JPH0247762U - - Google Patents
Info
- Publication number
- JPH0247762U JPH0247762U JP12596588U JP12596588U JPH0247762U JP H0247762 U JPH0247762 U JP H0247762U JP 12596588 U JP12596588 U JP 12596588U JP 12596588 U JP12596588 U JP 12596588U JP H0247762 U JPH0247762 U JP H0247762U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- rotary encoder
- rolling
- electron microscope
- attitude control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の一実施例正断面図、第２図は
第１図のピエゾ駆動機構斜視図、第３図は第２図
のアクチユエータシユーが試料ホルダーに接触し
ている部分の正面図、第４図は第１図の試料ホル
ダー支持装置側面図、第５図は試料ホルダーのロ
ータリーエンコーダ正断面図である。
１…真空試料室、２…電子顕微鏡ヘツド、３…
姿勢制御部筐体、４…超音波モータ、５…垂直回
転軸、６，７…支持台、８，９…軸受、１０…回
転テーブル、１１，１１′…ハウジング、１２…
試料ホルダー、１２ａ…試料保持部、１３，１３
′…ピエゾ駆動機構、１９…ロータリーエンコー
ダ、１９ａ…回転軸、１９ｂ…スリツター、１９
ｃ…内輪、１９ｄ…外輪、１９ｅ…筺体、１９ｆ
…ボール。
Fig. 1 is a front sectional view of an embodiment of the present invention, Fig. 2 is a perspective view of the piezo drive mechanism shown in Fig. 1, and Fig. 3 is a portion of the actuator shoe in Fig. 2 in contact with the sample holder. 4 is a side view of the sample holder support device of FIG. 1, and FIG. 5 is a front sectional view of the rotary encoder of the sample holder. 1... Vacuum sample chamber, 2... Electron microscope head, 3...
Attitude control unit housing, 4... Ultrasonic motor, 5... Vertical rotation axis, 6, 7... Support stand, 8, 9... Bearing, 10... Rotating table, 11, 11'... Housing, 12...
Sample holder, 12a... Sample holding section, 13, 13
'... Piezo drive mechanism, 19... Rotary encoder, 19a... Rotating shaft, 19b... Slitter, 19
c...Inner ring, 19d...Outer ring, 19e...Housing, 19f
…ball.
Claims (1)
ー及び該回転軸を軸支する転がり軸受の内輪、外
輪および転動体を鋼で構成するとともに、前記内
、外輪の軌道部および転動体の表面に潤滑性金属
のイオン注入もしくは軟質金属コーテイングを施
した電子顕微鏡用真空試料室内の試料姿勢制御装
置のロータリーエンコーダ。 (2) 前記転がり軸受の転動体がセラミツクでな
る請求項第(1)項記載の電子顕微鏡用真空試料室
内の試料姿勢制御装置のロータリーエンコーダ。[Claims for Utility Model Registration] (1) A rotating shaft, a slitter fixed to the rotating shaft, and an inner ring, an outer ring, and a rolling element of a rolling bearing that pivotally supports the rotating shaft are made of steel; A rotary encoder for a sample attitude control device in a vacuum sample chamber for an electron microscope, in which the surfaces of the orbit and rolling elements are implanted with lubricating metal ions or coated with a soft metal. (2) A rotary encoder for a sample attitude control device in a vacuum sample chamber for an electron microscope according to claim (1), wherein the rolling elements of the rolling bearing are made of ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12596588U JPH0247762U (en) | 1988-09-27 | 1988-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12596588U JPH0247762U (en) | 1988-09-27 | 1988-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0247762U true JPH0247762U (en) | 1990-04-03 |
Family
ID=31377043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12596588U Pending JPH0247762U (en) | 1988-09-27 | 1988-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247762U (en) |
-
1988
- 1988-09-27 JP JP12596588U patent/JPH0247762U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0247763U (en) | ||
| JPS6342102Y2 (en) | ||
| JPH031346U (en) | ||
| JPS6196601U (en) | ||
| JPH0630326Y2 (en) | Vacuum chuck spindle seal fitting | |
| JPH01156806U (en) | ||
| JPH03120361U (en) | ||
| JPH0340611U (en) | ||
| JPS6296120U (en) | ||
| JPS62202052U (en) | ||
| JPH042985U (en) | ||
| JPS6263454U (en) | ||
| JPS58165847U (en) | rotating anode x-ray tube | |
| JPS63127847U (en) | ||
| JPS63113563U (en) | ||
| JPH01116576U (en) | ||
| JPS5951442U (en) | rotating anode x-ray tube | |
| JPS62123886U (en) | ||
| JPH0174240U (en) | ||
| JPH03103103U (en) | ||
| JPS6440255U (en) | ||
| JPS6154432U (en) | ||
| JPS63100965U (en) | ||
| JPH0270904U (en) | ||
| JPH02117723U (en) |