JPH0241633Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] Usually, a printed wiring board (hereinafter simply referred to as a board) is manufactured by subjecting a board on which a circuit pattern is printed to a development process, a corrosion process, a peeling process, etc.

In this processing process, in order to obtain a highly accurate circuit pattern and to prevent the processing liquid from leaking outside, the processed substrate is
When the liquid is transferred to the next processing chamber, the liquid is drained using a squeezing roller, and then a predetermined process is performed.

The present invention relates to an improvement of the substrate transport device of this liquid draining section.

[Prior Art] FIGS. 3 and 4 show a conventional general liquid draining device, in which 51 is a processing chamber, 52 is a cleaning chamber, and 5
3 is the partition wall between both chambers 51 and 52, and at key points,
A horizontal rectangular passage hole 54 is cut out.

A large number of roller shafts 55 arranged in front and behind the passage hole 54 at the same height and parallel to the passage hole 54 in both chambers 51 and 52 are equipped with a large number of thin-walled transport wheels of equal diameter. 56 is fitted,
An O-ring 57 is fitted around its circumferential surface.

Between the conveying wheels 56 in the first and second rows from the partition wall 53 in the cleaning chamber 52, there are sponge-like wheels parallel to the passage hole 54 and in light contact with each other.
A pair of upper and lower squeezing rollers 58 having approximately the same diameter as the conveyance wheel 56 are provided.

Reference numerals 59 and 60 are treatment liquid and cleaning water injection nozzles, respectively.

In the above-mentioned device, the substrate 61 is connected to the transport wheel 5.
6 and passes through the processing chamber 51, the processing liquid injected from the processing liquid injection nozzle 59 performs a predetermined process, passes through the passage hole 54, and is squeezed out by the squeezing reroller 58. After the washing water is washed, the washing water is sprayed from the spray nozzle 60 into the washing water.
Washed.

In order to improve the liquid draining effect in such an apparatus, in the apparatus disclosed in Japanese Patent Publication No. 52-21463, the upper and lower surfaces of the substrate 61 immediately after passing through the squeezing roller 58 are coated in a direction opposite to the conveying direction. A pair of upper and lower injection boxes are provided on the top and bottom, each of which sprays compressed air through a slit.

In addition, in the apparatus disclosed in Japanese Utility Model Application Publication No. 54-175554, the treatment liquid injection nozzle 59 closest to the passage hole 54 and the cleaning water injection nozzle 60 are placed near the substrate 61, respectively, to convey the liquid. The processing liquid and the cleaning liquid are sprayed in the opposite direction and the same direction.

However, with the above-mentioned substrate transfer device, there is no problem if the substrate 61 is made of a hard material, but if the substrate 61 is made of a flexible material that has become widely used in recent years, the tip of the substrate 61 may be As shown by the two-dot chain line, due to the weight of the substrate 61, the weight of the processing liquid attached to it, and the injection pressure of the processing liquid, the substrate 61 curves in the gap between the transport wheels 56, and the board 61 bends when caught by the transport wheels 56. or transportation wheel 5
It may fall from 6.

In order to solve this problem, devices as shown in FIGS. 5 and 6 have been conventionally provided. The configuration will be briefly explained.

Note that the same members as those described above are given the same reference numerals, and the description thereof will be omitted.

In this device, the conveying wheels 56 are arranged in a staggered manner to narrow the arrangement pitch of each wheel shaft 55, and the conveying wheels 56 that face each other in the front and back across the partition wall 53 are arranged in a staggered manner. Instead of the diameter pulley 62, an endless belt 63 is wound around to prevent the board 61 from getting caught or falling as described above.

[Problems that this invention attempts to solve]

However, in this device, the tip of the substrate 61 that has been conveyed at a constant speed inside the processing chamber 51 is
When it hits the contact part 8, it is slightly decelerated until the tip is completely bitten.

Furthermore, since the conveyor wheel 56 and the squeeze roller 58 have the same diameter, when the substrate 61 bites into the squeeze roller 58, the outer diameter of the conveyor wheel 56 becomes larger than the outer diameter of the squeeze roller 58, and as a result, the squeeze roller There was a tendency for the substrate transport speed by the 58 to be slower than that by the transport wheels.

Therefore, during this time, the upper side of the endless belt 63 that is transporting the substrate 61 has a relaxed portion and a tense portion due to friction.

Further, the front edge of the substrate 61 to be conveyed is usually not parallel to the axis of the squeezing roller 58, but is slightly inclined in the front and rear directions, so that either the right or left corner of the front edge is squeezed first. It is bitten into the roller 58, and then the front edge is gradually bitten into the corner.

That is, the part of the board 61 that is decelerated moves on the front edge from one corner that is bitten to the other corner, until the entire front edge is completely bitten. A speed difference occurs between one corner and the sides thereof.

Therefore, a rotational force is generated in the substrate 61 around the corner where the substrate 61 is bitten, and the endless belt 63 on which the substrate 61 is placed is subjected to a frictional force perpendicular to the conveying direction.

The above two effects cannot be completely eliminated even if the diameter and rotational speed of the squeezing roller 58 are adjusted.
As a result, this device had the disadvantage that the endless belt 63 could come off.

