JPH0214357U - - Google Patents
Info
- Publication number
- JPH0214357U JPH0214357U JP9120988U JP9120988U JPH0214357U JP H0214357 U JPH0214357 U JP H0214357U JP 9120988 U JP9120988 U JP 9120988U JP 9120988 U JP9120988 U JP 9120988U JP H0214357 U JPH0214357 U JP H0214357U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- modeled
- registration request
- model registration
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000001883 metal evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の説明図、第２図
は従来例の説明図である。 １……真空チヤンバ、２……イオン源、３……
金属蒸発源、４……膜形成対象、５……ノズル。
は従来例の説明図である。 １……真空チヤンバ、２……イオン源、３……
金属蒸発源、４……膜形成対象、５……ノズル。
Claims (1)
- 膜形成対象を内部に配置した真空チヤンバと、
この真空チヤンバ内の前記模形成対象の上部に配
置されたイオン源と、前記真空チヤンバ内に配置
されて蒸発金属を前記膜形成対象に向けるノズル
を有する加熱蒸発方式の金属蒸発源とを備えた薄
膜形成装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9120988U JPH0214357U (ja) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9120988U JPH0214357U (ja) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214357U true JPH0214357U (ja) | 1990-01-29 |
Family
ID=31315696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9120988U Pending JPH0214357U (ja) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214357U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02138673U (ja) * | 1989-04-25 | 1990-11-20 | ||
| JPH0617667U (ja) * | 1992-08-07 | 1994-03-08 | 重夫 落合 | にぎりばさみ |
-
1988
- 1988-07-08 JP JP9120988U patent/JPH0214357U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02138673U (ja) * | 1989-04-25 | 1990-11-20 | ||
| JPH0617667U (ja) * | 1992-08-07 | 1994-03-08 | 重夫 落合 | にぎりばさみ |