JPH0240440U - - Google Patents
Info
- Publication number
- JPH0240440U JPH0240440U JP11814988U JP11814988U JPH0240440U JP H0240440 U JPH0240440 U JP H0240440U JP 11814988 U JP11814988 U JP 11814988U JP 11814988 U JP11814988 U JP 11814988U JP H0240440 U JPH0240440 U JP H0240440U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- mass flow
- flow rate
- supply device
- gas line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
第１図は本考案に係るガス供給装置の一実施例
の系統図、第２図及び第３図は本考案のための２
種の実施例の系統図、第４図は従来のガス供給装
置の系統図である。
１…原料タンク、２…原料液、３…加熱器、４
…メインガスライン、６…メインガスライン用自
動弁、７…質量流量制御器（ＭＦＣ）、８…パー
ジガスライン、９…パージガスライン用自動弁、
１０…質量流量検出器（ＭＦＭ）、１１…校正用
ガスライン、１２…校正用ガスライン開閉弁。
Figure 1 is a system diagram of an embodiment of the gas supply device according to the present invention, and Figures 2 and 3 are two
FIG. 4 is a system diagram of a conventional gas supply device. 1... Raw material tank, 2... Raw material liquid, 3... Heater, 4
...Main gas line, 6...Automatic valve for main gas line, 7...Mass flow controller (MFC), 8...Purge gas line, 9...Automatic valve for purge gas line,
10...Mass flow rate detector (MFM), 11...Gas line for calibration, 12...Gas line for calibration valve.
Claims (1)
つてガスの質量流量の制御を行つて該ガスの供給
を行うガス供給装置において、前記ガスライン中
に質量流量検出器が並設されていることを特徴と
するガス供給装置。 In a gas supply device that supplies the gas by controlling the mass flow rate of the gas using a mass flow rate controller installed in the gas line, a mass flow rate detector is installed in parallel in the gas line. A gas supply device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11814988U JPH0240440U (en) | 1988-09-08 | 1988-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11814988U JPH0240440U (en) | 1988-09-08 | 1988-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0240440U true JPH0240440U (en) | 1990-03-19 |
Family
ID=31362253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11814988U Pending JPH0240440U (en) | 1988-09-08 | 1988-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240440U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58111314A (en) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | Method and apparatus for controlling gas flow rate |
| JPS6340739A (en) * | 1986-08-06 | 1988-02-22 | Sumitomo Electric Ind Ltd | Calibration method and device for mass flow controller |
| JPS63129033A (en) * | 1986-11-19 | 1988-06-01 | Sumitomo Electric Ind Ltd | Process for feeding raw material for glass |
| JPS63176328A (en) * | 1987-01-14 | 1988-07-20 | Sumitomo Electric Ind Ltd | Raw material supply method and device |
-
1988
- 1988-09-08 JP JP11814988U patent/JPH0240440U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58111314A (en) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | Method and apparatus for controlling gas flow rate |
| JPS6340739A (en) * | 1986-08-06 | 1988-02-22 | Sumitomo Electric Ind Ltd | Calibration method and device for mass flow controller |
| JPS63129033A (en) * | 1986-11-19 | 1988-06-01 | Sumitomo Electric Ind Ltd | Process for feeding raw material for glass |
| JPS63176328A (en) * | 1987-01-14 | 1988-07-20 | Sumitomo Electric Ind Ltd | Raw material supply method and device |