Particularly, this phenomenon occurs when the lower squeezing roller 58 is conveyed by the endless belt 63 when the hard and thick substrate 61 is conveyed.
Due to the shape of the front end surface of the substrate 61, when the substrate 61 is bitten by the squeezing roller 58, it is tilted downward and the endless belt 63
This can easily occur if pressure is applied to the surface.

[Means for solving problems]

The present invention provides a substrate transport device in a liquid draining section of a substrate processing apparatus, which is composed of a transport wheel for transporting the substrate and a pulley provided coaxially with the transport wheel to stretch an endless belt. By doing so, the above-mentioned problems are solved.

[Effect]

The device of the present invention uses conveying wheels to convey the substrate even in the liquid draining section, and since the endless belt only supports and guides the curved end of the flexible substrate, it will not come off the pulley. do not have.

〔Example〕

Figures 1 and 2 show an embodiment of the device of the present invention.
9, 10, 11 are the above 51, 52, 5 respectively
3, 54, 55, 56, 57, 58, 59, 6
Same as 0,61, processing chamber, cleaning chamber, partition wall, passage hole, wheel shaft, conveyance wheel, O-ring,
These are a squeeze roller, a treatment liquid spray nozzle, a cleaning water spray nozzle, and a substrate, and the conveyance wheels 6 are arranged in a staggered manner, similar to the apparatus shown in FIGS. 3 and 4.

As shown in FIG. 2, pulleys 12 facing each other in the front and back and having a slightly smaller diameter are fitted in both wheel shafts 5 which are close to each other with the partition wall 3 in between, and which are close to each transport wheel 6 and have a slightly smaller diameter than the conveyor wheels 6. 13 is repeated.

The upper surface of the upper side of the endless belt 13 is located slightly below the upper end of the O-ring 7 of the conveyance wheel 6,
It is desirable that the extent of this is so slight that the tip of the substrate 11 does not touch the endless belt 13 at all times.

In this apparatus, the substrate 11 is conveyed by the conveyance wheel 6 and the squeeze roller 8. When the substrate 11 passes through the squeeze roller 8, the diameter of the squeeze roller 8 is slightly reduced due to its thickness, reducing the conveyance speed. It is desirable to increase the diameter of the squeezing roller 8 accordingly.

However, if the substrate 11 is extremely thick, a decrease in the conveyance speed is unavoidable, so if the conveyance wheels 6 before and after the squeeze roller 8 are fitted to the wheel shaft 5 so that they can rotate freely, the substrate 11 and conveyance speed can be reduced. It is possible to prevent the surface of the substrate 11 from being damaged by the slip of the wheel 6.

Moreover, the conveyance wheel 6 and the pulley 12 may be manufactured integrally.

[Effects of this invention]

In the present invention, the endless belt 13 includes the substrate 1
1 is flexible, and when the tip is about to curve downward, it only supports the edge and guides it onto the conveyor wheel 6, so it does not come off the pulley 12, and moreover, when the tip tries to curve downward, the conveyor wheel 6 Even at the liquid draining section where the distance between transported to.

[Brief explanation of the drawing]

FIG. 1 is a central vertical sectional front view of the main parts of a substrate processing apparatus using the device of the present invention, and FIG. 2 is an A of FIG. 1.
- An enlarged cross-sectional view taken along line A; FIG. 3 is a central longitudinal sectional front view of the main parts of a substrate processing apparatus equipped with a conventional device; FIG. 4 is an enlarged cross-sectional view taken along line B-B in FIG. 3; The figure is a central longitudinal sectional front view of the main parts of a substrate processing apparatus equipped with an improved conventional device, and FIG.
6 is an enlarged vertical cross-sectional view taken along line CC in FIG. 5. FIG. DESCRIPTION OF SYMBOLS 1...Processing chamber, 2...Cleaning chamber, 3...Partition wall, 4...Passing hole, 5...Wheel shaft, 6...Transportation wheel, 7
... O-ring, 8... Squeezing roller, 9... Processing liquid spray nozzle, 10... Cleaning water spray nozzle, 11... Substrate, 1
2...Pulley, 13...Endless belt, 51...Processing chamber,
52...Cleaning chamber, 53...Partition wall, 54...Passing hole, 5
5...Wheel axis, 56...Transportation wheel, 57...
O-ring, 58... Squeezing roller, 59... Processing liquid spray nozzle, 60... Cleaning water spray nozzle, 61... Substrate,
62...Pulley, 63...Endless belt.

Claims (1)

[Claims for Utility Model Registration] (1) While the substrate being transported with a large number of transport wheels passes through a plurality of processing chambers partitioned by partition walls each having substrate passage holes, In the processing chamber, a predetermined process is performed with the processing liquid, and then the processing liquid is passed through a passage hole and drained by a squeezing roller installed near the passage hole, and then a predetermined process is carried out in the next processing chamber. In the liquid draining section of the substrate processing apparatus, a pulley with a diameter slightly smaller than that of the transport wheel is arranged in parallel with the shaft of the transport wheel adjacent to the front and back with the passage hole in between, so that the top surface of the upper side of the endless belt is
Make sure that it is below the top edge of the transport wheel.
A substrate transport device for a liquid draining section in a substrate processing apparatus, characterized in that the device is hung around a pulley. (2) Among the conveyance wheels that are close to each other across the passage hole, the conveyance wheel that is close to the squeezing roller is fitted onto the roller shaft so that it can rotate freely. Device.