JPH024236U - - Google Patents
Info
- Publication number
- JPH024236U JPH024236U JP6837189U JP6837189U JPH024236U JP H024236 U JPH024236 U JP H024236U JP 6837189 U JP6837189 U JP 6837189U JP 6837189 U JP6837189 U JP 6837189U JP H024236 U JPH024236 U JP H024236U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- model registration
- holding jig
- cut
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図及び第２図は、本考案の治具を用いてウ
エーハ載置ボートを持ち上げる状態を説明するた
めの模式的正面図、第３図の図ａ及び図ｂは、従
来のウエーハボート搬送用保持治具の代表的な二
つのタイプの概要斜視図で、第４図は、ウエーハ
を載置したボートの概要斜視図である。
図中の符号：１……石英ガラス管、２……搬送
アーム、３……ウエーハ、４……ウエーハボート
、５……脚、６……エツジ部、７……環状縁どり
部、８……空孔。
1 and 2 are schematic front views for explaining the state in which a wafer loading boat is lifted using the jig of the present invention, and views a and b in FIG. FIG. 4 is a schematic perspective view of two typical types of holding jigs, and FIG. 4 is a schematic perspective view of a boat on which wafers are placed. Codes in the diagram: 1...Quartz glass tube, 2...Transport arm, 3...Wafer, 4...Wafer boat, 5...Legs, 6...Edge part, 7...Annular edge part, 8... Vacancy.
Claims (1)
成されたウエーハボート搬送用保持治具において
、該切欠かれた搬送アーム部の長さ方向の両エツ
ジ部を肉盛りされた環状の縁どりに形成してなる
実用性の優れたウエーハボート搬送用保持治具。 ２ 環状の縁どりの空孔に、高強度かつ高耐熱性
材料を充てんした実用新案登録請求の範囲第１項
記載の治具。[Claims for Utility Model Registration] 1. In a holding jig for wafer boat transport formed by partially cutting out a quartz glass tube in the axial direction, both edges in the length direction of the cut-out transport arm are cut out. A highly practical holding jig for transporting wafer boats that is formed into a raised annular border. 2. The jig according to claim 1 of the utility model registration, in which the annular bordered hole is filled with a high-strength and highly heat-resistant material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989068371U JPH0632678Y2 (en) | 1989-06-12 | 1989-06-12 | Wafer boat holding jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989068371U JPH0632678Y2 (en) | 1989-06-12 | 1989-06-12 | Wafer boat holding jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH024236U true JPH024236U (en) | 1990-01-11 |
| JPH0632678Y2 JPH0632678Y2 (en) | 1994-08-24 |
Family
ID=31293693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989068371U Expired - Lifetime JPH0632678Y2 (en) | 1989-06-12 | 1989-06-12 | Wafer boat holding jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632678Y2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5699851U (en) * | 1979-12-27 | 1981-08-06 | ||
| JPS6078137U (en) * | 1983-11-02 | 1985-05-31 | 信越石英株式会社 | Wafer transfer device |
| JPS60119715A (en) * | 1983-12-01 | 1985-06-27 | Toshiba Ceramics Co Ltd | Conveying implement for semiconductor wafer boat manufactured of quartz glass |
-
1989
- 1989-06-12 JP JP1989068371U patent/JPH0632678Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5699851U (en) * | 1979-12-27 | 1981-08-06 | ||
| JPS6078137U (en) * | 1983-11-02 | 1985-05-31 | 信越石英株式会社 | Wafer transfer device |
| JPS60119715A (en) * | 1983-12-01 | 1985-06-27 | Toshiba Ceramics Co Ltd | Conveying implement for semiconductor wafer boat manufactured of quartz glass |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632678Y2 (en) | 1994-08-24 |