JPH0247652U - - Google Patents
Info
- Publication number
- JPH0247652U JPH0247652U JP12587188U JP12587188U JPH0247652U JP H0247652 U JPH0247652 U JP H0247652U JP 12587188 U JP12587188 U JP 12587188U JP 12587188 U JP12587188 U JP 12587188U JP H0247652 U JPH0247652 U JP H0247652U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- rotation
- spin chuck
- vibration
- speed rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Description
第１図は本考案の一実施例の縦断面図、第２図
は本考案の他の実施例の縦断面図である。
１……第１モーター、２……第２モーター、３
……ブラケツト、４……スピンチヤツク、５……
小径プーリー、６……大径プーリー、７……ベル
ト、８……ワンウエイクラツチ、９……スラスト
ベアリング、１０……ウエハー、１１……第１モ
ーター、１２……第２モーター、１３……ブラケ
ツト、１４……伝達体、１５……ワンウエイクラ
ツチ、１６……スピンチヤツク、１７……ウエハ
ー。
FIG. 1 is a longitudinal cross-sectional view of one embodiment of the present invention, and FIG. 2 is a longitudinal cross-sectional view of another embodiment of the present invention. 1...First motor, 2...Second motor, 3
...Bracket, 4...Spin chuck, 5...
Small diameter pulley, 6... Large diameter pulley, 7... Belt, 8... One-way clutch, 9... Thrust bearing, 10... Wafer, 11... First motor, 12... Second motor, 13... Bracket , 14... Transmission body, 15... One-way clutch, 16... Spin chuck, 17... Wafer.
Claims (1)
置し回転するスピンチヤツクとスピンチヤツクに
高速回転を与える第１モーターと、スピンチヤツ
クに振動及び低速回転を与える第２モーターと、
第１モーターの回転と第２モーターの回転とを切
離すワンウエイクラツチ２モーターと、第１モー
ターの回転と第２糧とを有し、現像処理時に回転
するスピンチヤツクに振動を与える事を特徴とす
る回転現像装置。 a spin chuck on which a wafer having an exposed photosensitive resin layer is placed and rotated; a first motor that provides high speed rotation to the spin chuck; and a second motor that provides vibration and low speed rotation to the spin chuck;
It is characterized by having two one-way clutch motors that separate the rotation of the first motor and the rotation of the second motor, and the rotation of the first motor and the second feeder, which gives vibration to the spin chuck that rotates during the developing process. Rotary developing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587188U JPH0247652U (en) | 1988-09-26 | 1988-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12587188U JPH0247652U (en) | 1988-09-26 | 1988-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247652U true JPH0247652U (en) | 1990-03-30 |
Family
ID=31376860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12587188U Pending JPH0247652U (en) | 1988-09-26 | 1988-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247652U (en) |
-
1988
- 1988-09-26 JP JP12587188U patent/JPH0247652U/ja active Pending
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