces of the cap nut and the container mouth, and between the contact surfaces of the cap nut and the presser foot, but this fine powder is difficult to enter into the valve mounting hole, and it is difficult for the metal wear particles to enter the valve mounting hole. Since it is shut off, intrusion into the gas storage container is completely prevented.

Therefore, the ultra-high purity gas that is later filled into the gas storage container may become contaminated or have a reduced purity due to the metal abrasion particles, or the metal abrasion particles may adhere to the container valve or pressure regulator. Accidents such as valve seat leaks can be eliminated.

[Brief explanation of the drawing]

The figures show examples of this invention, and the figures 1 to 3
The figure shows the first embodiment. Figure 1 is a vertical sectional view of the container valve connecting device, an enlarged view of a portion of Figure 2, an overall view, and Figure 3 is a perspective view of the presser foot. FIG. 4 shows a second embodiment and is a diagram corresponding to FIG. 1. 1... Ultra-high purity gas storage container, 2... Container mouth,
2a...male thread, 3...valve mounting hole, 3b...bottom surface, 5...container valve, 6...leg, 6a...lower circumferential surface, 6b...bottom surface, 8...cap nut, 9... Midway height portion, 10...presser foot, 16...rotation prevention means, 21...gasket, 22...inner flange portion.

Claims (1)

[Scope of utility model registration request] In a device for connecting a container valve to an ultra-high-purity gas storage container, in which a leg portion 6 of a container valve 5 is inserted into a valve mounting hole 3 of a container mouth 2 of an ultra-high-purity gas storage container 1 and fixed in an airtight manner, the container valve A cap nut 8 is rotatably fitted onto the leg portion 6 of the cap nut 8, and the presser foot 10 is lowered into the upper half of the cap nut 8 with the presser foot 10 protruding in the radial direction. The lower circumferential surface 6a of the leg 6 is unrotatably inserted into the valve mounting hole 3 of the container mouth 2 using the stopper means 16, and the lower surfaces 6b, 3b of the leg 6 and the valve mounting hole 3 are A gasket 21 is interposed between the cap nuts 8 and the male threads 2 on the outer peripheral surface of the container mouth 2.
The container for an ultra-high purity gas storage container is characterized in that the leg part 6 is pressed against the container mouth 2 via the presser foot 10 by the inner flange part 22 of the upper part of the cap nut 8 and fixed by screwing into the container. Valve connection device.